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Compressive type accelerometer made of leadfree Bi0.5Na0.5TiO3-based piezoceramics

Compressive type accelerometer made of leadfree Bi0.5Na0.5Ti...

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2011年全国压电和声波理论及器件应用研讨会

作者： Kui-yong YANG Man-kang ZHU~* Yu-dongHOU Hui YAN, College of Materials Sci.& Eng..Beijing University of Technology,Beijing 100124

Compressive type accelerometers are widely used in various vibration ***-free piezoelectric ceramics as sensitive element have been preferred from the viewpoint of environmental *** this paper,0.30 wt%MnO-added BiNaKBaTiO(BNKB) piezoelectric ceramics were used as the sensitive element in a compressive type *** BNKB ceramics,prepared by a conventional mixed oxide method,presents

关键词： Accelerometer Lead-free piezoelectrics Sodium bismuth titanate charge sensitivity

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A DESIGN OF PIEZOELECTRIC TRIAXIAL MICRO ACCELEROMETER

A DESIGN OF PIEZOELECTRIC TRIAXIAL MICRO ACCELEROMETER

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2016年全国压电和声波理论及器件应用研讨会

作者： Rui-hua HAN Jian-yan WANG Ma-hui XU Hang GUO Ma-hui XU Pen-Tung Sah Institute of Micro-Nano Science and Technology Xiamen University

Background, Motivation and Objective In recent years, the micro-accelerometer has acquired many progresses due to the rapid development of micro electro mechanical system(MEMS) technology and huge market demands. Several types of micro-accelerometers have been developed based on the different sensing principle, including piezoresistive, capacitive, and thermal ones. Most of them still have room to be improved in sensitivity, stability and dynamic response. While, the micro piezoelectric accelerometer has advantages of small size, light weight, low power consumption, high sensitivity and stability, especially, its dynamic response is the best among all of types of micro-accelerometers. Therefore, we turn to develop piezoelectric micro-accelerometers with high sensitivity and high working bandwidth. In this paper, we present study and design of a piezoelectric triaxial micro-accelerometer. Statement of Contribution/Methods The piezoelectric accelerometer is mainly composed of mass block, four cantilever beams and sensing thin films for sensing that are piezoelectric and integrated on the beams. By analyzing the beam deformations in the X, Y, Z direction, we put forward three groups of electrode connection schemes for triaxial piezoelectric sensing. To meet the design requirements, the length, width, height and the relationship between the PZT piezoelectric thin film thickness, and the first order natural frequency and the charge sensitivity are analyzed from analytical model and numerical analysis in ANSYS. Results The results show that the Z axis charge sensitivity of the accelerometer reaches 31.54 p C/g, X/Y axis sensitivity reaches 13.57 p C/g, and the first order natural frequency reaches 302.51 Hz. Compared with other types of micro accelerometers, these results show that the piezoelectric micro accelerometer can own high sensitivity and high working bandwidth.

关键词： Piezoelectric micro accelerometer Triaxial sensing Natural frequency charge sensitivity

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