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Reliability Analysis of flexure hinge Based on Kriging Method

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Journal of Donghua University(English Edition) 2016年第2期33卷 288-291页

作者：李贵杰徐佳谢朝阳胡盛勇 Institute of System Engineering China Academy of Engineering Physics Department of Electromechanical Engineering University of Macao

The uncertainty widely exists in the engineering ***,it is necessary to research the effect of uncertainty on the structural system. In this paper,the reliability and sensitivity of the flexure hinge, which is the key component of the compliant mechanisms,are investigated. The results of the reliability analysis can effectively guide the engineer to design and optimize the flexure hinge. In order to improve the calculating efficiency,the kriging method is introduced to estimate the failure probability and reliability sensitivity.

关键词： compliant mechanism flexure hinge reliability failure probability reliability sensitivity kriging method

Simulation to Compensate Ripple of Air Bearing Stage with flexure hinge Mechanisms

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Simulation to Compensate Ripple of Air Bearing Stage with Fl...

A simple compliance modeling method for flexure hinges

2011 2nd International Conference on Advanced Measurement and Test (AMT 2011)

作者： Dahoon Ahn Daegab Gweon Dongpyo Hong Department of Mechanical Engineering Korea Advanced Institute of Science and Technology Department of Mechanical System Engineering Chonbuk National University

This letter suggests a method to improve tracking performance of an H-type XY stage with air bearings and flexure hinge *** flexure hinge mechanisms are employed to prevent failure of the air bearings when the yaw motion error of the H-type stage is controlled using a control algorithm called gantry *** of the flexure hinge mechanism combined with the gantry control leads to occurrence of mutual *** should be handled to obtain good tracking *** of the mutual ripple and simulation of two compensation algorithms are presented.

关键词： Precision stage Yaw Mutual ripple flexure hinge gantry control

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Science China(Technological Sciences) 2015年第1期58卷 56-63页

作者： ZHU ZhiWei ZHOU XiaoQin WANG RongQi LIU Qiang School of Mechanical Science and Engineering Jilin University

Various types of flexure hinges have been introduced and implemented in a variety of fields due to their superior *** Castigliano’s second theorem,the Euler–Bernoulli beam theory based direct integration method and the unit-load method have been employed to analytically describe the elastic behavior of flexure ***,all these methods require prior-knowledge of the beam theory and need to execute laborious integration operations for each term of the compliance matrix,thus highly decreasing the modeling efficiency and blocking practical applications of the modeling *** this paper,a novel finite beam based matrix modeling(FBMM)method is proposed to numerically obtain compliance matrices of flexure hinges with various *** main concept of the method is to treat flexure hinges as serial connections of finite micro-beams,and the shearing and torsion effects of the hinges are especially considered to enhance the modeling *** means of matrix calculations,complete compliance matrices of flexure hinges can be derived effectively in one calculation process.A large number of numerical calculations are conducted for various types of flexure hinges with different shapes,and the results are compared with the ones obtained by conventional modeling *** demonstrates that the proposed modeling method is not only efficient but also accurate,and it is a more universal and more robust tool for describing elastic behavior of flexure hinges.

关键词： flexure hinge compliance matrix finite beam based matrix modeling modeling accuracy

Design and Dynamic Modeling of a 2-DOF Decoupled flexure-Based Mechanism

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Chinese Journal of Mechanical Engineering 2012年第4期25卷 688-696页

作者： QIN Yanding TIAN Yanling ZHANG Dawei School of Mechanical Engineering Tianjin University Tianjin 300072 China

flexure mechanisms with decoupled characteristics have been widely utilized in precision positioning ***,these mechanisms suffer from either slow response or low load ***,asymmetric design always leads to thermal *** order to solve these issues,a novel 2-DOF decoupled mechanism is developed by monolithically manufacturing sets of statically indeterminate symmetric（SIS） flexure structures in *** design helps to eliminate the thermal error and Finite Element Analysis（FEA） results show that the maximum coupling ratio between X and Y axes is below 0.25% when a maximum pretension force of 200 N is *** ignoring the mass effect,all the SIS flexure structures are simplified to ＂spring-damper＂ components,from which the static and dynamics model are *** relation between the first resonant frequency of the mechanism and the load is investigated by incorporating the load mass into the proposed dynamics *** results show that even with a load of 0.5 kg,the first resonant frequency is still higher than 300 Hz,indicating a high load *** mechanism＇s static and dynamic performances are experimentally *** linear stiffnesses of the mechanism at the working platform and at the driving point are measured to be 3.563 0 N·μm-1 and 3.362 1 N·μm-1,*** corresponding estimation values from analytical models are 3.405 7 N·μm-1 and 3.381 7 N·μm-1,which correspond to estimation errors of-4.41% and 0.6%,*** an additional load of 0.16 kg,the measured and estimated first resonant frequencies are 362 Hz and 365 Hz,*** estimation error is only 0.55%.The analytical and experimental results show that the developed mechanism has good performances in both decoupling ability and load capability;its static and dynamic performance can be precisely estimated from corresponding analytical *** proposed mechanism has wide potentials in precision positioning applic

关键词： precision positioning flexure hinge dynamics decoupled structure

Development of XY scanner with minimized coupling motions for high-speed atomic force microscope

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Journal of Central South University 2011年第3期18卷 697-703页

作者： PARK Jong-kyu MOON Won-kyu Department of Mechanical Engineering Changwon National University Department of Mechanical Engineering Pohang Univer sity of Science and Technology

