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fluid simulation of the pulsed bias effect on inductively coupled nitrogen discharges for low-voltage plasma immersion ion implantation

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Chinese Physics B 2017年第1期26卷 290-297页

作者： Xiao-Yan Sun Yu-Ru Zhang Xue-Chun Li You-Nian Wang Key Laboratory of Materials Modification by Laser Ion and Electron Beams （Ministry of Education） School of Physics and Optoelectronic Technology Dalian University of Technology Dalian 116024 China

Planar radio frequency inductively coupled plasmas（ICP） are employed for low-voltage ion implantation processes,with capacitive pulse biasing of the substrate for modulation of the ion energy. In this work, a two-dimensional（2D） selfconsistent fluid model has been employed to investigate the influence of the pulsed bias power on the nitrogen plasmas for various bias voltages and pulse frequencies. The results indicate that the plasma density as well as the inductive power density increase significantly when the bias voltage varies from 0 V to-4000 V, due to the heating of the capacitive field caused by the bias power. The N＋fraction increases rapidly to a maximum at the beginning of the power-on time, and then it decreases and reaches the steady state at the end of the glow period. Moreover, it increases with the bias voltage during the power-on time, whereas the N2-＋ fraction exhibits a reverse behavior. When the pulse frequency increases to 25 kHz and40 kHz, the plasma steady state cannot be obtained, and a rapid decrease of the ion density at the substrate surface at the beginning of the glow period is observed.

关键词： fluid simulation low-voltage plasma immersion ion implantation N2 inductive discharge

Surface Tension Model Based on Implicit Incompressible Smoothed Particle Hydrodynamics for fluid simulation

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Journal of Computer Science & Technology 2017年第6期32卷 1186-1197页

作者： Xiao-Kun Wang Xiao-Juan Ban Ya-Lan Zhang Si-Nuo Liu Peng-Fei Ye School of Computer and Communication Engineering University of Science and Technology Beijing Beijing 100083 China Beijing Key Laboratory of Knowledge Engineering for Material Science Beijing 100083 China

In order to capture stable and realistic microscopic features of fluid surface, a surface tension and adhesion method based on implicit incompressible SPH （smoothed particle hydrodynamics） is presented in this paper. It gives a steady and fast tension model and can solve the problem of not considering adhesion. Molecular cohesion and surface minimization are considered for surface tension, and adhesion is added to show the microscopic characteristics of the surface. To simulate surface tension and adhesion stably and efficiently, the surface tension and adhesion model is integrated to an implicit incompressible SPH method. The experimental results show that the method can better simulate surface features in a variety of scenarios compared with previous methods and meanwhile ensure stability and efficiency.

关键词： computer animation fluid simulation implicit incompressible smoothed particle hydrodynamics(IISPH) surface tension

Analysis of parallel multigrid methods in real-time fluid simulation

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International Journal of Modeling, simulation, and Scientific Computing 2017年第4期8卷 105-121页

作者： Feifei Wan Yong Yin Qin Zhang Xiuquan Peng Marine dynamic simulation and Control Laboratory of Dalian Maritime University Dalian Liaoning116026P.R.China

The multigrid method has been widely used in computational fluid dynamics(CFD)numerical calculations because of its strong *** achieve real-time simulation of a fluid in computer graphics(CG),the operation efficiency is also a significant factor to consider except for operational *** this problem,we introduced two multigrid cycling schemes,V-Cycle and full multigrid(FMG).Moreover,we have proposed a simple geometric multigrid method(GMG),and compared with the existing wide application of algebraic multigrid(AMG).All the calculations are the solution of parallel computing of GPU in this *** results showed that our approaches have improved the algorithm’s computational speed and convergence time,which prominently enhanced the efficiency of the fluid simulation.

