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Fabrication of High-Density Out-of-Plane Microneedle Arrays with Various Heights and Diverse cross-sectional shapes

Nano-Micro Letters 2022年第2期14卷 60-78页

作者： Hyeonhee Roh Young Jun Yoon Jin Soo Park Dong-Hyun Kang Seung Min Kwak Byung Chul Lee Maesoon Im Brain Science Institute Korea Institute of Science and Technology(KIST)Seoul 02792South Korea Division of Electrical Engineering College of EngineeringKorea UniversitySeoul 02841South Korea Micro/Nano Fabrication Center KISTSeoul 02792South Korea Division of Bio‑Medical Science&Technology KIST SchoolUniversity of Science&Technology(UST)Seoul 02792South Korea

Out-of-plane microneedle structures are widely used in various applications such as transcutaneous drug delivery and neural signal recording for brain machine *** work presents a novel but simple method to fabricate high-density silicon(Si)microneedle arrays with various heights and diverse cross-sectional shapes depending on photomask pattern *** proposed fabrication method is composed of a single photolithography and two subsequent deep reactive ion etching(DRIE)***,a photoresist layer was patterned on a Si substrate to define areas to be etched,which will eventually determine the final location and shape of each individual ***,the 1st DRIE step created deep trenches with a highly anisotropic etching of the Si ***,the photoresist was removed for more isotropic etching;the 2nd DRIE isolated and sharpened microneedles from the predefined trench *** on diverse photomask designs,the 2nd DRIE formed arrays of microneedles that have various height distributions,as well as diverse cross-sectional shapes across the *** these simple steps,high-aspect ratio microneedles were created in the high density of up to 625 microneedles mm^(-2)on a Si *** tests showed a small force as low as~172μN/microneedle is required for microneedle arrays to penetrate the dura mater of a mouse *** demonstrate a feasibility of drug delivery application,we also implemented silk microneedle arrays using molding *** fabrication method of the present study is expected to be broadly applicable to create microneedle structures for drug delivery,neuroprosthetic devices,and so on.

关键词： Microneedle Various heights cross-sectional shapes Isotropic etch Deep reactive ion etching

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