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The effects of radio frequency atmospheric pressure plasma and thermal treatment on the hydrogenation of TiO_(2) thin film

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plasma Science and Technology 2023年第6期25卷 72-81页

作者：张宇王昊哲何涛李妍郭颖石建军徐雨张菁 New Energy Materials and Devices College of ScienceDonghua UniversityShanghai 201620People's Republic of China Textile Key Laboratory for Advanced plasma Technology and Application China National Textile and Apparel CouncilShanghai 201620People's Republic of China Magnetic Confinement Fusion Research Center Ministry of EducationShanghai 201620People's Republic of China

The effects of radio frequency(RF)atmospheric pressure(AP)He/H_(2)plasma and thermal treatment on the hydrogenation of TiO_(2)thin films were investigated and compared in this *** color of the original TiO_(2)film changes from white to black after being hydrogenated in He/H_(2)plasma at160 W(gas temperature~381℃)within 5 min,while the color of the thermally treated TiO_(2)film did not change significantly even in pure H_(2)or He/H_(2)atmosphere with higher temperature(470℃)and longer time(30 min).This indicated that a more effective hydrogenation reaction happened through RF AP He/H_(2)plasma treatment than through pure H_(2)or He/H_(2)thermal *** color change of TiO_(2)film was measured based on the Commission Internationale d’Eclairage L*a*b*color space *** TiO_(2)film displayed improved visible light absorption with increased plasma *** morphology of the cauliflower-like nanoparticles of the TiO_(2)film surface remained unchanged after plasma processing.X-ray photoelectron spectroscopy results showed that the contents of Ti3+species and Ti-OH bonds in the plasma-hydrogenated black TiO_(2)increased compared with those in the thermally treated TiO_(2).X-ray diffraction(XRD)patterns and Raman spectra indicated that plasma would destroy the crystal structure of the TiO_(2)surface layer,while thermal annealing would increase the overall *** different trends of XRD and Raman spectra results suggested that plasma modification on the TiO_(2)surface layer is more drastic than on its inner layer,which was also consistent with transmission electron microscopy *** emission spectra results suggest that numerous active species were generated during RF AP He/H_(2)plasma processing,while there were no peaks detected from thermal processing.A possible mechanism for the TiO_(2)hydrogenation process by plasma has been *** active species were generated in the bulk plasma region,accelerated in the sheath reg

关键词： black TiO_(2)thin film atmospheric pressure plasma thermal treatment visible light response hydrogenation

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Application of atmospheric pressure plasma polishing method in machining of silicon ultra-smooth surfaces

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Frontiers of Electrical and Electronic Engineering in China 2008年第4期3卷 480-487页

作者： Jufan ZHANG Bo WANG Shen DONG School of Mechanical Engineering Harbin Institute of TechnologyHarbin 150001China

The modern optics industry demands rigorous surface quality with minimum defects,which presents challenges to optics machining *** are always certain defects on the final surfaces of the compo-nents formed in conventional contacting machining proc-esses,such as micro-cracks,lattice disturbances,*** is especially serious for hard-brittle functional materials,such as crystals,glass and ceramics because of their special *** solve these problems,the atmospheric pressure plasma polishing(APPP)method is *** utilizes chemical reactions between reactive plasma and surface atoms to perform atom-scale material *** the machining process is chemical in nature,APPP avoids the surface/subsurface defects mentioned *** the key component,a capacitance coupled radio-fre-quency plasma torch is first *** initial opera-tions,silicon wafers were machined as *** applying operations,both the temperature distribution on the work-piece surface and the spatial gas diffusion in the machining process were studied qualitatively by finite element *** the following temperature measurement experiments demonstrate the formation of the temperature gradient on the wafer surface predicted by the theoretical analysis and indicated a peak temper-ature about 90uC in the *** using commercialized form talysurf,the machined surface was detected and the result shows regular removal profile that corresponds well to the flow field ***,the removal profile also indicates a 32 mm^(3)/min removal *** using atomic force microscopy(AFM),the surface roughness was also measured and the result demonstrates an Ra 0.6 nm surface *** the element composition of the machined surface was detected and analyzed by X-ray photoelectron spectroscopy(XPS)*** results also demonstrate the occurrence of the anticipated main *** the experiments have proved that this atmospheric pressure plasma pol

