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Size Effect of Impact abrasive particles on Wear and Surface Hardening Behavior of High‑Manganese Steel

Acta Metallurgica Sinica(English Letters) 2023年第6期36卷 906-916页

作者： Yongjin Wang Chuansongxin Song Renbo Song Zetian Ma Tom Taylor School of Materials Science and Engineering University of Science and Technology BeijingBeijing 100083China Swansea University Swansea SA18EPUK

The size effect of impact abrasive particles on wear and surface hardening behavior of high-manganese steel was studied.Impact wear tests were carried out on MLD-10 tester with abrasive particle sizes of 6.0–0.75 mm,respectively.The results showed that the impact wear behavior and surface hardening mechanism of high-manganese steel were affected by the size of abrasive particles.A critical size of abrasive particle might exhibit to distinguish the impact wear behavior.When the abrasive particle size was larger than 0.75 mm,the wear mass loss generally showed a decreasing trend with the decrease of the abrasive particle size.Dislocation strengthening and mechanical twinning contributed to the good work hardening behavior.However,effective surface hardening layer could not be formed for sample tested with particle size of 0.75 mm and the wear mass loss was the highest among all the conditions.The weak hardening effect led to the sharp increase of the wear mass loss.Press-in abrasives could be observed on the wear surface when the abrasive particle size was larger than 0.75 mm.The press-in abrasives were peeled off from the wear surface and broken,leaving deep grooves and peeling pits.Material exchange with the sample would occur with the flow of abrasives.A large area of furrow was formed on the wear surface.For particle size of 0.75 mm,aggregated abrasives formed a dynamic buffer layer on the surface and the stress distribution was more even.The formation of buffer layer would lower the effect of the impact load and the work hardening effect could not be fully activated.The mutual extrusion among the abrasives,friction wheel and sample caused plastic deformation of the worn surface during impact test.The present study would help guiding to select the application field of high-manganese steel more precisely.

关键词： abrasive particles Three-body impact wear High-manganese steel Wear mechanism Surface hardening behavior

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Optimization of cleaning process parameters to remove abrasive particles in post-Cu CMP cleaning

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Journal of Semiconductors 2018年第12期39卷 212-217页

作者： Liu Yang Baimei Tan Yuling Liu Baohong Gao Chunyu Han Institute of Microelectronics Hebei University of Technology

The cleaning of copper interconnect chemical mechanical polishing(CMP) is a key process in integrated circuits(ICs) fabrication. Colloidal silica, which is used as the abrasive material in copper CMP slurry, is considered as the main particle contamination. abrasive particle residuals can cause device failure which need to be removed efficiently. In this paper, a type of CMP cleaner was used for particle removal using a cleaning solution consisting of FA/O Ⅱ chelating agent and FA/O Ⅰ surfactant. By varying the parameters of brush rotation speed, brush gap,and de-ionized water(DIW) flow rate,a series of experiments were performed to determine the best cleaning results. Atomic force microscope(AFM) measurement was used to characterise the surface morphology of the copper surface and the removal of abrasive particles. A scanning electron microscope(SEM) with EDX was used to observe and analyze the particles shape and elements. The optima parameters of CMP cleaner were obtained. Under those conditions, the abrasive silica particles were removed effectively.

关键词： CMP cleaning abrasive particles process parameter surface roughness

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