关键词： Multigrid parallel fluid simulation

Adaptive smoothing length method based on weighted average of neighboring particle density for SPH fluid simulation

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Virtual Reality & Intelligent Hardware 2021年第2期3卷 129-141页

作者： Rongda ZENG Zihao WU Shengbang DENG Jian ZHU Xiaoyu CHI School of Computer Science Guangdong University of TechnologyGuangzhou 510006China Qingdao Research Institute of Beihang University Qingdao 266000China

Background In the smoothed particle hydrodynamics(SPH)fluid simulation method,the smoothing length affects not only the process of neighbor search but also the calculation accuracy of the pressure ***,it plays a crucial role in ensuring the accuracy and stability of *** In this study,an adaptive SPH fluid simulation method with a variable smoothing length is *** this method,the smoothing length is adaptively adjusted according to the ratio of the particle density to the weighted average of the density of the neighboring ***,a neighbor search scheme and kernel function scheme are designed to solve the asymmetry problems caused by the variable smoothing *** The simulation efficiency of the proposed algorithm is comparable to that of some classical methods,and the variance of the number of neighboring particles is ***,the visual effect is more similar to the corresponding physical *** The precision of the interpolation calculation performed in the SPH algorithm is improved using the adaptive-smoothing length scheme;thus,the stability of the algorithm is enhanced,and a larger timestep is possible.

关键词： fluid simulation SPH Smoothing length Adaptive Particle density

An efficient non-iterative smoothed particle hydrodynamics fluid simulation method with variable smoothing length

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Visual Computing for Industry,Biomedicine,and Art 2023年第1期6卷 1-13页

作者： Min Li Hongshu Li Weiliang Meng Jian Zhu Gary Zhang The School of Computer Science Guangdong University of TechnologyGuangzhou 510006China The School of Information Engineering Guangdong University of TechnologyGuangzhou 510006China The School of Advanced Manufacturing Guangdong University of TechnologyGuangzhou 510006China National Laboratory of Pattern Recognition Institute of Automation of the Chinese Academy of SciencesBeijing 100190China.

In classical smoothed particle hydrodynamics(SPH)fluid simulation approaches,the smoothing length of Lagrangian particles is typically *** major disadvantage is the lack of adaptiveness,which may compromise accuracy in fluid regions such as splashes and *** to address this problem used variable smoothing *** the existing methods are computationally complex and non-efficient,because the smoothing length is typically calculated using iterative ***,we propose an efficient non-iterative SPH fluid simulation method with variable smoothing length(VSLSPH).VSLSPH correlates the smoothing length to the density change,and adaptively adjusts the smoothing length of particles with high accuracy and low computational cost,enabling large time *** experimental results demonstrate the advantages of the VSLSPH approach in terms of its simulation accuracy and efficiency.

关键词： Smoothed particle hydrodynamics Variable smooth length fluid simulation

A simple approach for bubble modelling from multiphase fluid simulation

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Computational Visual Media 2015年第2期1卷 171-181页

作者： Bo Ren Yuntao Jiang Chenfeng Li Ming C.Lin CCCE&CS Nankai University Department of Computer Science and Technology Tsinghua University College of Engineering Swansea University Department of Computer Science University of North Carolina at Chapel Hill

This article presents a novel and flexible bubble modelling technique for multi-fluid simulations using a volume fraction representation. By combining the volume fraction data obtained from a primary multi-fluid simulation with simple and efficient secondary bubble simulation, a range of real-world bubble phenomena are captured with a high degree of physical realism, including large bubble deformation,sub-cell bubble motion, bubble stacking over the liquid surface, bubble volume change, dissolving of bubbles,etc. Without any change in the primary multi-fluid simulator, our bubble modelling approach is applicable to any multi-fluid simulator based on the volume fraction representation.

关键词： bubble volume fraction smoothed particle hydrodynamics fluid simulation

fluid simulation of the effect of a dielectric window with high temperature on plasma parameters in inductively coupled plasma

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Plasma Science and Technology 2023年第3期25卷 51-61页

作者：李娜韩道满张权治刘旭辉王英杰王友年 Key Laboratory of Materials Modification by Laser Ionand Electron Beams(Ministry of Education)School of PhysicsDalian University of TechnologyDalian 116024People’s Republic of China Lab of Advanced Space Propulsion and Beijing Engineering Research Center of Efficient and Green Aerospace Propulsion Technology Beijing Institute of Control EngineeringBeijing 100190People’s Republic of China

To maintain the high-density plasma source in inductively coupled plasma(ICP),very high radiofrequency power is often delivered to the antenna,which can heat the dielectric windows near the antenna to high *** high temperature can modulate the plasma characteristics to a large *** thus study the effect of dielectric window temperature on plasma parameters in two different ICP structures based on COMSOL *** distributions of various plasma species are examined at different dielectric window *** concentration of neutral gas is found to be largely modulated at high dielectric window temperature,which further affects the electron collision probability with neutrals and the electron ***,the electron density profiles are barely affected by the dielectric window temperature,which is mainly concentrated at the center of the reactor due to the fixed power input and pressure.

