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Atomic layer deposition for nanoscale oxide semiconductor thin film transistors:review and outlook

International Journal of Extreme Manufacturing 2023年第1期5卷 153-180页

作者： Hye-Mi Kim Dong-Gyu Kim Yoon-Seo Kim Minseok Kim jin-seong park Division of Materials Science and Engineering Hanyang University222 Wangsimni-roSeongdong-guSeoul 04763Republic of Korea

Since the first report of amorphous In–Ga–Zn–O based thin film transistors,interest in oxide semiconductors has *** offer high mobility,low off-current,low process temperature,and wide flexibility for compositions and ***,depositing oxide semiconductors using conventional processes like physical vapor deposition leads to problematic issues,especially for high-resolution displays and highly integrated memory *** approaches have limited process flexibility and poor conformality on structured *** layer deposition(ALD)is an advanced technique which can provide conformal,thickness-controlled,and high-quality thin film ***,studies on ALD based oxide semiconductors have dramatically increased *** so,the relationships between the film properties of ALD-oxide semiconductors and the main variables associated with deposition are still poorly understood,as are many issues related to *** this review,to introduce ALD-oxide semiconductors,we provide:(a)a brief summary of the history and importance of ALD-based oxide semiconductors in industry,(b)a discussion of the benefits of ALD for oxide semiconductor deposition(in-situ composition control in vertical distribution/vertical structure engineering/chemical reaction and film properties/insulator and interface engineering),and(c)an explanation of the challenging issues of scaling oxide semiconductors and ALD for industrial *** review provides valuable perspectives for researchers who have interest in semiconductor materials and electronic device applications,and the reasons ALD is important to applications of oxide semiconductors.

关键词： atomic layer deposition(ALD) oxide semiconductor thin film transistor(TFT)

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Review of recent progresses on flexible oxide semiconductor thin film transistors based on atomic layer deposition processes

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Journal of Semiconductors 2018年第1期39卷 105-116页

作者： Jiazhen Sheng Ki-Lim Han TaeHyun Hong Wan-Ho Choi jin-seong park Division of Materials Science and Engineering Hanyang University

The current article is a review of recent progress and major trends in the field of flexible oxide thin film transistors（TFTs）, fabricating with atomic layer deposition（ALD） processes. The ALD process offers accurate controlling of film thickness and composition as well as ability of achieving excellent uniformity over large areas at relatively low temperatures. First, an introduction is provided on what is the definition of ALD, the difference among other vacuum deposition techniques, and the brief key factors of ALD on flexible devices. Second, considering functional layers in flexible oxide TFT, the ALD process on polymer substrates may improve device performances such as mobility and stability, adopting as buffer layers over the polymer substrate, gate insulators, and active layers. Third, this review consists of the evaluation methods of flexible oxide TFTs under various mechanical stress conditions. The bending radius and repetition cycles are mostly considering for conventional flexible devices. It summarizes how the device has been degraded/changed under various stress types（directions）. The last part of this review suggests a potential of each ALD film, including the releasing stress, the optimization of TFT structure, and the enhancement of device performance. Thus, the functional ALD layers in flexible oxide TFTs offer great possibilities regarding anti-mechanical stress films, along with flexible display and information storage application fields.

关键词： atomic layer deposition(ALD) oxide semiconductor thin film transistor flexible device mechanical stress

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Dynamic enhanced computed tomography imaging findings of an inflammatory fibroid polyp with massive fibrosis in the stomach

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World Journal of Gastroenterology 2017年第11期23卷 2090-2094页

作者： Eun Jung Shim Sung Eun Ahn Dong Ho Lee seong jin park Youn Wha Kim Department of Radiology Kyung Hee University HospitalGraduate SchoolKyung Hee University Department of Pathology Kyung Hee University HospitalGraduate SchoolKyung Hee University

