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Implantable intracortical microelectrodes: reviewing the present with a focus on the future

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Microsystems & Nanoengineering 2023年第1期9卷 37-53页

作者： Yang Wang Xinze Yang Xiwen Zhang Yijun Wang weihua pei State Key Laboratory of Integrated Optoelectronics Institute of SemiconductorsChinese Academy of Sciences100083BeijingChina University of Chinese Academy of Sciences 100049BeijingChina Chinese Institute for Brain Research 102206BeijingChina

Implantable intracortical microelectrodes can record a neuron’s rapidly changing action potentials(spikes).In vivo neural activity recording methods often have either high temporal or spatial resolution,but not *** is an increasing need to record more neurons over a longer duration in ***,there remain many challenges to overcome before achieving long-term,stable,high-quality recordings and realizing comprehensive,accurate brain activity *** on the vision of an idealized implantable microelectrode device,the performance requirements for microelectrodes are divided into four aspects,including recording quality,recording stability,recording throughput,and multifunctionality,which are presented in order of *** challenges and current possible solutions for implantable microelectrodes are given from the perspective of each *** current developments in microelectrode technology are analyzed and summarized.

关键词： recording microelectrode overcome

A compact neural recording interface based on silicon microelectrode

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Science China(Technological Sciences) 2013年第11期56卷 2808-2813页

作者： HAN JianQiang ZHANG Xu pei weihua GUI Qiang LIU Ming CHEN HongDa State Key Laboratory on Integrated Optoelectronic Institute of SemiconductorsChinese Academy of Sciences

A prototype of hybrid neural recording interface has been developed for extracellular neural recording. It consists of a silicon-based plane microelectrode array and a CMOS low noise neural amplifier chip. The neural amplifier chip is designed and implemented in 0.18 μm N-well CMOS 1P6M technology. The area of the neural preamplifier is only 0.042 mm2 with a gain of 48.3 dB. The input equivalent noise is 4.73 btVrms within pass bands of 4 kHz. To avoid cable tethering for high dense mul- tichannel neural recording interface and make it compact, flip-chip bonding is used to integrate the preamplifier chip and the microelectrode together. The hybrid device measures 3 mm×5.5 mm×330μm, which is convenient for implant or in-vivo neu- ral recording. The hybrid device was testified in in-vivo experiment. Neural signals were recorded from hippocampus region of anesthetized Sprague Dawley rats successfully.

关键词： neural recording interface silicon microelectrode CMOS preamplifier flip-chip bonding hybrid device

A composite insulation structure for silicon-based planar neuroprobes

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Science China(Technological Sciences) 2012年第9期55卷 2436-2440页

作者： ZHAO Hui pei weihua CHEN SanYuan GUI Qiang TANG RongYu GUO Kai CHEN HongDa State Key Laboratory Integrated Optoelectronics Institute of SemiconductorsChinese Academy of SciencesBeijing 100083China

Silicon-based planar neuroprobes are composed of silicon substrate,conducting layer,and insulation layers of SiO 2 or SiN *** insulation layer is very important because it affects many key parameters of neuprobes,like impedance,SNR(signal noise ratio),reliability,*** membrane of SiO 2 or SiN are not good choices for insulation layer,since defects and residual stress in these layers can induce bad *** this paper a composite insulation structure is studied,with thermal SiO 2 as the lower insulation layer and with multilayer membrane composed of PECVD SiO 2 and SiN as the upper insulation *** structure not only solves the problem of residual stress but also ensures a good probe *** it's a good choice for insulation layer of neuroprobes.

