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原子层沉积方法制备高性能al2o3介电材料教学设计

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大学物理实验 2024年第5期37卷 83-87页

作者：王雷妮杨波胡杨胡鹏飞鲁世斌王菲菲周睿阳邱晨尤新雨刘一博陶夕宇合肥师范学院电子信息与集成电路学院安徽合肥230601 安徽医科大学生物医学工程学院安徽合肥230032

随着微电子技术向纳米尺度迈进,高性能介电材料的开发成为提升集成电路性能的关键。原子层沉积(Atomic Layer Deposition,alD)技术以其卓越的薄膜均匀性、精确的厚度控制和良好的界面特性,在制备高性能al2o3介电材料方面展现出巨大潜力... 详细信息

随着微电子技术向纳米尺度迈进,高性能介电材料的开发成为提升集成电路性能的关键。原子层沉积(Atomic Layer Deposition,alD)技术以其卓越的薄膜均匀性、精确的厚度控制和良好的界面特性,在制备高性能al2o3介电材料方面展现出巨大潜力。本文针对微电子科学与工程和集成电路等相关专业,设计了alD方法制备高性能al2o3介电材料的教学内容,通过介绍alD沉积技术原理、al2o3介电薄膜相关知识、实验操作流程,al2o3介电薄膜的表征与分析等过程设计,旨在培养和提高学生的实践能力和创新能力。

关键词：原子层沉积介电 al2o3 教学研究

al2o3 and Ceo2-promoted Mgo sorbents for Co2 capture at moderate temperatures

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Frontiers of Chemical Science and Engineering 2018年第1期12卷 83-93页

作者： Huimei Yu Xiaoxing Wang Zhu Shu Mamoru Fujii Chunshan Song EMS Energy Institute PSU-DUT Joint Center for Energy Research and Department of Energy & Mineral Engineering Pennsylvania State University University Park 16802 USA Shanghai Institute of Ceramics Chinese Academy of Sciences Shanghai 200050 China East China University of Science and Technology Shanghai 200237 China

A series of al2o3 and Ceo2 modified Mgo sorbents was prepared and studied for Co2 sorption at moderate temperatures. The Co2 sorption capacity of Mgo was enhanced with the addition of either al2o3 or Ceo2. over al2o3-Mgo sorbents, the best capacity of 24.6 mg- Co2/g-sorbent was attained at 100 ℃, which was 61% higher than that of Mgo （15.3 mg-Co2/g-sorbent）. The highest capacity of 35.3 mg-Co2/g-sorbent was obtained over the Ceo2-Mgo sorbents at the optimal temperature of 200 ℃. Combining with the characterization results, we conclude that the promotion effect on Co2 sorption with the addition of al2o3 and Ceo2 can be attributed to the increased surface area with reduced Mgo crystallite size. Moreover, the addition of Ceo2 increased the basicity of Mgo phase, resulting in more increase in the Co2 capacity than al2o3 promoter. Both the al2o3-Mgo and Ceo2- Mgo sorbents exhibited better cyclic stability than Mgo over the course of fifteen Co2 sorption-desorption cycles. Compared to al2o3, Ceo2 is more effective for promoting the Co2 capacity of Mgo. To enhance the Co2 capacity of Mgo sorbent, increasing the basicity is more effective than the increase in the surface area.

关键词： Co2 capture Mgo sorbents al2o3 Ceo2,flue gas

al2_3/al2o3 Joint Brazed with al2o3-particulate-contained Composite Ag-Cu-Ti Filler Material

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Journal of Materials Science & Technology 2005年第5期21卷 782-784页

作者： Jianguo YANG Hongyuan FANG and Xin WANState Key Laboratory of Advanced Welding Production Technology, Harbin Institute of Technology, Harbin 150001, China State Key Laboratory of Advanced Welding Production Technology Harbin Institute of Technology Harbin 150001 China

Microstructure and interracial reactions of al2o3 joints brazed with al2o3-particulate-contained composite Ag-Cu-Ti filler material were researched by scanning electron microscopy （SEM）, electron probe microscopy analysis （EPMA）, energy dispersive spectroscopy （EDS） and X-ray diffraction （XRD）. The interracial reaction layer thickness of joints brazed with conventional active filler metal and active composite filler materials with different volume fraction of al2o3 particulate was also studied. The experimental results indicated although there were al2o3 particulates added into active filler metals, the time dependence of interracial layer growth of joints brazed with active composite filler material is t^1/2 as described by Fickian law as the joints brazed with conventional active filler metal.