Inflammatory fibroid polyp(IFP) is a rare benign lesion of the gastrointestinal tract. We report a case of computed tomography(CT) imaging finding of a gastric IFP with massive fibrosis. CT scans showed thickening of submucosal layer with overlying mucosal hyperenhancement in the gastric antrum. The submucosal layer showed increased enhancement on delayed phase imaging. An antrectomy with gastroduodenostomy was performed because gastric cancer was suspected, particularly signet ring cell carcinoma. The histopathological diagnosis was an IFP with massive fibrosis. The authors suggest that when the submucosal layer of the gastric wall is markedly thickened with delayed enhancement and preservation of the mucosal layer, an IFP with massive fibrosis should be considered in the differential diagnosis.

关键词： Inflammatory fibroid polyp Gastric polyp Gastric submucosal tumor Signet ring cell carcinoma Computed tomography imaging finding

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Multiplanar reformations and minimum intensity projections using multi-detector row CT for assessing anomalies and disorders of the pancreaticobiliary tree

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World Journal of Gastroenterology 2007年第31期13卷 4177-4184页

作者： Hyun Cheol Kim Dal Mo Yang Wook jin Chang Woo Ryu Jung Kyu Ryu Sung Il park seong jin park Hyeong Cheol Shin Il Young Kim Department of Radiology East-West Neo Medical Center Kyung-Hee University Seoul Republic of Korea Department of Diagnostic Radiology Kwandong University Myongji Hospital Goyang Republic of Korea Department of Diagnostic Radiology Soonchunhyang University Bucheon Hospital Bucheon Republic of Korea Department of Diagnostic Radiology Soonchunhyang University Cheonan Hospital Cheonan Republic of Korea

CT scan is regarded as the imaging modality of choice in patients with pancreaticobiliary ductal abnormalities. However, the axial orientation of the CT images provides only limited anatomical view of pancreaticobiliary ductal abnormalities. The technological advances of multi-de-tector row CT and three-dimensional image processing in workstations allows rapid image acquisition and a short postprocessing time. In particular, multiplanar reforma-tions (MPR) and minimum intensity projections (MinIP) offer rapid and accurate images of the anatomy and ab-normalities of the pancreaticobiliary tree. Moreover, MPR and MinIP help determine the relationship between the pancreaticobiliary ductal anatomy and the surrounding structures. This pictorial review illustrates the wide spec-trum of images obtained by the MPR and MinIP of the anomalies and disorders of the pancreaticobiliary tree.

关键词： Multi-detector CT Bile Ducts Biliary System Pancreas Computer Applications-3D

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Prominent cycling reversibility and kinetics enabled by CaTiO3 protective layer on Zn metal for aqueous Zn-ion batteries

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Journal of Energy Chemistry 2025年第1期100卷 245-258页

作者： Gaeun Lee Yong Nam Ahn seongjoon So Chanwoo park Jong-seong Bae Taehyun park Il Tae Kim Jaehyun Hur School of Chemical Biological and Battery Engineering Gachon University Seongnam Busan Center Korea Basic Science Institute

Aqueous Zn-ion batteries （AZIBs） have received considerable attention owing to their various advantages such as safety,low cost,simple battery assembly conditions,and high ionic ***,they still suffer from serious problems,including uncontrollable dendrite growth,corrosion,hydrogen evolution reaction （HER） from water decomposition,electrode passivation,and unexpected *** creation of a uniform artificial nanocrystal layer on the Zn anode surface is a promising strategy for resolving these ***,we propose the use of a perovskite CaTiO3（CTO） protective layer on Zn（CTO@Zn） as a promising approach for improving the performance of *** CTO artificial layer provides an efficient pathway for Zn ion diffusion towards the Zn metal because of the high dielectric constant （εr=180） and ferroelectric characteristics that enable the alignment of dipole moments and redistribute the Zn2+ions in the CTO *** avoiding the direct contact of the Zn anode with the electrolyte solution,the uneven dendrite growth,corrosion,parasitic side reactions,and HER are mitigated,while CTO retains its mechanical and chemical robustness during ***,CTO@Zn demonstrates an improved lifespan in a symmetric cell configuration compared with bare ***@Zn shows steady overpotential （～68 m V） for 1500 h at 1 mA cm-2/0.5 mA h cm-2,excelling bare ***,when paired with the V2O5-C cathode,the CTO@Zn//V2O5-C full battery delivers 148.4 mA h g-1（based on the mass of the cathode） after 300 *** study provides new insights into Zn metal anodes and the development of high-performance AZIBs.