关键词： atmospheric pressure plasma ultra-smooth surface single crystal silicon capacitance coupled polish-ing

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Applications of atmospheric pressure plasma in microbial inactivation and cancer therapy: a brief review

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plasma Science and Technology 2020年第10期22卷 10-38页

作者：许子牧兰彦马洁沈洁韩伟胡淑恒叶朝兵奚文灏张雨迪杨春俊赵晓程诚 School of Resources and Environmental Engineering Hefei University of TechnologyHefei 230009People’s Republic of China Institute of plasma Physics Hefei Institutes of Physical ScienceChinese Academy of SciencesHefei 230031People's Republic of China Center of Medical Physics and Technology Hefei Institutes of Physical ScienceChinese Academy of SciencesHefei 230031People's Republic of China Anhui Province Key Laboratory of Medical Physics and Technology Hefei Institutes of Physical Science.Chinese Academy of SciencesHefei 230031People's Republic of China Department of Dermatology the Second Affiliated HospitalAnhui Medical UniversityHefei 230601.People's Republic of China Department of Medical Genetics College of MedicineHenan University of Science and TechnologyLuoyang 471023People's Republic of China

atmospheric pressure cold plasma, with advantages such as high particle activity, no thermal damage, high efficiency and direct and friendly contact with human tissues, is considered to have great potential in biomedical applications. Therefore, 'plasma medicine' as a new interdiscipline has been developed in the past two decades. This review first briefly describes the development of typical plasma sources suitable for biomedical applications, and those with different discharge forms are simply compared, evaluated and summarized. Subsequently, measurement of the crucial gaseous reactive particles(e.g. OH and O) and their spatio-temporal distributions are introduced. Meanwhile, the generation and variation rules and the related critical macroscopic parameters of the plasma-induced aqueous reactive species are summarized. Finally, related studies in the last ten years on the mechanisms of the plasma-driven microbial inactivation and plasma-induced apoptosis of cancer cells are introduced. Moreover, some scientific problems that need to be urgently solved in the field of plasma medicine are also discussed. This review will provide useful guidance for future related research.

关键词： atmospheric pressure plasma plasma medicine reactive species bacteria cancer cells

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A homogeneous atmospheric pressure air plasma in a 10 mm gap based on a three-electrode configuration

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plasma Science and Technology 2023年第10期25卷 75-80页

作者：李志宇刘大伟卢新培聂兰兰 State Key Laboratory of Advanced Electromagnetic Engineering and Technology School of Electrical and Electronic EngineeringHuazhong University of Science and TechnologyWuhan 430074People's Republic of China

Generation of atmospheric pressure homogeneous air plasma in a large gap(>4 mm)is a *** this study,an atmospheric pressure homogeneous air plasma generated in a gap up to 10 mm is reported,which is based on a three-electrode configuration,where a high-voltage(HV)electrode and a middle electrode form a surface dielectric barrier discharge(S-DBD),and together with the ground electrode form the main volume ***-speed photographs confirm that the discharge in the main gap is *** gas temperature of the plasma estimated from the N_(2)(C^(3)∏_(u)-B^(3)∏_(g))(Δv=-2)emission is about 320 K,which is close to room temperature.A detailed analysis shows that the discharge ignited between the HV electrode and the middle electrode is serving as an electron source,and the electrons deposited on the dielectric plate are due to the S-DBD along with the applied voltage generating a driving force,which results in a high concentration of seed electrons in the main gap and induces the homogeneous *** analysis shows that the electric field in the main gap is only about18.45 k V·cm^(-1),which is much lower than the typical breakdown electric field of 30 k V·cm^(-1)for atmospheric pressure air discharge.

关键词： atmospheric pressure plasma homogeneous discharge glow discharge air plasma

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Deposition of Polymer Thin Film Using an atmospheric pressure Micro-plasma Driven by Dual-Frequency Excitation

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plasma Science and Technology 2014年第1期16卷 68-72页

作者：王晓敏袁强华周永杰殷桂琴董晨钟 Key Laboratory of Atomic and Molecular Physics & Functional Materials of Gansu Province College of Physics and Electronic EngineeringNorthwest Normal University

