检索结果-南通市图书馆

Advanced control and modeling of deposition processes

Chinese Optics Letters 2013年第13期11卷 30-35页

作者： Detlev Ristau Henrik Ehlers Centre of Quantum Engineering and Space-Time Research Hannover Germany Department of Laser Components Laser Zentrum Hannover e.V. Hannover Germany

During the last decade, striking improvements could be achieved for the precise control of deposition processes in optical coating technology. For example, as a consequence of enormous progresses in measure- ment and computer technology, direct optical monitoring in a broad spectral range can be considered as a common tool in many production environments nowadays. Besides the development of the corresponding hardware and measurement channels, advanced approaches for the evaluation of the acquired data and new multiple sensor monitoring strategies moved into the focus of modern research on the way towards de- terministic deposition techniques. In this context, also innovative concepts for the simulation of deposition processes to forecast the result for a specified coating design and automatic online correction algorithms gained of importance to reduce the risk of failure in coating production. The present contribution will be dedicated to selected aspects in this field, especially addressing broad band optical monitoring systems. A short review on examples for existing hardware configurations and software tools will be presented illus- trating the advantages of modern process control techniques. Novel approaches based on the modeling of thin film growth are discussed as an additional strategy to improve the predictability of coating processes.

关键词： 310.1860 Deposition and fabrication 310.6845 Thin film devices and applications 280.4788 Optical sensing and sensors

来源：

维普期刊数据库评论

在线全文

维普期刊数据库

学校读者我要写书评

暂无评论

2-nm narrow band pass filter in standard configuration evaporate coating machine

引用

Chinese Optics Letters 2013年第13期11卷 48-49页

作者：李景薇 R. Goetzelmann 王笑夷邬江帆肖畅 Leybold Optics (Beijing) Co. Ltd. Beijing 101102 China Key Laboratory of Optical System Advanced Manufacturing Technology Changchun Institute of Optics Fine Mechanics and Physics Chinese Academy of Sciences Changchun 130000 China

High sophisticated optical monitoring systems like the OMS 5000 from Leyboldoptics are commonly used in vacuum coating system to improve the capabilities and reliability of production processes concerning optical performance and repeatability optics. This letter describes a method to perform high end optical filters with additional backside blocking over a wide spectral range. The direct monitoring with intermittent measurement on a large area rotating substrate holder is used to facilitate a narrow band pass filter of 2-nm half bandwidth at 532 nm and high transmittance together with a complex blocking filter to retard disturbing radiation from the ultraviolet （UV） range to the near infrared range. The machine is an ARES 1350 coating system with basically standard configuration.

关键词： 310.1860 Deposition and fabrication 310.6845 Thin film devices and applications 280.4788 Optical sensing and sensors 350.2450 Filters, absorption

来源：

维普期刊数据库评论

在线全文

维普期刊数据库

学校读者我要写书评

暂无评论

欢迎您,

建议与咨询留下您的常用邮箱和电话号码，以便我们向您反馈解决方案和替代方法

时间限定

文献类型

馆藏选择

核心期刊

语言

文献类型

帮助

文字说明：

检索规则说明：

检索范例：

分类表

所选分类

限定检索结果

文献类型

馆藏范围

日期分布

学科分类号

主题

机构

作者

语言

在线全文

在线全文

请选择保存的检索档案：

请选择收藏分类：

通借通还

欢迎您,

建议与咨询 留下您的常用邮箱和电话号码，以便我们向您反馈解决方案和替代方法

时间限定

文献类型

馆藏选择

核心期刊

语言

文献类型

帮助

文字说明：

检索规则说明：

检索范例：

分类表

所选分类

限定检索结果

文献类型

馆藏范围

日期分布

学科分类号

主题

机构

作者

语言

在线全文

在线全文

请选择保存的检索档案： 新增检索档案 确定 取消

请选择收藏分类： 新增自定义分类 确定 取消

通借通还

建议与咨询留下您的常用邮箱和电话号码，以便我们向您反馈解决方案和替代方法

请选择保存的检索档案：

请选择收藏分类：