关键词： Artificial layer Dielectric constant Zn metal anode Zinc aqueous battery

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球化处理对氢化脱氢钛粉特性及其注射成形喂料流变性能的影响

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粉末冶金工业 2006年第5期16卷 1-4页

作者：邹欣吴运新盖国胜 Donald F.Heaney seong-jin park Randall M.German 清华大学机械系粉末烧结实验室北京100084 清华大学材料系粉体工程研究室北京100084 Pennsylvania State University Mississippi State University

氢化脱氢(HDH)钛粉形状不规则、流动性较差,不利于注射成形和提高其制品性能。本文通过PCS系统对HDH钛粉末进行球化处理,考察了球化处理对HDH钛粉特性及其注射成形喂料流变性能的影响。结果表明:球化处理后的HDH钛粉末变为近球形,粉末... 详细信息

氢化脱氢(HDH)钛粉形状不规则、流动性较差,不利于注射成形和提高其制品性能。本文通过PCS系统对HDH钛粉末进行球化处理,考察了球化处理对HDH钛粉特性及其注射成形喂料流变性能的影响。结果表明:球化处理后的HDH钛粉末变为近球形,粉末的流动性显著提高,其注射成形喂料的流变性能得到明显改善;同时,球化处理后钛粉的烧结组织明显细化,致密度大幅度提高。

关键词：球化处理氢化脱氢(HDH)钛粉粉末注射成形(PIM) 流变性能

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Amine functionalization on thermal and mechanical behaviors of graphite nanofibers-loaded epoxy composites

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Journal of Materials Science & Technology 2023年第20期151卷 80-88页

作者： seong-Hwang Kim Sang-jin park Seul-Yi Lee Soo-jin park Department of Chemistry Inha University100 InharoIncheon 22212the Republic of Korea

With the growing demand for faster and more powerful computing,effective heat dissipation is essential to ensure the longevity,reliability,and high performance of electronic *** the field of modern electronic packaging materials,there is a great need for graphitic material-loaded polymeric composites(GPCs)with excellent thermal ***,the enhancement efficiency of GPCs is hindered by the agglomeration of fillers and the interfacial thermal resistance caused by the lack of continuous thermally conductive pathways between the filler and *** the interfaces between filler and matrix is of great importance in optimizing the performances of ***,we fabricated graphite nanofibers(GNF)-loaded nanocomposites using acid-functionalized GNF(AGNF)and acidtetraethylenepentamine-functionalized(TGNF)as a filler and epoxy resin as a matrix with different GNF loading contents to explore the interfacial properties of the *** optimal GNF loading for AGNF was 0.5 wt.%,while the TGNF showed 0.75 wt.%.The highest thermal conductivity(0.51 W m^(−1) K^(−1))and fracture toughness(25.8 MPa m^(1/2))values were found in the TGNF-loaded nanocomposites with a fraction of 0.75 wt.%,representing enhancements of∼145%and∼400%,respectively,compared to those of neat *** experimental data presented herein demonstrate that the interfacial properties play a significant role in enhancing the thermal and mechanical performances of the *** present approach is expected to serve as a valuable tool in the design of conductive polymeric nanocomposites for further practical applications,such as thermal interface materials and packaging of high-power electric devices.

