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Journal of Materials Science & Technology 2014年第5期30卷 473-479页

作者： Chang-Ming Shi Tie-Gang Wang Zhi-Liang Pei Jun Gong Chao Sun State Key Laboratory for Corrosion and Protection Institute of Metal ResearchChinese Academy of Sciences

In this study, CrN/Cr2O3 double-layered coatings with various thickness ratios of CrN vs Cr2O3 layer were prepared by arc ion plating technology. The influences of the thickness ratio of CrN vs Cr2O3 layer on the microstructural characteristics as well as the mechanical and tribological properties of the CrN/Cr2O3 doublelayered coatings were investigated. The corresponding mechanisms were also discussed. The results indicated that the insertion of CrN layer between the Cr2O3 layer and substrate can effectively decrease the internal stress level of the coating. With increasing the thickness ratio of CrN vs Cr2O3 layer, the surface roughness of double-layered coatings decreased gradually, which had a certain influence on the friction coefficient. In addition, the microhardness also declined gradually, the adhesive strength almost increased linearly, whereas the wear rate declined firstly and then increased slightly. As the thickness ratio was 2：1, the double-layered coating exhibited the best wear resistance.

关键词： Cr2O3/CrN Double-layered coating Thickness ratio arc ion plating Mechanical property Wear

Effect of Sample Configuration on Droplet-Particles of TiN Films Deposited by Pulse Biased arc ion plating

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Journal of Materials Science & Technology 2009年第5期25卷 681-686页

作者： Yanhui Zhao Guoqiang Lin Jinquan Xiao Chuang Dong Lishi Wen Institute of Metals Research Chinese Academy of Sciences Shenyang 110016 China Key Laboratory of Materials Modification by Laser Ion and Electron Beams Ministry of Education Dalian University of Technology Dalian 116085 China

Orthogonal experiments are used to design the pulsed bias related parameters, including bias magnitude, duty cycle and pulse frequency, during arc ion deposition of TiN films on stainless steel substrates in the case of samples placing normal to the plasma flux. The effect of these parameters on the amount and the size distribution of droplet-particles are investigated, and the results have provided sufficient evidence for the physical model, in which particles reduction is due to the case that the particles are negatively charged and repulsed from negative pulse electric field. The effect of sample configuration on amount and size distribution of the particles are analyzed. The results of the amount and size distribution of the particles are compared to those in the case of samples placing parallel to the plasma flux.

关键词： arc ion plating Pulsed bias TiN film Droplet-particles

Experimental Verification of the Physical Model for Droplet-Particles Cleaning in Pulsed Bias arc ion plating

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Journal of Materials Science & Technology 2005年第3期21卷 423-426页

作者： YanhuiZHAO GuoqiangLIN ChuangDONG LishiWEN StateKeyLaboratoryforMaterialsModificationbyLaser IonandElectronBeamsDalianUniversityofTechnologyDalian116024China StateKeyLaboratoryforMaterialsModificationbyLaser IonandElectronBeamsDalianUniversityofTechnologyDalian116024China//InstituteofMetalResearchChineseAcademyofSciencesShenyang110016China

It has been reported that application of pulsed biases in arc ion plating could effectively eliminate droplet particles. The present paper aims at experimental verification of a physical model proposed previously by us which is based on particle charging and repulsion in the pulsed plasma sheath. An orthogonal experiment was designed for this purpose, using the electrical parameters of the pulsed bias for the deposition of TiN films on stainless steel substrates. The effect of these parameters on the amount and the size distribution of the particles were analyzed, and the results provided sufficient evidence for the physical model.

关键词： arc ion plating Pulsed bias TiN fllm Droplet-particles

Microstructure and Corrosion Resistance of the AlTiN Coating Deposited by arc ion plating

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Acta Metallurgica Sinica(English Letters) 2016年第12期29卷 1119-1126页

作者： Qi-Xiang Fan Tie-Gang Wang Yan-Mei Liu Zheng-Huan Wu Tao Zhang Tong Li Zu-Bing Yang Tianjin Key Laboratory of High Speed Cutting and Precision Machining Tianjin University of Technology and EducationTianjin 300222 China Division of State-owned Assets Management Tianjin University of Technology and Education Tianjin 300222China College of Electronic Engineering Tianjin University of Technology and Education Tianjin 300222 China

A new type of AlTiN coating containing about 29.13 at.% Al,16.02 at.% Ti and 54.85 at.% N was prepared by arc ion plating technology. The coating is composed of singular fcc-（Al, Ti）N phase and has no hcp-AlN phase to be formed. Due to the high content of beneficial element Al, the hardness and effective elastic modulus of the coating are up to 33.9 and 486.1 GPa, respectively. The adhesion strength between the coating and substrate is about 39.7 N. Electro- chemical test shows that the corrosion current density of the AlTiN coating is nearly one-sixth of the substrate, and the charge transfer resistance Rct of the AlTiN coating is much larger than that of the substrate, which means that the coating could act as a protective barrier between the substrate and corrosive electrolyte, enhancing the corrosion resistance.

