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Vertically Integrated Thermo-Optic Waveguide Switch Using Optical Polymers

光学学报 2003年第S1期23卷 359-360页

作者： Ki-Hong Kim Sang-Yung Shin Doo-Sun Choi Dept. of EECS Korea Advanced Institute of Science and Technology 373-1 Kusong-dong Yusong-gu Daejeon Republic of Korea.Dept. of EECS Korea Advanced Institute of Science and Technology 373-1 Kusong-dong Yusong-gu Daejeon Republic of Korea.Dept of. Intelligence and precision machine Korea Institute of Machinery and Materials 171 Jang-dong Yusong-gu Daejeon Republic of Korea.

We propose and fabricate a vertically integrated thermo-optic waveguide switch. It controls the optical path between two vertically stacked waveguides using the thermo-optic effect of optical polymer. The measured cro... 详细信息

关键词： mode in heat it than Vertically Integrated Thermo-Optic Waveguide Switch Using Optical Polymers of

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A DEVELOPMENT OF NANO PROBE FOR ULTRA PRECISION SCRATCHING AND MEASURING

A DEVELOPMENT OF NANO PROBE FOR ULTRA PRECISION SCRATCHING A...

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第七届海内外青年设计与制造科学会议

作者： Jeong Woo Park Hyoung Won Kim Cae Moon Lee Jong Kweon Park Deug Woo Lee Engineering Research Center （ERC） Pusan National UniversityKorea Engineering Research Center （ERC） Pusan National UniversityKorea Engineering Research Center （ERC） Pusan National UniversityKorea Intelligence ＆ Precision Machinery Research Division Korea Institute of Machinery and Materials （KIMM）Korea Department of Nano System and Process Engineering Pusan National UniversityKorea

＜正＞The nano probe system that can measure precise micro parts or optical parts in nanometer range resolution and scratch in mN contact force as well was demonstrated. The nano probe was originally designed for on-machine measuring applications or one kind of contact type measuring probes on micro/nano CMM system. It should be small size and able to measure surface topography in nanometer scale. We proposed a new concept of nano probe system by applying commercial capacitive displacement sensor, which can measure the displacement of shaft driven by the variation of surface topography. The main structure of nano probe is consisted of three parts, capacitive displacement sensor, porous type air slide, and contact probe part with various tip radiuses. Especially, capacitive displacement sensor was applied to ensure both the fine control of normal measuring force and nanoscale measuring resolutions. The aerostatic porous type air slide guarantees the shaft to slide smoothly with controllable normal force in mN scale and high positioning accuracy. The probe part, in contact with target surface directly, can be applied to micro-to-nano scale scratching as well as measurement of the sample topography by simple tip change. We applied two types of probe tips, a commercial ruby ball with 300pm in radius and MEMS process based lab-made micro diamond tip under 1μm in tip end radius. To evaluate the characteristics of nano probe, on-machine measuring and （100） silicon scratching test was done under the ultra precision 3 axis stage with 10nm resolution.

关键词： Capacitive displacement sensor Nano probe On-machine measuring CMM (Coordinate Measuring Machine) Scratching

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