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Synthesis and Characterization of(Na_(0.5)K_(0.5))NbO_3(NKN) Thin Films Formed by a Diol-based Sol-gel Process

Journal of Materials Science & Technology 2012年第6期28卷 500-505页

作者： Sebastian Wiegand stefan flege Olaf Baake Wolfgang Ensinger Technische Universitt Darmstadt Department of Materials and GeosciencesMaterials Analysis GroupPetersenstrasse 2364287 DarmstadtGermany

Lead-free （***0.5）Nb03 （NKN） thin films were fabricated by spin coating on Pt/Ti/SiO2/Si substrates by a diol-based sol-gel process. Na-acetate, K-acetate, Nb-pentaethoxide and 1,3 propanediol were used to prepare the NKN precursor solution. Thermal analysis showed two characteristic temperatures of 360 and 600℃. Based on these temperatures, a heat treatment program with pyrolysis at 360℃ and calcination at 600℃ after every layer was used. To avoid inhomogeneities and secondary phases, an excess of sodium and potassium was necessary. To evaluate the proper excess amount of sodium and potassium secondary ion mass spectrometry （SIMS） lateral element maps and X-ray diffraction （XRD） patterns were recorded. An excess amount of 20% led to homogeneous distribution of the elements and to single phase perovskite NKN films with random crystal orientation. Scanning electron microscopy （SEMI images showed a pore free surface with 100 nm grains. The leakage current measurements showed a current of lx10-3 A/cm2 at 150 kV/cm.

关键词： Sol-gel process (Nao.sK0.5)NbO3 Thin film Perovskite Lead-free Piezo material

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Effect of Different Calcination Temperatures and Post Annealing on the Properties of Acetic Acid Based Sol-Gel (Na_(0.5)K_(0.5))NbO_3(NKN) Thin Films

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Journal of Materials Science & Technology 2013年第2期29卷 142-148页

作者： Sebastian Wiegand stefan flege Olaf Baake Wolfgang Ensinger Materials Analysis Group Department of Materials and Geosciences Technische Universitt Darmstadt Petersenstrasse 23 64287 Darmstadt Germany

（Na0.5K0.5）NbO3 （NKN） lead free thin films were synthesized by means of an acetic acid based sol-gel process on Pt/Ti/SiO2/Si substrates. Na-acetate, K-acetate and Nb-pentaethoxide were used as metal precursors and acetic acid as the solvent. The effect of different calcination temperatures on the properties of the NKN films was investigated by X-ray diffraction, scanning electron microscopy, leakage current and hysteresis measurements. Low calcination temperatures led to low currents at high electric fields whereas high calcination temperatures led to low currents at low electric fields. Based on these findings calcination at low temperature was combined with a post annealing treatment. Low leakage currents of 4×10^-4 A/cm2 at 150 kV/cm and 2Pr and 2Ec values of 28 μC/cm2 and 150 kV/cm, respectively, could be obtained. All films were single phase NKN with random crystal orientations and no crack or pore formation was visible on the surface.

关键词： Sol-gel process (Na0.5K0.5)NbO3 Thin film Perovskite Lead-free Piezo material

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