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Fast source mask co-optimization method for high-NA EUV lithography

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opto-Electronic Advances 2024年第4期7卷 44-54页

作者： Ziqi Li Lisong Dong Xu ma Yayi Wei EDA Center Institute of Microelectronics of Chinese Academy of SciencesBeijing 100029China Key Laboratory of Photoelectronic Imaging Technology and System of Ministry of Education of China School of Optics and PhotonicsBeijing Institute of TechnologyBeijing 100081China University of Chinese Academy of Sciences Beijing 100049China Guangdong Greater Bay Area Applied Research Institute of Integrated Circuit and Systems Guangzhou 510700China

Extreme ultraviolet(EUV)lithography with high numerical aperture(NA)is a future technology to manufacture the integrated circuit in sub-nanometer ***,source mask co-optimization(SMo)is an extensively used approach for advanced lithography process beyond 28 nm technology *** work proposes a novel SMo method to improve the image fidelity of high-NA EUV lithography system.A fast high-NA EUV lithography imaging model is established first,which includes the effects of mask three-dimensional structure and anamorphic ***,this paper develops an efficient SMo method that combines the gradient-based mask optimization algorithm and the compressivesensing-based source optimization algorithm.A mask rule check(MRC)process is further proposed to simplify the optimized mask *** illustrate that the proposed SMo method can significantly reduce the lithography patterning error,and maintain high computational efficiency.

关键词： computational lithography high-NA EUV lithography source-mask co-optimization lithography imaging model

Gyroid Triply Periodic Minimal Surface Lattice Structure Enables Improved Superelasticity of CuAlMn Shape Memory Alloy

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Acta Metallurgica Sinica(English Letters) 2024年第6期37卷 1047-1065页

作者： Mengwei Wu Chunmei ma Ruiping Liu Huadong Fu Department of materials Science and Engineering China University of Mining and Technology(Beijing)Beijing100083China Institute for Advanced materials and Technology University of Science and Technology BeijingBeijing100083China

Improving the shape memory effect and superelasticity of Cu-based shape memory alloys(Smas)has always been a research hotspot in many *** work systematically investigates the effects of Gyroid triply periodic minimal surface(TPMS)lattice structures with different unit sizes and volume fractions on the manufacturing viability,compressive mechanical response,superelasticity and heating recovery properties of CuAlMn *** results show that the increased specific surface area of the lattice structure leads to increased powder adhesion,making the manufacturability proportional to the unit size and volume *** compressive response of the CuAlMn Smas Gyroid TPMS lattice structure is negatively correlated with the unit size and positively correlated with the volume *** superelastic recovery of all CuAlMn Smas with Gyroid TPMS lattice structures is within 5%when the cyclic cumulative strain is set to be 10%.The lattice structure shows the maximum superelasticity when the unit size is 3.00 mm and the volume fraction is 12%,and after heating recovery,the total recovery strain increases as the volume fraction *** study introduces a new strategy to enhance the superelastic properties and expand the applications of CuAlMn Smas in soft robotics,medical equipment,aerospace and other fields.

关键词： Shape memory alloys Superelasticity Gyroid triply periodic minimal surface(TPMS)lattice structure Selective laser melting(SLM)

Photoinduced superlubricity on Tio_(2) surfaces

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Friction 2024年第3期12卷 428-438页

作者： Ke HAN Liran ma Yu TIAN Jianbin LUo State Key Laboratory of Tribology in Advanced Equipment Tsinghua UniversityBeijing 100084China Received:16 September 2022/Revised:28 October 2022/Accepted:27 December 2022The author(s)2022.

Superlubricity control is of great interest in both industry and scientific research,and several methods have been proposed to achieve this *** this work,ultraviolet(UV)light was introduced into titanium dioxide(Tio_(2))and silicon nitride(Si_(3)N_(4))tribosystems to accomplish photoinduced *** friction coefficients(CoFs)between Si_(3)N_(4) balls and Tio_(2) plates in the mixtures of sulfuric acid(H^(2)So_(4))solution and glycerol solution were obviously reduced,and the system entered the superlubricity region(CoFon at a speed of 56 mm/***,the CoF was much larger without UV treatment than that with UV *** formation of silica(Sio_(2))layers on the surfaces of Si_(3)N_(4) balls and the elastohydrodynamic effects were determined to be fundamental to the low friction in this experiment,and the enhancement of the combination between the Tio_(2) surface and the hydroxy group of glycerol by UV illumination was the key to the photoinduced superlubricity in this *** findings showed one method for achieving superlubricity by introducing a light field that could be further applied to special working conditions.

关键词： light control friction superlubricity glycerol titanium dioxide(Tio_(2))

Vision-Based Adaptive Prescribed-Time Control of UAV for Uncooperative Target Tracking with Performance Constraint

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Journal of Systems Science & Complexity 2024年第5期37卷 1956-1977页

作者： SHE Xuehua ma Hui REN Hongru LI Hongyi School of Automation and the Guangdong Provincial Key Laboratory of Intelligent Decision and Cooperative Control Guangdong University of TechnologyGuangzhou 510006China School of mathematics and Statistics Guangdong University of TechnologyGuangzhou 510006China College of Electronic and Information Engineering and Chongqing Key Laboratory of Generic Technology and System of Service Robots Southwest UniversityChongqing 400715China

This paper discusses the uncooperative target tracking control problem for the unmanned aerial vehicle(UAV)under the performance constraint and scaled relative velocity constraint,in which the states of the uncooperative target can only be estimated through a vision *** the limited detection range,a prescribed performance function is designed to ensure the transient and steady-state performances of the tracking ***,the scaled relative velocity constraint in the dynamic phase is taken into account,and a time-varying nonlinear transformation is used to solve the constraint problem,which not only overcomes the feasibility condition but also fails to violate the constraint ***,the practically prescribed-time stability technique is incorporated into the controller design procedure to guarantee that all signals within the closed-loop system are *** is proved that the UAV can follow the uncooperative target at the desired relative position within a prescribed time,thereby improving the applicability of the vision-based tracking *** results have been presented to prove the validity of the proposed control strategy.