Polymer thin film deposition using an atmospheric pressure micro-plasma jet driven by dual-frequency excitations is described in this paper. The discharge process was operated with a mixture of argon （6 slm） and a small amount of acetone （0-2100 ppm）. plasma composition was measured by optical emission spectroscopy （OES）. In addition to a large number of Ar spectra lines, we observed some spectra of C, CN, CH and C2. Through changing acetone content mixed in argon, we found that the optimum discharge condition for deposition can be characterized by the maximum concentration of carbonaceous species. The deposited film was characterized by scanning electron microscopy （SEM） and X-ray photoelectron spectroscopy （XPS） and Fourier transform infrared （FTIR） spectroscopy. The XPS indicated that the film was mostly composed of C with trace amount of O and N elements. The FTIR suggested different carbon-containing bonds （-CHx, C=O, C=C, C-O-C） presented in the deposited film.

关键词： atmospheric pressure plasma dual-frequency excitation polymer thin film

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Characterization of a microsecond pulsed non-equilibrium atmospheric pressure Ar plasma using laser scattering and optical emission spectroscopy

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plasma Science and Technology 2020年第6期22卷 120-127页

作者：贾凤东吴勇敏琦苏茂根 Keigo TAKEDA Kenji ISHIKAWA Hiroki KONDO Makoto SEKINE Masaru HORI 钟志萍 School of Physical Sciences University of Chinese Academy of SciencesBeijing 100049People's Republic of China Institute of Applied Physics and Computational Mathematics Beijing 100088People's Republic of China Key Laboratory of Atomic and Molecular Physics&Functional Material of Gansu Province College of Physics and Electronic EngineeringNorthwest Normal UniversityLanzhou 730070People's Republic of China Department of Electrical and Electronic Engineering Faculty of Science and TechnologyMeijo UniversityNagoya 468-8502Japan Graduate School of Engineering Nagoya UniversityNagoya 464-8603Japan CAS Center for Excellence in Topological Quantum Computation University of Chinese Academy of SciencesBeijing 100190People's Republic of China

A non-equilibrium atmospheric pressure argon(Ar)plasma excited by microsecond pulse is studied experimentally by laser scattering and optical emission spectroscopy(OES),and theoretically by collisional-radiative(CR)*** specifically,the electron temperature and electron density of plasma are obtained directly by the laser Thomson scattering,the gas temperature is measured by laser Raman scattering,the optical emissions of excited Ar states of plasma are measured by *** laser scattering results show that the electron temperature is about 1 eV which is similar to that excited by 60 Hz AC power,but the gas temperature is as low as 300 K compared to about 700 K excited by 60 Hz AC *** is shown that the microsecond pulsed power supply,rather than nanosecond ones,is short enough to reduce the gas temperature of atmospheric pressure plasma to near room *** electron temperature and electron density are also obtained by CR model based on OES,and find that the intensities of the optical emission intensity lines of 727.41,811.73,841.08,842.83,852.44 and 912.86 nm of Ar can be used to characterize the behavior of electron density and electron temperature,it is very useful to quickly estimate the activity of the atmospheric pressure Ar plasma in many applications.

关键词： plasma diagnosis laser Thomson scattering atmospheric pressure plasma

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Hydrogen Permeation Characteristics of Pd-CuMembrane in plasma Membrane Reactor

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Energy Engineering 2024年第2期121卷 259-272页

作者： Muhd Hadi Iskandar Abd Razak Motoki Tsuda YukioHayakawa Shinji Kambara Graduate School of Engineering Gifu UniversityGifu501-1193Japan

Hydrogen is an alternative energy source that has the potential to replace fossil *** of the hydrogen applications is as a material for Polymer Electrolyte Membrane Fuel Cells(PEMFC)in fuel cell ***-purity hydrogen can be obtained using a hydrogen separation membrane to prevent unwanted contaminants from potentially harming the PEMFC *** this study,we fabricated a plasma membrane reactor and investigated the permeation performance of a hydrogen separation membrane in a plasma membrane reactor utilizing atmospheric pressure *** result showed the hydrogen permeation rate increasing with time as reactor temperature is increased through joule *** decreasing the gap length of the reactor from 2 to 1 mm,the hydrogen permeation rate increases by up to 40%.The hydrogen permeation rate increases by 30%when pressure is applied to the plasma membrane reactor by up to 100 kPa.