The design and fabrication processes of a novel scanner with minimized coupling motions for a high-speed atomic force microscope （AFM） were addressed. An appropriate design modification was proposed through the analyses of the dynamic characteristics of existing linear motion stages using a dynamic analysis program, Recurdyn. Because the scanning speed of each direction may differ, the linear motion stage for a high-speed scanner was designed to have different resonance frequencies for the modes, with one dominant displacement in the desired directions. This objective was achieved by using one-direction flexure mechanisms for each direction and mounting one stage for fast motion on the other stage for slow motion. This unsymmetrical configuration separated the frequencies of two vibration modes with one dominant displacement in each desired direction, and hence suppressed the coupling between motions in two directions. A pair of actuators was used for each axis to decrease the crosstalk between the two motions and give a sufficient force to actuate the slow motion stage, which carried the fast motion stage, A lossy material, such as grease, was inserted into the flexure hinge to suppress vibration problems that occurred when using an input triangular waveforrn. With these design modifications and the vibration suppression method, a novel scanner with a scanning speed greater than 20 Hz is achieved.

关键词： atomic force microscope scanner piezoelectric stack actuator crosstalk flexure hinge

DEVELOPMENT OF A 3-DOF MICRO-POSITIONING WORKPIECE TABLE

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Chinese Journal of Mechanical Engineering 2004年第1期17卷 46-50页

作者： ZhangDawei TianYanling GaoYongsheng SchoolofMechanicalEngineering TianjinUniversityTianjin300072China SchoolofMechanicalEngineering HongKongUniversityofScienceandTechnologyHongKongChina

In order to achieve active grinding control, a novel numerical controlmicropositioning workpiece table with a resolution of 6 nm has been developed. The table is drivenby three piezoelectric actuators mounted on the base. An elastic structure with three half-notchflexure hinges is designed to apply preload to the piezoelectric actuators. The position of flexurebinges is also elaborately designed with consideration to reduce the bending deformation of themoving part. Three capacitive sensors are used to form close loop control system. Considering thetable as a damped 3-DOF mass-spring system, the models of static and dynamic stiffness and errorowing to the action of external forces have been established. In order to make the table have highresolution and positioning accuracy, an error compensation algorithm is implemented by using theestablished models. The experimental testing has been carried out to verify the performance of theworkpiece table and the established models of the micropositioning workpiece table.

关键词： Micropositioning workpiece table Piezoelectric actuator flexure hinge

Characteristics of Statically Indeterminate Symmetric flexure Structures

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Nanomanufacturing and Metrology 2023年第1期6卷 1-14页

作者： Yan-Ding Qin Yue-Yang Shi Bijan Shirinzadeh Yan-Ling Tian Da-Wei Zhang College of Artificial Intelligence Nankai UniversityTianjinChina Department of Mechanical and Aerospace Engineering Monash UniversityMelbourneAustralia School of Mechanical Engineering Tianjin UniversityTianjinChina

Statically indeterminate symmetric(SIS)flexure structures are symmetric structures with“clamped-clamped”boundary *** static indeterminacy and topological symmetry significantly attenuate the parasitic motions associated with statically determinate flexure ***,SIS flexure structures feature decoupled linear and angular motions,improved motion accuracy,high stiffness,and high *** SIS flexure structures have been more frequently utilized as prismatic joints,they can also be utilized as revolute *** study systematically investigates the characteristics of SIS flexure *** on the unified compliance models of a single flexure hinge,analytical compliance models of two fundamental types of SIS flexure structures are *** 1-degree-of-freedom or planar applications,multiple SIS-based structures can also be integrated into various configurations to transmit linear or angular *** stiffness models are also *** characteristics and possible applications of the SIS flexure structures are computationally investigated through case ***,several SIS prototypes are manufactured,and the modeling accuracy of the established stiffness models is experimentally verified.

关键词： Statically indeterminate structure flexure hinge Compliance modeling Prismatic joint

Design and Testing of a Novel Piezoelectric-Driven Microvibration Hammerhead

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Nanomanufacturing and Metrology 2023年第1期6卷 79-87页

作者： Zhiyong Guo Zhemin Shen Weidong Liu Zhiqiang Zhang Lifeng Zhang Xuhao Wang College of Aeronautical Engineering Civil Aviation University of ChinaTianjin 300300China

A novel microvibration hammerhead consists of a piezoelectric actuator and a double cross-shape compliant mechanism(DCCM)is presented in this *** output force of the piezoelectric actuator can be detected in real time by an insideinstalled pressure sensor.A theoretical model including the stiffness,first natural frequency,and stress of the DCCM and the displacement output of the piezoelectric actuator are established,and then they are further analyzed using the finite element analysis *** effects of the beam thickness on the static and dynamic properties are deeply analyzed and compared.A prototype micro hammering system is constructed by integrating the microvibration hammerhead assembly and controlling *** experiments are also carried out to verify the basic performance of the micro hammering system.

关键词： Piezoelectric flexure hinge Micro hammering

Compliance Modeling of a Compliant Stage with Symmetric Configuration

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Journal of Applied Mathematics and Physics 2020年第11期8卷 2500-2508页

作者： Yunsong Du Guohua Gao Faculty of Materials and Manufacturing Beijing University of Technology Beijing China College of Mechanical Engineering and Applied Electronics Technology Beijing University of Technology Beijing China

This paper presents the compliance modeling of a compliant stage with symmetric configuration. Empirical compliance equations for the circular flexure hinge are first introduced. Using the matrix method, the output compliance of a compliant stage with symmetric configuration is then obtained. Finally, the compliances derived from the proposed theoretical model and finite element analysis (FEA) are compared. It indicates that the results calculated by the theoretical model are in good agreement with those derived from FEA, which demonstrates the accuracy of the theoretical model.

关键词： flexure hinge Compliance Modeling Compliant Stage Symmetric Configuration