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Property mapping of polycrystalline diamond coatings over large area

Journal of Advanced Ceramics 2014年第1期3卷 56-70页

作者： Awadesh Kumar MALLIK Sandip BYSAKH Monjoy SREEMANY sudakshina roy Jiten GHOSH Soumyendu roy Joana Catarina MENDES Jose GRACIO Someswar DATTA CSIR-Central Glass&Ceramic Research Institute Kolkata 700032West BengalIndia Department of Physics Indian Institute of Technology BombayPowaiMumbai 400076MaharashtraIndia Instituto de Telecomunicações Campus Universitário de Santiago3810-193Portugal Nanotechnology Research Division Centre for Mechanical Technology and AutomationUniversity of Aveiro3810-193Portugal

Large-area polycrystalline diamond(PCD)coatings are important for fields such as thermal management,optical windows,tribological moving mechanical assemblies,harsh chemical environments,biological sensors,*** plasma chemical vapor deposition(MPCVD)is a standard technique to grow high-quality PCD films over large area due to the absence of contact between the reactive species and the filament or the chamber ***,the existence of temperature gradients during growth may compromise the desired uniformity of the final diamond *** the present work,a thick PCD coating was deposited on a 100-mm silicon substrate inside a 915-MHz reactor;the temperature gradient resulted in a non-uniform diamond *** attempt was made to relate the local temperature variation during deposition and the different properties of the final *** was found that there was large instability inside the system,in terms of substrate temperature(as high asΔT=212℃),that resulted in a large dispersion of the diamond coating’s final properties:residual stress(-15.8 GPa to+6.2 GPa),surface morphology(octahedral pyramids with(111)planes to cubo-octahedrals with(100)flat top surfaces),thickness(190μm to 245μm),columnar growth of diamond(with appearance of variety of nanostructures),nucleation side hardness(17 GPa to 48 GPa),quality(Raman peak FWHM varying from 5.1 cm^(-1) to 12.4 cm^(-1) with occasional splitting).This random variation in properties over large-area PCD coating may hamper reproducible diamond growth for any meaningful technological application.

关键词： plasma-enhanced chemical vapor deposition(CVD) diamond film mechanical properties nanostructures

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