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A non-destructive channel stress characterization for gate-allaround nanosheet transistors by confocal raman methodology

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National Science Open 2023年第2期2卷 37-45页

作者： Ziqiang Huang Tao Liu Jingwen Yang Xin Sun Kun Chen Dawei Wang Hailong Hu Min Xu Chen Wang Saisheng Xu David Wei Zhang School of Microelectronics Fudan UniversityShanghai 200433China Shanghai Integrated Circuit Manufacturing Innovation Center Company Ltd. Shanghai 200433China Zhangjiang Fudan International Innovation Center Shanghai 200433China WITec(Beijing)Scientific Technology Co. Ltd.Beijing 100027China

Non-destructive stress characterization is essential for gate-all-around(GAA)nanosheet(NS)transistors technology,while it is a big challenge to be realized on nanometer-sized GAA devices by using traditional Micro-raman spectroscopy due to its light spot far exceeding the *** this work,a non-destructive stress characterization methodology of confocal raman spectroscopy was proposed and performed for GAANS device *** stress evolution along the fabrication process was successfully characterized by designing high-density NS array and analyzing the linear scanned spectra in different *** related mechanism of stress evolution was systematically studied by Sentaurus process ***,applying this methodology on detecting the bending of suspended NS after channel release process was ***,this work might provide a promising solution to realize in-line characterization of channel stress in GAA NS transistors and process monitor of NS channel integrity.

关键词： non-destructive characterization channel stress gate all around(GAA) confocal raman

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Deliquescence and Efflorescence Processes of Aerosol Particles Studied by in situ FTIR and raman Spectroscopy

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Chinese Journal of Chemical Physics 2008年第1期21卷 1-11页

作者： Li-jun Zhao Feng Wang Kun Zhang Qing-xuan Zeng Yun-hong Zhang The Institute of Chemical Physics School of Science Beijing Institute of Technology Beijing 100081China School of Aerospace Science and Engineering Beiy'ing Institute of Technology Beijing 100081 China

Deliquescence and efflorescence are the two most important physicochemical processes of aerosol particles. In deliquescence and efflorescence cycles of aerosol particles, many fundamental problems need to be investigated in detail on the molecular level, including ion and molecule interactions in supersaturated aerosols, metastable solid phases that may be formed, and microscopic structures and deliquescence mechanisms of aerosol particles. This paper presents a summary of the progress made in recent investigations of deliquescence and efflorescence processes of aerosol particles by four common spectral techniques, which are known as raman/electrodynamic balance, Fourier transform infrared/aerosol flow tube, Fourier transform infrared/attenuated total reftection, and confocal raman on a quartz substrate.

关键词： Aerosol Deliquescence Efflorescence raman/electrodynamic balance Fourier transform infrared/aerosol flow tube Fourier transform infrared/attenuated total reflection confocal raman

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