关键词： silicon-based neuroprobes insulation structure multilayer membrane stress durability passivation

Fabrication and characterization of implantable silicon neural probe with microfluidic channels

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Science China(Technological Sciences) 2012年第1期55卷 1-5页

作者： GUO Kai pei weihua LI XiaoQian GUI Qiang TANG RongYu LIU Jian CHEN HongDa State Key Laboratory on Integrated Optoelectronics Institute of Semiconductors Chinese Academy of Sciences Beijing 100083 China

In this paper, a silicon-based neural probe with microfluidic channels was developed and evaluated. The probe can deliver chemicals or drugs to the target neurons while simultaneously recording the electrical action of these neurons extracellularly. The probe was fabricated by double-sided deep reactive ion etching （DRIE） from a silicon-on-insulator （SO1） wafer. The flu- idic channels were formed with V-shape groove etching on the silicon probe and sealed with silicon nitride and parylene-C. The shank of the probe is 4 mm long and 120 ~tm wide. The thickness of the probe is 100 ~tm. The probe has two fluidic chan- nels and two recording sites. The microfluidic channels can withstand a pressure drop as much as 30 kPa and the flow resisti ity of the microfluidic channel is 0.13 μL min-1 kPa-1, The typical impedance of the neural electrode is 32.3 kΩ at 1 kHz at room temperature.

关键词： neural probe parylene-C microfluidic channel

Investigation of flexible electrodes modified by TiN,Pt black and IrO_x

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Science China(Technological Sciences) 2011年第9期54卷 2305-2309页

作者： LI XiaoQian pei weihua TANG RongYu GUI Qiang GUO Kai WANG Yu CHEN HongDa State Key Laboratory on Integrated Optoelectronics Institute of Semiconductors Chinese Academy of Sciences BeOing 100083 China School of Physical Science and Technology LanZhou University Lanzhou 730000 China

TiN, platinum （Pt） black and iridium oxide are introduced to the stimulating sites to improve the performance of the flexible electrode. Low temperature process is used to fabricate the modifying films. TiN is coated on the gold sites by magnetron sputtering while platinum black and iridium oxide are coated by electroplating and electrodeposifion, respectively. The impedance of the electrode decreases dramatically after modification. The combined analysis of surface morphology and cyclic voltammograms （CV） in phosphate buffer saline （PBS） solution indicates that the modified electrode sites have larger electrode-electrolyte capacitance and smaller faradic resistance than unmodified sites, thus they have smaller electrochemical impedances.

关键词： flexible electrodes modification impedance cyclic voltammograms (CV)

Fabrication of strongly adherent platinum black coatings on microelectrodes array

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Science China(Information Sciences) 2014年第4期57卷 208-217页

作者： TANG RongYu pei weihua CHEN SanYuan ZHAO Hui CHEN YuanFang HAN Yao WANG ChunLan CHEN HongDa State Key Laboratory on Integrated Optoelectronics Institute of SemiconductorsChinese Academy of Sciences State Key Laboratory on Integrated Optoelectronics Institute of SemiconductorsChinese Academy of Sciences Beijing 100083 China Department of Tissue Engineering Institute of Basic Medical Sciences and Tissue Engineering Research CenterAcademy of Military Medical Sciences

Platinum black coating can effectively improve the performance of MEAs(microelectrodes array)in neural signal transduction,though its lack of adhesion strength and durability tampers its usage in long term *** a new method of composite electrodeposition provides highly adhesive platinum black coating that enables MEAs for a month’s long task and repeatable *** new method was compared with present techniques on multiple aspects,*** surface area,surface morphology,interfacial impedance,durability and real application *** show that the new composite coating provides greatly improved durability without compromising its *** cells were cultured on these MEAs for 40 days in vitro and spontaneous action potentials with high signal/noise ratio were *** model and simulation provided preliminary understanding on the mechanism of this strengthened platinum black coating.

