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A Comparative Study on the Microstructure and Properties of ITO Targets and Thin Films Prepared from Two Different Powders

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Acta Metallurgica Sinica(English Letters) 2021年第5期34卷 675-693页

作者： Fangsheng Mei Tiechui Yuan Ruidi Li Jingwei Huang Powder Metallurgy Research Institute Central South UniversityChangsha410083China Science and Technology on High Strength Structural Materials Laboratory Central South UniversityChangsha410083China

With the rapid development of indium tin oxide(ITO)in the electronic display industry,choosing which raw powders to prepare high-quality ITO targets has always been a controversial *** the work,in order to clearly understand the effect of the raw powders on the microstructure and properties of ITO targets and thin films,tin-doped indium oxide(dITO)and In_(2)O_3-SnO_(2)mixed(mITO)powders were chosen to prepare ITO targets for depositing the films and a comparative study on their microstructure and properties was *** is found that,(1)dITO targets possess a higher solid solubility of tin in indium oxide and more uniform elemental distribution,while there are a higher density,a finer grain size and a higher mass ratio of In_(2)O_3 to SnO_(2)for the mITO targets;(2)dITO films with more coarser columnar grains and a rougher surface prefer to grow along the[100]direction in an Ar atmosphere;(3)the conductive property of ITO films only depends on the doping amount of tin and is independent of the raw powders and the preparation process of the target source;(4)dITO films possess the superior optical property and narrower optical band gap;(5)the etching property of mITO films is superior to that of dITO films due to the lower solid solubility of tin in indium oxide.

关键词： Tin-doped indium oxide In_(2)O_3-SnO_(2) mixed powder Solid solubility of tin in indium oxide Photoelectric property etching property

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