关键词： Composite filler materials Braze Interface al2o3

Manufacture and characteristics of al2o3 composite coating on steel substrate by SHS process

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Rare Metals 2019年第7期38卷 704-712页

作者： Hai-Dong Gao Ze-Hua Wang Jia Shao College of Mechanics and Materials Hohai University

Many steel components are needed to be reinforced on their surface to have a high abrasive resistance and corrosion resistance. Based on self-propagating hightemperature synthesis, a process to making al2o3 composite coatings on mild steel substrate in atmospheric environment with the help of simple auxiliary facilities was developed successfully. A pre-coated bilayer coating was employed. The effects of Fe content in pre-coated transition layer on phase composition, porosity and interfacial bon ding were studied using scanning electron microscopy (SEM), energy-dispersive spectrum (EDS) and X-ray diffraction (XRD). The thermal shock resistance and abrasive resistance were investigated. When Fe content changes from 0 wt% to 50 wt%, the bond quality at first becomes better and then worse gradually. When Fe content is less 20 wt%, there is a small gap between the transition layer and the substrate;when Fe contents are 30 wt% and 40 wt%, working layer, the transition layer and the substrate bond together well. The working layer is mainly composed of al2o3, Fe-Cr and al(Cr)2o3 phases and has a dense structure with porosity of less than 1 %. The coating has a good thermal shock resistance and abrasive resistance. The abrasive resistance of the working layer is about ten times that of the substrate.

关键词： al2o3 composite coating Self-propagating high-temperature synthesis Interfacial bonding Thermal shock resistance Abrasive resistance

The effect of al3+ coordination structure on the propane dehydrogenation activity of Pt/Ga/al2o3 catalysts

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Journal of Energy Chemistry 2020年第2期29卷 93-99页

作者： Qinqin Yu Tie Yu Hongyu Chen Guangzong Fang Xiulian Pan Xinhe Bao State Key Laboratory of Catalysis Dalian Institute of Chemical PhysicsChinese Academy of SciencesDalian 116023LiaoningChina

The effect of the al2o3 structure on the performance of Pt/Ga/al2o3 catalysts is investigated for the direct dehydrogenation of propane. The study unveils that the structure of al3+determines the bulk structure of catalysts, particularly a high content of coordinatively unsaturated al3+sites(penta-coordinated al3+,denoted as al3+penta) could lead to a remarkably improved dehydrogenation activity of the catalyst. The bulk characterization reveals that the sufficient amount of al3+pentain al2o3 benefit the dispersion of Pt and Ga2o3 on the al2o3 support. At the same time, TPR results reveal that the presence of Pt facilitates the reduction of Ga2o3, likely due to the hydrogen spillover between the well dispersed Pt and Ga2o3,which consequently enhances the synergistic function between Pt and Ga2o3 in the dehydrogenation of propane. Recyclability tests demonstrate that the dehydrogenation activity stabilizes after three cycles over the Pt/Ga/al2o3 catalyst.

关键词： Dehydrogenation Ga2o3 al2o3 Coordinatively unsaturated

Comparative study on characteristics of Si-based alGaN/GaN recessed MIS-HEMTs with Hfo2 and al2o3 gate insulators

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Chinese Physics B 2020年第8期29卷 445-450页

作者： Yao-Peng Zhao Chong Wang Xue-Feng Zheng Xiao-Hua Ma Kai Liu Ang Li Yun-Long He Yue Hao Key Laboratory of Wide Band-Gap Semiconductor Materials and Devices School of MicroelectronicsXidian UniversityXi'an 710071China

Two types of enhancement-mode(E-mode)alGaN/GaN metal-insulator-semiconductor high-electron-mobility transistors(MIS-HEMTs)with different gate insulators are fabricated on Si *** Hfo2 gate insulator and the al2o3 gate insulator each with a thickness of 30 nm are grown by the plasma-enhanced atomic layer deposition(PEalD).The energy band diagrams of two types of dielectric MIS-HEMTs are *** breakdown voltage(VBR)of Hfo2 dielectric layer and al2o3 dielectric layer are 9.4 V and 15.9 V,*** the same barrier thickness,the transconductance of MIS-HEMT with Hfo2 is *** threshold voltage(Vth)of the Hfo2 and al2o3 MIS-HEMT are 2.0 V and 2.4 V,respectively,when the barrier layer thickness is 0 *** C-V characteristics are in good agreement with the Vth's transfer *** the barrier layer becomes thinner,the drain current density decreases *** to the dielectric/alGaN interface is very close to the channel,the scattering of interface states will lead the electron mobility to *** current collapse and the Ron of al2o3 MIS-HEMT are smaller at the maximum gate *** al2o3 has excellent thermal stability and chemical stability,the interface state density of al2o3/alGaN is less than that of Hfo2/alGaN.