关键词： Graphite nanofiber Nanocomposites Interfacial interaction Thermal conductivity Fracture resistance

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Lightweight design of 45000r/min spindle using full factorial design and extreme vertices design methods

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Journal of Central South University 2011年第1期18卷 153-158页

作者： park seong-jin LEE Choon-man HWANG Young-kug Department of Mechanical Design and Manufacturing Engineering Changwon National University

Factors for determining the spindle size are the shaft diameter, positions of bearing and motor, and entire length of the spindle. Then, it is important to find the assembling of the optimal design variables, which satisfy the stiffimss and rotational speed required to the spindle. A general full factorial design method was used to verify some factors that affect the natural frequency of a spindle. It is verified that the shorter shaft length and bearing span length represent the higher natural frequency, and there are some effects according to the change in the levels of factors. The detailed spindle dimension is determined by applying an EVD method, which can define the optimal bearing position through considering the limiting condition. Based on the estimated regression model, the optimal spindle size and bearing distance that can improve the primary natural frequency are obtained, and the influence of design factors on the natural frequency is also analyzed.

关键词： high-speed spindle extreme vertices design natural frequency lightweight design full factorial design

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Polysaccharide from Astragalus membranaceus promotes the activation of human peripheral blood and mouse spleen dendritic cells

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Chinese Journal of Natural Medicines 2021年第1期19卷 56-62页

作者： Lim seong-Min park Hae-Bin jin Jun-O Department of Medical Biotechnology Yeungnam UniversityGyeongsan 38541South Korea Shanghai Public Health Clinical Center Shanghai Medical CollegeFudan UniversityShanghai201508China

Astragalus membranaceus(***)is a widely used traditional herb in China and *** polysaccharides(AMP),which make up a major part of the root extract,have been shown to modulate immune modulations,especially activation of bone marrow-derived dendritic cells(BMDCs)and T ***,the immune stimulatory effect of AMP in the mouse in vivo and human peripheral blood DCs(PBDCs)has not been well *** this study,we found that intravenous(i.v.)injection of AMP in C57 BL/6 mice induced remarkable elevations in co-stimulatory and MHC class I and II molecule levels in the splenic DCs and its *** stimulatory effect of DCs by AMP was elevated 6 h after treatment,which rapidly decreased 18 h after ***,AMP promoted intracellular production of pro-inflammatory cytokines in spleen DC subsets,which contributed elevation of serum cytokine ***,the AMP promoted PBDC ***,these results demonstrate that AMP can be used as an immune stimulatory molecules in human and mouse.

关键词： Astragalus membranaceus polysaccharide Spleen dendritic cell Human peripheral blood dendritic cell

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Assembly of charged aerosols on non-conducting substrates via ion-assisted aerosol lithography （IAAL）

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Particuology 2017年第4期15卷 17-23页

作者： Seunghyon Kang Wooik Jung Dae seong Kim Sei jin park Mansoo Choi School of Mechanical and Aerospace Engineering Seoul National University Seou 108826 Republic of Korea Global Frontier Center for Multiscale Energy Systems Seoul National University Seou108826 Republic of Korea

The development of ion-assisted aerosol lithography （IAAL） has enabled fabrication of complex three- dimensional nanoparticle （NP） structures on conducting substrates. In this work, the applicability of the IAAL technique was investigated on non-conducting substrates. The NP structure growth process on a non-conducting substrate was found to self-terminate and the structures subsequently repel incoming charged NPs and scatter them away. Electric field calculations supported the experimental findings and confirmed that the electric field distortions owing to charge build-up within the structures prevented additional NP deposition thereon. To regulate the charge build-up without compromising the number of NPs available for assembly, a corona discharger and an ion trap were implemented. By varying the number of ions available in the assembly process, an optimum level of ion injection was found that allowed for a prolonged （〉120 rain） assembly of NP structures on non-conducting substrates without the unwanted scattering of NPs.

关键词： Nanoparticle assembly Non-conducting substrate Ion-assisted aerosol lithography Ion trap

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