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Deep learning in optical metrology:a review

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Light(Science & Applications) 2022年第4期11卷 466-519页

作者： Chao Zuo Jiaming qian Shijie Feng Wei Yin Yixuan Li Pengfei Fan Jing Han kemao qian qian Chen Smart Computational Imaging(SC)Laboratory Nanjing University of Science and Technology210094 NanjingJiangsu ProvinceChina Jiangsu Key Laboratory of Spectral Imaging&Intelligent Sense Nanjing University of Science and Technology210094 NanjingJiangsu ProvinceChina School of Engineering and Materials Science Queen Mary University of LondonLondon E14NSUK School of Computer Science and Engineering Nanyang Technological UniversitySingapore 639798Singapore

With the advances in scientific foundations and technological implementations,optical metrology has become versatile problem-solving backbones in manufacturing,fundamental research,and engineering applications,such as quality control,nondestructive testing,experimental mechanics,and *** recent years,deep learning,a subfield of machine learning,is emerging as a powerful tool to address problems by learning from data,largely driven by the availability of massive datasets,enhanced computational power,fast data storage,and novel training algorithms for the deep neural *** is currently promoting increased interests and gaining extensive attention for its utilization in the field of optical *** the traditional,,physics-basedH approach,deep-learning-enabled optical metrology is a kind of,/data-drivenw approach,which has already provided numerous alternative solutions to many challenging problems in this field with better *** this review,we present an overview of the current status and the latest progress of deep-learning technologies in the field of optical *** first briefly introduce both traditional image-processing algorithms in optical metrology and the basic concepts of deep learning,followed by a comprehensive review of its applications in various optical metrology tasks,such as fringe denoising,phase retrieval,phase unwrapping,subset correlation,and error *** open challenges faced by the current deep-learning approach in optical metrology are then ***,the directions for future research are outlined.

关键词： backbone subset versatile

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线阵相机标定方法综述

光学学报 2020年第1期40卷 175-187页

作者：王国珲钱克矛西安工业大学光电工程学院陕西西安710021 新加坡南洋理工大学计算机科学与工程学院新加坡639798

在基于相机的众多应用场合中,对相机内外参数与镜头畸变参数的标定是关键环节,确定其标定过程的简易操作及标定结果的精度至关重要。与面阵相机相比,线阵相机的标定过程较为复杂。介绍了适合线阵相机的成像几何模型和镜头畸变模型,总结... 详细信息

在基于相机的众多应用场合中,对相机内外参数与镜头畸变参数的标定是关键环节,确定其标定过程的简易操作及标定结果的精度至关重要。与面阵相机相比,线阵相机的标定过程较为复杂。介绍了适合线阵相机的成像几何模型和镜头畸变模型,总结了线阵相机标定的一般流程,归纳分析了文献中基于静态成像和动态扫描成像的标定方法,并对其特点作出了简要评价。

关键词：成像系统标定线阵相机相机成像模型镜头畸变模型非线性优化交比不变性

基于调制度分析的加权最小二乘相位展开方法(英文)

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光子学报 2001年第5期30卷 585-588页

作者：钱克矛伍小平中国科学技术大学力学与机械工程系合肥230027

介绍了光学相位展开的加权最小二乘法 ,采用调制度分析方法确定其权值 .

关键词：光学相位展开加权最小二乘法调制度分析加权值信息光学

Online volume rendering of incrementally accumulated LSCEM images for superficial oral cancer detection

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World Journal of Clinical Oncology 2011年第4期2卷 179-186页

作者： Wei Ming Chiew Feng Lin kemao qian Hock Soon Seah School of Computer Engineering Nanyang Technological UniversitySingapore 639798Singapore

Laser scanning confocal endomicroscope(LSCEM)has emerged as an imaging modality which provides noninvasive,in vivo imaging of biological tissue on a microscopic *** visualizations for LSCEM datasets captured by current imaging systems require these datasets to be fully acquired and brought to a separate rendering *** extend the features and capabilities of this modality,we propose a system which is capable of performing realtime visualization of LSCEM *** field-programmable gate arrays,our system performs three tasks in parallel:(1)automated control of dataset acquisition;(2)imaging-rendering system synchronization;and(3)realtime volume rendering of dynamic *** fusion of LSCEM imaging and volume rendering processes,acquired datasets can be visualized in realtime to provide an immediate perception of the image quality and biological conditions of the subject,further assisting in realtime cancer ***,the imaging procedure can be improved for more accurate diagnosis and reduce the need for repeating the process due to unsatisfactory datasets.

关键词： Confocal endomicroscope Field-programmable gate arrays Incrementally accumulated volume rendering Realtime Online cancer detection

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用待定系数法设计误差补偿相移算法(英文)

光子学报 2000年第9期29卷 848-851页

作者：钱克矛伍小平中国科学技术大学力学与机械工程系合肥230027

提出了一种以误差补偿为目的的新的相移算法设计方法—待定系数法 ,该方法首先在算法表达式中引入一系列待定参数 ,根据对误差补偿的要求提供约束方程 ,从而解出这些未知参数 .待定系数法使得算法设计和误差分析是同时进行的 ,改变了以... 详细信息

提出了一种以误差补偿为目的的新的相移算法设计方法—待定系数法 ,该方法首先在算法表达式中引入一系列待定参数 ,根据对误差补偿的要求提供约束方程 ,从而解出这些未知参数 .待定系数法使得算法设计和误差分析是同时进行的 ,改变了以往先设计算法再进行误差分析和评价的过程 ,由待定系数法导出的相移算法对算法设计中所考虑的误差源具有良好的补偿性能 .