关键词： alGaN/GaN enhancement-mode MIS-HEMT Hfo2 al2o3

Reliable high temperature, high humidity flexible thin film encapsulation using al2o3/Mgo nanolaminates for flexible oLEDs

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Nano Research 2020年第10期13卷 2716-2725页

作者： Ki Suk Kang So Yeong Jeong Eun Gyo Jeong Kyung Cheol Choi School of Eetrical Enginerng Korea Advanced lstute of Sciencp and Tchcnoloy(KAIST) 291 Daehak roYuscong guDaejeon 34141Republic of Korea Department of Clothing and Textiles Chormam National University77 Yongbong.roBuk guGwangjiu 61186Republic of Korea

Since most organic materials are very sensitive to moisture and oxygen, organic light emitting diodes (oLEDs) require an encapsulation layer to protect the active layer from these gases. Since light, flexible and portable oLEDs are being employed in more diverse climates and environmental conditions, the oLED encapsulation layer must retain robust mechanical properties and stability in high temperature/high humidity conditions. al2o3 films have demonstrated excellent barrier performance, but they readily hydrolyze when exposed to prolonged harsh environments. In this study, we fabricated a thin film encapsulation (TFE) film that was resistant to hydrolysis, using al2o3/Mgo (AM) nanolaminates. Mgo has superior resistance to harsh environments, and the aluminate phase generated by the chemical reaction of al2o3 and Mgo provided excellent barrier performance, even after storage in harsh conditions. A multi-barrier fabricated using the AM nanolaminate showed excellent barrier performance, close to the level required by oLEDs. It did not significantly deteriorate even after a bending test of 1,000 iterations at 0.63% strain. After 1,000 cycle of bending, the electrical properties of the passivated oLEDs were not significantly degraded at shelf-lifetime test where the fabricated device was stored for 50 days in a harsh environment of 60℃, 90% relative humidity. The multi-barrier shows the best performance compared to previous studies on flexible encapsulation that can be used in harsh environments.

关键词： thin film encapsulation nanolaminate structure al2o3 Mgo flexible organic light emitting diode(oLED)

Effect of al2o3 doping on the structure and performance of an al2o3/Fe2o3 catalyst for mercury oxidation

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Journal of Environmental Sciences 2020年第4期32卷 138-145页

作者： Ruihui Liu Tingyu Zhu Li Tong Wenqing Xu School of Resources and Civil Engineering Northeastern UniversityShenyang 110819China Research Center for Process Pollution Control National Engineering Laboratory for Hydrometallurgical Cleaner Production TechnologyInstitute of Process EngineeringChinese Academy of SciencesBeijing 100190China School of Resources and Materials Northeastern University at QinhuangdaoQinhuangdao 066004China Key Laboratory of Dielectric and Electrolyte Functional Material Hebei Province Qinhuangdao 066004China Department of Air Pollution Control Beijing Municipal Institute of Labor ProtectionBeijing 100054China

In this study,the thermal stability of a Fe2 o3 catalyst for mercury oxidation was significantly improved by doping with al2 *** 1 hr,the catalyst doped with 10 wt.%al2 o3 still exhibited a mercury conversion efficiency of 70.9%,while the undoped sample even lost its catalytic *** with al2 o3 retarded the collapse of the catalyst mesoporous structure during high-temperature calcination,and the doped samples maintained a higher specific surface area,smaller pore size,and narrower pore size *** electron microscope images revealed that after calcination at 350℃,the average size of the catalyst grains in Fe2 o3 was 23.4 nm;however,the corresponding values for 1%al2 o3/Fe2 o3,3%al2 o3/Fe2 o3,and 10%al2 o3/Fe2 o3 were only 13.3,7.1,and 4.7 nm,*** obtained from X-ray diffraction and thermogravimetry coupled with differential scanning calorimetry confirmed that doping with al2 o3 also retards the crystallization of the catalysts at high temperature,constraining catalyst grains to a smaller size.

关键词： Mercury Catalytic oxidation Fe2o3 al2o3 Thermal stability

Fluorescence spectra of colloidal self-assembled CdSe nano-wire on substrate of porous al2o3/Au nanoparticles

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Chinese Physics B 2019年第6期28卷 429-432页

作者： Xin Zhang Li-Ping Shao Man Peng Zhong-Chen Bai Zheng-Ping Zhang Shui-Jie Qin College of Big Data and Information Engineering Guizhou UniversityGuiyang 550025China College of Medicine Guizhou UniversityGuiyang 550025China Guizhou Province Key Laboratory for Photoelectric Technology and Application Guizhou UniversityGuiyang 550025China

We present a self-assembly method to prepare array nano-wires of colloidal CdSe quantum dots on a substrate of porous al2 o3 film modified by gold nanoparticles. The photoluminescence(PL) spectra of nanowires are in situ measured by using a scanning near-field optical microscopy(SNoM) probe tip with 100-nm aperture on the scanning near-field optical microscope. The results show that the binding sites from the edge of porous al2 o3 nanopores are combined with the carboxyl of CdSe quantum dots’ surface to form an array of CdSe nanowires in the process of losing background solvent because of the gold nanoparticles filling the nano-holes of porous al2 o3 film. Compared with the area of nonself-assembled nano-wire, the fluorescence on the al2 o3/Au/CdSe interface is significantly enhanced in the self-assembly nano-wire regions due to the electron transfer conductor effect of the gold nanoparticles’ surface. In addition, its full width at half maximum(FWHM) is also obviously widened. The method of enhancing fluorescence and energy transfer can widely be applied to photodetector, photocatalysis, optical display, optical sensing, and biomedical imaging, and so on.

关键词： enhanced photoluminescence Cd Se nano-wire colloidal self-assembled method porous al2o3 film