关键词： fluid simulation metastable argon dielectric window temperature inductively coupled plasma

Effect of coil and chamber structure on plasma radial uniformity in radio frequency inductively coupled plasma

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Plasma Science and Technology 2024年第7期26卷 58-66页

作者：赵洋周晓华高升荣宋莎莎赵玉真 Shaanxi International Joint Research Center for Applied Technology of Controllable Neutron Source Xijing UniversityXi’an 710123People’s Republic of China Technological Institute of Materials&Energy Science(TIMES) Xi’an Key Laboratory of Advanced Photo-electronics Materials and Energy Conversion DeviceSchool of Electronic InformationXijing UniversityXi’an 710123People’s Republic of China

Enhancing plasma uniformity can be achieved by modifying coil and chamber structures in radio frequency inductively coupled plasma(ICP)to meet the demand for large-area and uniformly distributed plasma in industrial *** study utilized a two-dimensional self-consistent fluid model to investigate how different coil configurations and chamber aspect ratios affect the radial uniformity of plasma in radio frequency *** findings indicate that optimizing the radial spacing of the coil enhances plasma uniformity but with a reduction in electron ***,optimizing the coil within the ICP reactor,using the interior point method in the Interior Point Optimizer significantly enhances plasma uniformity,elevating it from 56%to 96%within the range of the model ***,when the chamber aspect ratio k changes from 2.8 to 4.7,the plasma distribution changes from a center-high to a saddleshaped ***,the plasma uniformity becomes ***,adjusting process parameters,such as increasing source power and gas pressure,can enhance plasma *** findings contribute to optimizing the etching process by improving plasma radial uniformity.

关键词： inductively coupled plasma fluid simulation optimized coil chamber aspect ratio plasma uniformity

Effect of radio frequency bias on plasma characteristics of inductively coupled argon discharge based on fluid simulations

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Chinese Physics B 2020年第9期29卷 369-376页

作者： Xiao-Yan Sun Yu-Ru Zhang Sen Chai You-Nian Wang Yan-Yan Chu Jian-Xin He Textile and Garment Industry of Research Institute Zhongyuan University of TechnologyZhengzhou 450007China Key Laboratory of Materials Modification by Laser Ionand Electron Beams(Ministry of Education)School of PhysicsDalian University of TechnologyDalian 116024China China Special Equipment Inspection and Research Institute Beijing 100029China

t A fluid model is employed to investigate the effect of radio frequency bias on the behavior of an argon inductively coupled plasma(ICP).In particular,the effects of ICP source power,single-frequency bias power,and dual-frequency bias power on the characteristics of ICP are simulated at a fixed pressure of 30 mTorr(1 Torr=1.33322×102 Pa).When the bias frequency is fixed at 27.12 MHz,the two-dimensional(2D)plasma density profile is significantly affected by the bias power at low ICP source power(e.g.,50 W),whereas it is weakly affected by the bias power at higher ICP source power(e.g.,100 W).When dual-frequency(27.12 MHz/2.26 MHz)bias is applied and the sum of bias powers is fixed at 500 W,a pronounced increase in the maximum argon ion density is observed with the increase of the bias power ratio in the absence of ICP source *** the ratio of 27.12-MHz/2.26-MHz bias power decreases from 500 W/0 W to 0 W/500 W with the ICP source power fixed at 50 W,the plasma density profiles smoothly shifts from edge-high to center-high,and the effect of bias power on the plasma distribution becomes weaker with the bias power ratio ***,the axial ion flux at the substrate surface is characterized by a maximum at the edge of the *** the ICP source power is higher,the 2D plasma density profiles,as well as the spatiotemporal and radial distributions of ion flux at the substrate surface are characterized by a peak in the reactor center,and the distributions of plasma parameters are negligibly affected by the dual-frequency bias power ratio.

关键词： fluid simulation single-and dual-frequency bias power plasma distribution