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Nanomanufacturing and Metrology 2022年第3期5卷 191-208页

作者： Jingming Zhang Yicheng Li Kun Cao Rong Chen State Key Laboratory of Digital Manufacturing Equipment and Technology School of Mechanical Scienceand EngineeringHuazhong Universityof Science and Technology1037 LuoyuRoadWuhan 430074China State Key Laboratory of Materials Processing and Die&Mould Technology School of Materials Science and EngineeringHuazhongUniversityof Science and Technology1037 Luoyu RoadWuhan 430074China

Atomic layer deposition(ALD)is a thin-film fabrication technique that has great potential in nanofabrication.Based on its self-limiting surface reactions,ALD has excellent conformality,sub-nanometer thickness control,and good process compatibility.These merits promote the industrial and research applications of ALD in various fields.This article provides an introduction to ALD and highlights its applications in semiconductors,pan-semiconductors,environment and energy,and other fields.The applications of ALD in the key nodes of integrated circuits are initially demonstrated,and the areaselective ALD technique is discussed as a bottom-up method for self-aligned nanomanufacturing.Emerging applications of ALD are illustrated in the fabrication of passivation layers,functional surface layers,and buffer layers,which have shown the development trend of ALD in miniaturization and diversification.ALD is an enabling technique for atomic and closeto-atomic scale manufacturing(ACSM)of materials,structures,devices,and systems in versatile applications.The use of theory calculation,multiscale simulation,and more novel methods would steer ALD into further evolution,which makes it possible to cater to the demand of ACSM.

关键词： Atomic layer deposition(ALD) Semiconductor Pan-semiconductor environment and energy

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A CASE FOR SUSTAINABLE SECURITY SYSTEMS ENGINEERING:INTEGRATING NATIONAL,HUMAN,energy AND environmentAL SECURITY

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Journal of Systems Science and Systems Engineering 2009年第4期18卷 385-402页

作者： Jason K. LEVY L. Douglas Wilder School of Government and Public Affairs Virginia Commonwealth University

In the wake of the September 11,2001 terrorist attacks, there is a growing sense of insecurity felt by many citizens around the world. Sustainable security, with roots in the sustainable development and human security literature, seeks positive transformations for the co-evolving and mutually dependent human-environmental condition by integrating （and subsuming） national, human, environmental, and energy security concems and capitalizing on opportunities provided by human creativity, diplomatic openings, modernization and environmental change. The field of Sustainable Security Systems Engineering is proposed for protecting, restoring, designing, and implementing a set of integrated natural and man-made processes that equitably and responsibly meet the biophysical needs of human communities, while maintaining long-term security, respecting financial constraints, meeting ecological limits, and improving institutional arrangements for transparent and effective governance. Scenario planning is shown to help promote sustainable security by identifying the preconditions of instability and helping to proactively address them in an increasingly complex and uncertain world. The six papers published in this featured collection cross policy domains, geographic, political, and sectoral boundaries and were discussed at forums sponsored by the Systems Engineering and Global Policy group. Collectively, they demonstrate the quality, breadth and depth of systems engineering methodologies that are used to promote sustainable security.

关键词： Sustainable security systems engineering national security human security environment and energy scenario planning

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