关键词：待定系数法误差补偿相移算法光干涉仪

An Improvement of Spatial Carrier Phase-shifting Method

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Chinese Journal of Lasers 2001年第2期 23-27页

作者： qian kemao WU Xiaoping (Department of Mechanics and Mechanical Engineering, University of Science and Technology of China, Hefei 230027, China)

Spatial carrier phase shifting method (SCPM) retrieves the phase distribution from carrier interferograms by assuming that the phases of the processed pixel and its adjacent pixels are uniform, which introduces considerable theoretical error. A new method is presented in this paper to improve the SCPM accuracy: (1) A quadric curve is used to describe the phase distribution of the adjacent pixels; (2) The linear and quadric terms of the phase are considered as phase shifter errors; (3) Suitable phase shifting algorithms insensitive to these errors are selected. Two “5 step” algorithms are used and their properties are analyzed. An example of phase retrieving by SCPM is given and the result shows that SCPM has high theoretical accuracy. With the potential high accuracy, ability of measuring dynamic phase and computational simplicity, SCPM will become a much more useful phase measurement method.

关键词： spatial carrier phase shifting method (SCPM) phase shifting algorithm error analysis

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利用位相光栅的实时偏振相移方法的误差分析

激光杂志 2000年第6期21卷 17-20页

作者：钱克矛伍小平中国科学技术大学力学与机械工程系合肥230027

利用位相光栅的实时偏振相移方法可实现对动态过程位相的测量 ,具有很好的应用前景。本文对其作了全面的误差分析 ,被分析的误差源包括 1/4波片位相延迟误差、1/4波片方位角误差、偏振片方位角误差。

关键词：实时偏振相移误差分析位相光栅

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频谱校正的线性调频Z变换方法

振动工程学报 2000年第4期13卷 628-632页

作者：钱克矛李川奇中国科学技术大学工程科学学院合肥230027

提出了一种用线性调频 Z变换进行频谱校正的新方法 ,通过提高局部频段内的频率分辨率解决离散谱线不能对准实际谱峰时所带来的误差。介绍了线性调频 Z变换的原理以及将该变换应用于频谱校正的具体方法和步骤 ,并通过仿真计算对该频谱校... 详细信息

提出了一种用线性调频 Z变换进行频谱校正的新方法 ,通过提高局部频段内的频率分辨率解决离散谱线不能对准实际谱峰时所带来的误差。介绍了线性调频 Z变换的原理以及将该变换应用于频谱校正的具体方法和步骤 ,并通过仿真计算对该频谱校正方法有效性进行验证。模拟计算表明该方法具有校正精度高、速度快和灵活性强的特点。

关键词：频谱分析信号处理线性调频Z变换误差分析

A comprehensive review of dwell time optimization methods in computer-controlled optical surfacing

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Light(Advanced Manufacturing) 2024年第3期5卷 142-171页

作者： Tianyi Wang Xiaolong Ke Lei Huang Qingqing Cui Zili Zhang Chunjin Wang Hyukmo Kang Weslin Pullen Heejoo Choi Daewook Kim Vipender Negi qian kemao Yi Zhu Stefano Giorgio Philip Boccabella Nathalie Bouet Corey Austin Mourad Idir National Synchrotron Light Source II(NSLS-II) Brookhaven National LaboratoryP.O.Box 5000UptonNY 11973USA School of Mechanical and Automotive Engineering Xiamen University of TechnologyXiamen 361024China State Key Laboratory of Ultra-precision Machining Technology Department of Industrial Systems and EngineeringThe Hong Kong Polytechnic UniversityHung HomKowloonHong KongChina James C.Wyant College of Optical Sciences University of Arizona1630 E.University Blvd.P.O.Box 210094TucsonAZ 85721-0094USA Large Binocular Telescope Observatory University of ArizonaTucsonAZ 85721USA Department of Astronomy and Steward Observatory University of Arizona933 N.Cherry Ave.TucsonAZ85721USA Indian Institute of Technology Delhi Hauz KhasNew Delhi 110016India School of Computer Science and Engineering Nanyang Technological University50 Nanyang AvenueSingapore 639798

Dwell time plays a vital role in determining the accuracy and convergence of the computer-controlled optical surfacing ***,optimizing dwell time presents a challenge due to its ill-posed nature,resulting in non-unique *** address this issue,several well-known methods have emerged,including the iterative,Bayesian,Fourier transform,and matrix-form *** their independent development,these methods share common objectives,such as minimizing residual errors,ensuring dwell time's positivity and smoothness,minimizing total processing time,and enabling flexible dwell *** paper aims to comprehensively review the existing dwell time optimization methods,explore their interrelationships,provide insights for their effective implementations,evaluate their performances,and ultimately propose a unified dwell time optimization methodology.

关键词： Dwell time optimization Computer-controlled optical surfacing Finishing Polishing Optical fabrication