关键词： Hydrogen energy hydrogen separation membrane atmospheric pressure plasma

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atmospheric pressure pulsed modulated arc discharge plasma

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plasma Science and Technology 2023年第12期25卷 57-62页

作者：李寄唐井峰张浩然王璐纪添源于达仁朱悉铭 School of Energy Science and Engineering Harbin Institute of TechnologyHarbin 150001People’s Republic of China

Direct-current(DC)arc plasma has great application values in the field of the chemical industry,but it has the problem of low energy *** the requirement for improving the energy efficiency of the arc,this paper proposes a unique method of pulsed modulated arc(PMA).This method uses high-frequency pulses and reduces the arc current to improve the control of electron *** electrical characteristics,optical characteristics and products are *** test results show that during the PMA process,all of the experimental results which include voltage,current and light will significantly *** results are analyzed from the perspective of functionality,repeatability and energy *** analysis results show that although the PMA method does not show good parameter consistency,it has potential application prospects because it increases the energy conversion rate by 4.5%and 8%from the perspective of light and products,respectively.

关键词： experimental research atmospheric pressure plasma DC arc PMA

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Use of a Microwave plasma Process at atmospheric pressure for Bacterial Inactivation without Thermal Effects

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Materials Sciences and Applications 2023年第5期14卷 285-298页

作者： Laura Renoux Christelle Dublanche-Tixier Christophe Chazelas Pascal Tristant Patrice Valorge Corinne Maftah Patrick Leprat University of Limoges CNRS IRCER UMR 7315 Limoges France University of Limoges E2Lim UR 24133 Limoges France

An atmospheric microwave plasma argon was used for the inactivation of bacteria E. coli. The employed device, called Axial Injection Torch (or TIA for Torche à Injection Axiale), consisted of a microwave power source, a waveguide and a gas supply system. Using this argon plasma source, we studied the effects of the exposure time, the exposure distance, the input power, and the gas flow rate on the reduction rate of Escherichia coli cells. The first part of the study was carried out with a static sample exposed to the plasma and then in the second part the sample was set in motion relative to the plasma jet. A log reduction number of E. coli of 4 (10-4 CFU/mL) was obtained with UV and active species, for UV only a log of 1 (10-1 CFU/mL) was obtained.

关键词： atmospheric pressure plasma Microwave plasma Torch Disinfection Bacteria

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Decomposition of Poly（Amide-imide）Film Enameled on Solid Copper Wire by atmospheric pressure Non-Equilibrium plasma

Decomposition of Poly（Amide-imide）Film Enameled on Solid C...

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2006年上海电子电镀学术报告会

作者： Kazuo Sugiyama Katsunori Suzuki Yosuke Aoki Shusuke Kuwasima Hideki Kurokawa Hiroshi Miura Faculty of Engineering Saitama University. 255 Shimo-okubo. Sakura-ku Saitama Japan 338-8570 Faculty of Engineering Saitama University. 255 Shimo-okubo. Sakura-ku Saitama Japan 338-8570

＜正＞In our experiment,when various oxide powders were prepared by microwave heating under argon gas flow,we found that atmospheric pressure non-equilibrium plasma generates around some *** phenomenon was peculiar to electrically conductive and heat-resistive materials such as perovskite-type oxide,silicon carbide and *** plasmas could also be generated easily using gas mixtures consisting of argon and additive *** an eye towards industrial applications,we tried to modify the surface of substratcs as application examples. In this study,we have attempted the decorrrposition of poly（amide-imide）film enameled on solid copper wire using the atmospheric pressure ***（amide-imide）exhibits exceptional physical and chemical properties such as higher resistance to heat,abrasion and *** is difficult that the poly（amide-imide）film is stripped off from the copper surface by usual mechanical or thermal *** thought that the plasma-treatment was effective,The plasma was produced by applying microwave power to silicon under a gas mixture of argon,oxygen,and *** poly（amide-imide）thin film could be easily decomposed by argon-oxygen mixed gas plasma and the oxidized surface of the copper substrate was *** heat-treatment of the oxidized sample using argon-hydrogen mixed gas plasma yielded the reduced surface of the metallic *** would like to propose that our plasma decomposition process of the poly（amidc-imidc） coating film on the enameled wire is suitable for the new soldering process.

关键词： atmospheric pressure plasma non-equilibrium plasma cnameled copper wire poly(amide-imide)

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