关键词： arc ion plating AITiN coating Corrosion behavior Microstructure Hardness

Ti/(Ti,Cr)N/CrN multilayer coated 316L stainless steel by arc ion plating as bipolar plates for proton exchange membrane fuel cells

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Journal of Energy Chemistry 2017年第1期26卷 168-174页

作者： Shengli Wang Ming Hou Qing Zhao Yongyi Jiang Zhen Wang Huizhe Li Yu Fu Zhigang Shao Fuel Cell System and Engineering Laboratory Dalian Institute of Chemical Physics Chinese Academy of Sciences University of Chinese Academy of Sciences Dalian Sunrise Power Co. LTD

arc ion plating (AIP) is applied to form Ti/(Ti,Cr)N/CrN multilayer coating on the surface of 316L stainless steel (SS316L) as bipolar plates for proton exchange membrane fuel cells (PEMFCs). The characterizations of the coating are analyzed by scanning electron microscopy (SEM) and X-ray diffraction (XRD). Interfacial contact resistance (ICR) between the coated sample and carbon paper is 4.9 m Omega cm(2) under 150 N/cm(2), which is much lower than that of the SS316L substrate. Potentiodynamic and potentiostatic tests are performed in the simulated PEMFC working conditions to investigate the corrosion behaviors of the coated sample. Superior anticorrosion performance is observed for the coated sample, whose corrosion current density is 0.12 mu A/cm(2). Surface morphology results after corrosion tests indicate that the substrate is well protected by the multilayer coating. Performances of the single cell with the multilayer coated SS316L bipolar plate are improved significantly compared with that of the cell with the uncoated SS316L bipolar plate, presenting a great potential for PEMFC application. (C) 2016 Science Press and Dalian Institute of Chemical Physics, Chinese Academy of Sciences. Published by Elsevier B.V. and Science Press. All rights reserved.

关键词： Stainless steel bipolar plate Proton exchange membrane fuel cell arc ion plating Multilayer coating

Co-based Amorphous/Nanocrystalline Composite Coatings Deposited by arc ion plating

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Journal of Materials Science & Technology 2013年第9期29卷 806-812页

作者： Zhengkai Chang Jun Gong Chao Sun State Key Laboratory for Corrosion and Protection Institute of Metal ResearchChinese Academy of Sciences

Cobalt-based amorphous/nanocrystalline composite coatings have been grown by arc ion plating together with a specimen cooling system. With decreasing substrate temperature, the coatings undergo significant structure evolution. The degree of crystallization first decreases and subsequently increases as confirmed by X-ray diffraction. The cluster size first decreases and then remains constant as confirmed by transmission electron microscopy. The effect of substrate temperature on the evolution of the structure has been studied as a result of a competition between nucleation thermodynamics and kinetics of crystalline growth. With decreasing the substrate temperature, the microhardness and the critical load of the composite coatings firstly increased, and then remained almost constant. And the saturation magnetization revealed the opposite trend over the same range. The essence of these phenomena was ascribed to the microstructural variations caused by the decrease of the substrate temperature.

关键词： Amorphous/nanocrystalline composite coatings arc ion plating Thermodynamics Kinetics Microhardness Critical load

Influences of nitrogen flow rate on the structures and properties of Ti and N co-doped diamond-like carbon films deposited by arc ion plating

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Chinese Physics B 2014年第4期23卷 616-621页

作者：张林马国佳林国强马贺韩克昌 Key Laboratory for Material Modification by Laser Ion and Electron Beams Dalian University of Technology Science and Technology on Power Beam Processes Laboratory Beijing Aeronautical Manufacturing Technology Research Institute

In this paper, Ti-C-N nanocomposite films are deposited under different nitrogen flow rates by pulsed bias arc ion plating using Ti and graphite targets in the Ar/N2 mixture gas. The surface morphologies, compositions, microstructures, and mechanical properties of the Ti-C-N films are investigated systematically by field emission scanning electron mi- croscopy （FE-SEM）, x-ray photoelectron spectroscopy （XPS）, grazing incident x-ray diffraction （GIXRD）, Raman spectra, and nano-indentation. The results show that the nanocrystalline Ti（C,N） phase precipitates in the film from GIXRD and XPS analysis, and Raman spectra prove the presence of diamond-like carbon, indicating the formation of nanocomposite film with microstructures comprising nanocrystalline Ti（C,N） phase embedded into a diamond-like matrix. The nitrogen flow rate has a significant effect on the composition, structure, and properties of the film. The nano-hardness and elastic modulus first increase and then decrease as nitrogen flow rate increases, reaching a maximum of 34.3 GPa and 383.2 GPa, at a nitrogen flow rate of 90 sccm, respectively.

