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Two-dimensional laser-induced periodic surface structures formed on crystalline silicon by GHz burst mode femtosecond laser pulses

引用

International Journal of Extreme Manufacturing 2023年第1期5卷 212-220页

作者： Shota Kawabata Shi Bai Kotaro Obata Godai Miyaji Koji Sugioka RIKEN Center for Advanced Photonics 2-1 HirosawaWakoSaitama 351-0198Japan department of Applied Physics Tokyo University of Agriculture and Technology2-24-16 NakachoKoganeiTokyo 184-8588Japan

Femtosecond laser pulses with GHz burst mode that consist of a series of trains of ultrashort laser pulses with a pulse interval of several hundred picoseconds offer distinct features in material processing that cannot be obtained by the conventional irradiation scheme of femtosecond laser pulses(single-pulse mode).However,most studies using the GHz burst mode femtosecond laser pulses focus on ablation of materials to achieve high-efficiency and high-quality material *** this study,we explore the ability of the GHz burst mode femtosecond laser processing to form laser-induced periodic surface structures(LIPSS)on *** is well known that the direction of LIPSS formed by the single-pulse mode with linearly polarized laser pulses is typically perpendicular to the laser polarization *** contrast,we find that the GHz burst mode femtosecond laser(wavelength:1030 nm,intra-pulse duration:220 fs,intra-pulse interval time(intra-pulse repetition rate):205 ps(4.88 GHz),burst pulse repetition rate:200 kHz)creates unique two-dimensional(2d)*** regard the formation mechanism of 2d LIPSS as the synergetic contribution of the electromagnetic mechanism and the hydrodynamic ***,generation of hot spots with highly enhanced electric fields by the localized surface plasmon resonance of subsequent pulses in the bursts within the nanogrooves of one-dimensional LIPSS formed by the preceding pulses creates 2d ***,hydrodynamic instability including convection flow determines the final structure of 2d LIPSS.

关键词： GHz burst laser-induced periodic surface structures(LIPSS) surface nanostructuring 2d nanostructures

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