关键词： microelectrode array platinum black electroplating electrophysiology neural culture

A flexible capacitive tactile sensor array with micro structure for robotic application

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Science China(Information Sciences) 2014年第12期57卷 41-46页

作者： HU XiaoHui ZHANG Xu LIU Ming CHEN YuanFang LI Peng pei weihua ZHANG Chun CHEN HongDa Institute of Semiconductors Academy of Sciences Institute of Microelectronics Tsinghua University

A flexible capacitive tactile sensor array with micro needle structure is proposed in this paper for robotic *** needle layer made of polydimethylsiloxane(PDMS)is sandwiched between the upper electrode layer made of PDMS and the bottom electrode layer fabricated on polyester(PET)*** PDMS material renders the device adequate flexibility as it can be rolled into a *** single cell size in the fabricated 4×4 sensors array is 0.7×0.5 cm2and the initial capacitance of each cell is 0.86 p *** fabricated cell shows a sensitivity of 3.26%/m N within the full scale range of 1 k *** micro needle structure gives better repeatability and *** maximum error during each measurement is about 3.2%,while the minimum error is about 1.2%.

关键词： capacitive sensor flexible tactile sensor micro needle bionic robot

Flexible multichannel electrodes for acute recording in nonhuman primates

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Microsystems & Nanoengineering 2023年第4期9卷 69-76页

作者： Yang Wang Qifan Wang Ruichen Zheng Xinxiu Xu Xinze Yang Qiang Gui Xiaowei Yang Yijun Wang He Cui weihua pei State Key Laboratory of Integrated Optoelectronics Institute of SemiconductorsChinese Academy of SciencesBeijing 100083China University of Chinese Academy of Sciences Beijing 101408China Institute of Neuroscience Key Laboratory of Primate NeurobiologyCAS Center for Excellence in Brain Science and Intelligence TechnologyChinese Academy of SciencesShanghai 200031China Chinese Institute for Brain Research Beijing 102206China

Flexible electrodes have demonstrated better biocompatibility than rigid electrodes in relieving tissue encapsulation and long-term *** primates are closer to humans in their brains’structural and functional properties,thus making them more suitable than rodents as animal models for potential clinical ***,the application of flexible electrodes on nonhuman primates has rarely been *** the present study,a flexible multichannel electrode array for nonhuman primates was developed and implemented for extracellular recording in behaving *** minimize the window of durotomy for reducing possible risks,a guide-tube-compatible implantation solution was designed to deliver the flexible electrodes through the dura into the *** proposed structure for inserting flexible electrodes was characterized ex vivo and validated in ***,acute recording of multichannel flexible electrodes for the primates was *** results showed that the flexible electrodes and implantation method used in this study meet the needs of extracellular recording in nonhuman ***-related neuronal activities with a high signal-to-noise ratio of spikes demonstrated that our whole device is currently a minimally invasive and clinically viable approach for extracellular recording.

关键词： recording implantation closer

High precision intelligent flexible grasping front-end with CMOS interface for robots application

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Science China(Information Sciences) 2016年第3期59卷 176-186页

作者： Xiaohui HU Xu ZHANG Ming LIU Yuanfang CHEN Peng LI Jialin LIU Zhaolin YAO weihua pei Chun ZHANG Hongda CHEN Institute of Semiconductors Academy of Sciences Institute of Microelectronics Tsinghua University

This paper presents a high-precision intelligent flexible robot grasping front-end with an integrated capacitive tactile sensor array and a conditioning chip. The capacitive tactile sensor is the primary part of the front-end, it determines the overall performance. The micro-needle array sandwich structure in the tactile sensor increases the repeatability and stability, and ensures the sensitivity. The assembled sensor exhibits a saturation at 10.53 N(421 k Pa) with a sensitivity of 1.9%/k Pa. Furthermore, a conditioning chip is utilized in a custom readout interface to achieve better performance by reducing signal attenuation, and to increase the compatibility of the front-end. The chip is optimized for the parasitic shunt capacitance in the capacitor array. A dual bidirectional charge-discharge conversion method and a two-port detection method are matched to achieve the goal of reducing the shunting influence, and attenuating the offset voltage or the noise input effects. A prototype of the interface has been fabricated using 180-nm CMOS technology. Sensor with the value of 0.5 p F shunted by capacitors of 47 p F has been detected with an error of 1% within 100 μs.

关键词： Capacitive sensor array flexible sensor tactile sensor micro-needle array bionic robot