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检索条件"主题词=Film characteristic"
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Photocatalytic Property of TiO2 films Deposited by Pulsed DC Magnetron Sputtering
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Journal of Materials Science & Technology 2004年 第1期20卷 31-34页
作者: Wenjie ZHANG, Shenglong ZHU, Ying LI and Fuhui WANGState Key Laboratory for Corrosion and Protection, Institute of Metal Research, Chinese Academy of Sciences, Shenyang 110016, China Chinese Acad Sci Inst Met Res State Key Lab Corros & Protect Shenyang 110016 Peoples R China
TiO2 thin films were prepared by DC magnetron sputtering with the oxygen flow rate higher than the threshold. The film deposited for 5 h was of anatase phase with a preferred orientation along the direction, but the ... 详细信息
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