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On the heating mechanism of electron cyclotron resonance thruster immerged in a non-uniform magnetic field

Plasma Science and Technology 2020年第9期22卷 18-24页

作者：袁小刚苌磊杨鑫周海山罗广南 Institute of Plasma Physics Chinese Academy of SciencesHefei 230031People's Republic of China Science Island Brand of Graduate University of Science and Technology of ChinaHefei 230031People’s Republic of China

To study the heating mechanism of electron cyclotron resonance thruster(ECRT)immersed in a non-uniform magnetic field,experiments and simulations are performed based on an electron cyclotron resonance plasma source at ASIPP.It is found that the first harmonic of electron cyclotron resonance is essential for plasma ignition at high magnetic field(0.0875 T),while the plasma can sustain without the first and second harmonics of electron cyclotron resonance at low magnetic field(till 0.0170 T).Evidence of radial hollow density profile indicates that upper hybrid resonance,which has strong edge heating effect,is the heating mechanism of low-field ECRT.The heating mode transition from electron cyclotron resonance to upper hybrid resonance is also revealed.Interestingly,the evolutions of electron temperature and electron density with input power experience a‘delayed’jump,which may be correlated with the different power levels required for cyclotron and ionization.Moreover,when the field strength decreased,the variation of electron density behaves in an opposite trend with that of electron temperature,implying a possible competition of power deposition between them.The present work is of great interest for understanding the plasma discharge in ECRT especially immersed in a non-uniform magnetic field,and designing efficient ECRT using low magnetic field for economic space applications.

关键词： electron cyclotron resonance upper hybrid resonance non-uniform magnetic field electric thruster

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Particle Simulation of Three-Grid ECR Ion Thruster Optics and Erosion Prediction

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Plasma Science and Technology 2010年第2期12卷 240-247页

作者：孙安邦毛根旺杨涓夏广庆陈茂林霍超 School of Astronautics Northwestern Polytechnical University

Ion optics is a critical component of ion thrusters. A two-dimensional axisymmetric model is developed to study the characteristics of three-grid electron cyclotron resonance ion thruster optics. The code is based on a particle-in-cell combined with the Monte Carlo collision method to simulate ion dynamics and charge-exchange processes in the grid region. The simulation results show that the mode can give a reasonable estimate of the physics characteristics of the ion optics. The design of the ion optics satisfies the requirement of preventing electron backstreaming. Charge-exchange ions can cause damage to the grids, especially to the accelerator grid. ＇Barrel＇ erosion can increase the accelerator grid aperture radius at a rate of 1.91~ 10-11 m/s, while the decelerator grid plays an important role in reducing ＇pits-and-grooves＇ erosion.

关键词： electron cyclotron resonance ion thruster ion optics particle-in-cell Monte Carlo collision charge-exchange erosion

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Fabrication of silica-on-silicon planar lightwave circuits by PECVD and ECR

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Chinese Optics Letters 2005年第5期3卷 275-277页

作者：周立兵罗风光曹明翠 State Key Laboratory of Laser Technology Huazhong University of Science and Technology Wuhan 430074

Plasma enhanced chemical vapor deposition (PECVD) and electron cyclotron resonance (ECR) etching were used in the development of silica layers for planar waveguide applications. The addition of GeH4 to silica was used to control the refractive index of core layers with core-to-clad index differences in the range of 0.2%-1.3%. Refractive index uniformity variance of ±0.0003 was achieved after annealing for 4-inch Si (100) wafers. The core layers with thickness up to 6 μm were etched by ECR with optimized recipe and mask material. Low-loss silica-on-silicon waveguides whose propagation loss is approximately 0.07 dB/cm at 1550 nm are fabricated.

关键词： Annealing electron cyclotron resonance Etching Plasma enhanced chemical vapor deposition Refractive index Silica Silicon

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SQUARE HOLE FABRICATION IN MICRO NANO SCALE BY LOW ENERGY ECR ION BEAM IRRADIATION

SQUARE HOLE FABRICATION IN MICRO NANO SCALE BY LOW ENERGY EC...

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2006年中国机械工程学会年会暨中国工程院机械与运载工...

作者： Shahjada Ahmed Pahlovy Sadao Momota M.Kashihara K.Nishimura Intelligent Mechanical System Engineering Department Kochi University of Technology Kochi-782-8502 Japan Intelligent Mechanical System Engineering Department Kochi University of Technology Kochi-782-8502 Japan Intelligent Mechanical System Engineering Department Kochi University of Technology Kochi-782-8502 Japan Intelligent Mechanical System Engineering Department Kochi University of Technology Kochi-782-8502 Japan

The importance of micro nano fabrication in nanotechnology world becoming greater and greater. Now a days several industries and technology especially IC industry, MEMS, solar cells, optoelectronics a

关键词： electron cyclotron resonance ion beam irradiation mechanical properties.

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