关键词： arc ion plating Ti-C-N film nitrogen flow rate microstructure

Microstructure, Interface, and Properties of Multilayered CrN/Cr_2O_3 Coatings Prepared by arc ion plating

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Journal of Materials Science & Technology 2014年第12期30卷 1193-1201页

作者： Chang-Ming Shi Tie-Gang Wang Zhi-Liang Pei Jun Gong Chao Sun State Key Laboratory for Corrosion and Protection (SKLCP) Institute of Metal Research Chinese Academy of Sciences

There has been much interest in developing multilayered or nanolayered physical vapor deposition（PVD） coatings identified as a group of promising protective coatings for their excellent mechanical properties and corrosion resistance. In this study, the multilayered Cr N/Cr2O3 coatings with different bilayer periods（L） were synthesized on the polished high speed steel substrates from a Cr target with the alternative atmosphere of pure nitrogen and pure oxygen by arc ion plating（AIP） technique. The results revealed that the microstructure,morphologies and properties of the multilayered coatings were strongly influenced by the bilayer period（L）.There were two kinds of interfaces in the multilayered Cr N/Cr2O3coatings： the sharp ones and the blurry ones. With reducing the value of L, the macro-particles densities decreased gradually, whereas the coating microhardness, adhesive strength and wear resistance first increased, and then decreased slightly or remained stable as the bilayer period L 〈 590 nm. The multilayered Cr N/Cr2O3 coating with the bilayer period L of 590 nm possessed the best comprehensive properties, namely the highest microhardness, the strongest adhesion, and the lowest wear rate.

关键词： Cr2O3/CrN Multilayered coating arc ion plating Interface Mechanical properties Wear

Tribological properties in seawater for Ti/TiCN coatings on Ti6Al4V alloy by arc ion plating with different carbon contents

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Rare Metals 2017年第11期36卷 858-864页

作者： Jin-Long Li Gang-Yi Cai Hua-Sheng Zhong Yong-Xin Wang Jian-Min Chen Key Laboratory of Marine Materials and Application Technologies Zhejiang Key Laboratory of Marine Materials and Protection Technologies Ningbo Institute of Materials Technologies and Engineering Chinese Academy of Sciences School of Mechanical and Electrical Engineering Henan University of Technology

TiCN coatings incorporated with Ti buffer layer were deposited on Ti6A14V alloy by arc ion plating. The carbon content in TiCN coatings was varied by controlling flow rates of C2H2 in reactive gas. The Ti/TiCN coatings have a typical structure of columnar crystal with a total thickness of about 2 pro. The elements of Ti, C and N are present as TiN and TiC in TiCN coatings. A little free carbon appears with carbon content increasing in TiCN coatings. For the TiCN coatings, the hardness, friction coefficient and wear rate decrease with the increase in carbon content. In seawater, both friction coefficient and wear rate have an obvious decrease at lower carbon content compared with those in atmosphere. However, the friction coefficient and wear rate only have a slight decrease, while the carbon content reaches or exceeds 10 at% in Ti/TiCN coatings.

关键词： Ti/TiCN coatings arc ion plating Hardness Seawater Wear

Effects of Substrate Pulse Bias Duty Cycle on the Microstructure and Mechanical Properties of Ti–Cu–N Films Deposited by Magnetic Field-Enhanced arc ion plating

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Acta Metallurgica Sinica(English Letters) 2017年第2期30卷 176-184页

作者： Sheng-Sheng Zhao Yan-Hui Zhao Lv-Sha Cheng Vladimir Viktorovich Denisov Nikolay Nikolaevich Koval Bao-Hai Yu Hai-Juan Mei School of Mechanical and Electrical Engineering Shenzhen Polytechnic Institute of Metal Research Chinese Academy of Sciences Institute of High Current Electronics Siberian BranchRussian Academy of Sciences

Ti–Cu–N films were deposited on 316 L stainless steel substrates by magnetic field-enhanced arc ion *** effect of substrate pulse bias duty cycle on the chemical composition,microstructure,surface morphology,mechanical and tribological properties of the films was systemically *** results showed that,with increasing the duty cycle,Cu content decreases from 3.3 to 0.58 at.%.XRD results showed that only Ti N phase is observed for all the deposited films and the preferred orientation transformed from Ti N（200） to Ti N（111） plane with the increase in duty *** surface roughness and deposition rate showed monotonous decrease with increasing the duty *** residual stress and hardness firstly increase and then decrease afterwards with the increase in duty cycle,while the variation of critical load shows reverse *** for the film with duty cycle of 10%,others perform the better wear resistance.

关键词： Magnetic field arc ion plating Ti-Cu-N film Residual stress Hardness