关键词： Nonlinear transformation performance constraint prescribed-time tracking uncooperative target vision-based measurement

Effects of mixed aerosol on the path loss of NLoS UV communication system

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optoelectronics Letters 2024年第9期20卷 549-559页

作者： ma Yuzhao ZHoU Jingyi Tianjin Key Laboratory for Advanced Signal Processing Civil Aviation University of ChinaTianjin 300300China College of Electronic Information and Automation Civil Aviation University of ChinaTianjin 300300China

Performance of non-line-of-sight(NLoS)ultraviolet(UV)communication is closely related with the communication range,system geometry and the atmosphere aerosol *** this paper,we investigate the path loss of the NLoS UV ... 详细信息

关键词： communication properties. NLoS

Key points and visible part fusion attention network for occluded pedestrian detection in traffic environments

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optoelectronics Letters 2024年第7期20卷 430-436页

作者： LIU Peiyu ma Yixuan School of Software Engineering Beijing Jiaotong UniversityBeijing 100044China

Aiming at the problem of low detection accuracy of occluded pedestrian in traffic environments,this paper proposes a key points and visible part fusion network for occluded pedestrian *** proposed algorithm constructs two attention modules by introducing human key points and the bounding box of visible parts respectively,which suppresses the occluded parts in the channel features and spatial features of pedestrian features *** results on CityPersons and Caltech datasets demonstrate the effectiveness of the proposed *** missing rate(MR)is reduced to 40.78 on the Heavy subset of the CityPersons dataset and surpasses many outstanding methods.

关键词： methods. network visible

Integration of earth-abundant cocatalysts for high-performance photoelectrochemical energy conversion

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Journal of Energy Chemistry 2024年第1期88卷 336-355,I0008页

作者： Joonhee ma Sang Hyun Ahn Soo Young Kim Department of materials Science and Engineering Korea UniversitySeoul 02841Republic of Korea School of Chemical Engineering and materials Science Chung-Ang University84 Heukseok-roDongjak-guSeoul 06974Republic of Korea

Photoelectrochemical(PEC)energy conversion has emerged as a promising and efficient approach to sustainable energy harvesting and *** utilizing semiconductor photoelectrodes,PEC devices can harness solar energy and drive electrochemical reactions such as water splitting or carbon dioxide(Co_(2))reduction to generate clean fuels and value-added ***,PEC energy conversion faces several challenges such as high overpotential,sluggish reaction kinetics,charge carrier recombination,and stability issues,which limit its practical ***,significant research has been conducted to improve the overall conversion efficiency of PEC *** particularly promising approach is the use of cocatalysts,which involves introducing specific cocatalysts onto the photoelectrode surface to promote charge separation,improve reaction kinetics,and reduce the overpotential,thereby enhancing the overall performance of PEC energy *** review provides a comprehensive overview of the recent developments in the earth-abundant cocatalysts for PEC water splitting and Co_(2) *** main earth-abundant catalysts for the PEC water splitting include transition-metal dichalcogenide(TMD)-based materials,metal phosphides/carbides,and metal oxides/***,PEC-Co_(2)RR was divided into C_(1) and C_(2+)based on the final product since various products could be produced,focusing on diverse earth-abundant materials-based *** addition,we provide and highlight key advancements achieved in the very recent reports on novel PEC system design engineering with ***,the current problems associated with PEC systems are discussed along with a suggested direction to overcome these obstacles.

关键词： Solar energy Photo-electrochemical Water splitting Co_(2)reduction Cocatalysts

Analysis of piezoelectric semiconductor fibers under gradient temperature changes

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Applied mathematics and Mechanics(English Edition) 2024年第2期45卷 311-320页

作者： Shuangpeng LI Ruoran CHENG Nannan ma Chunli ZHANG Department of Engineering Mechanics Zhejiang UniversityHangzhou 310027China

Piezoelectric semiconductors(PSs)possess both semiconducting properties and piezoelectric coupling effects,making them optimal building blocks for semiconductor *** fiber-like structures have wide applications in multi-functional semiconductor *** this paper,a one-dimensional(1D)theoretical model is established to describe the piezotronic responses of a PS fiber under gradient temperature *** theoretical model aims to explain the mechanism behind the resistance change caused by such gradient temperature *** results demonstrate that a gradient temperature change significantly affects the physical fields within the PS fiber,and can induce changes in its surface *** provides important theoretical guidance on the development of piezotronic devices that are sensitive to temperature effects.

关键词： piezoelectric semiconductor(PS)fiber one-dimensional(1D)model piezotronic effect gradient temperature change

Memristive oscillator to memristive map,energy characteristic

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Science China(Technological Sciences) 2024年第5期67卷 1567-1578页

作者： GUo YiTong ma Jun ZHANG XiaoFeng HU XiKui College of Electrical and Information Engineering Lanzhou University of TechnologyLanzhou730050China Department of Physics Lanzhou University of TechnologyLanzhou730050China School of Science Chongqing University of Posts and TelecommunicationsChongqing400065China

Most of nonlinear oscillators composed of capacitive and inductive variables can obtain the Hamilton energy by using the Helmholtz theorem when the models are rewritten in equivalent vector *** energy functions for biophysical neurons can be obtained by applying scale transformation on the physical field energy in their equivalent neural *** dynamical systems often have exact energy functions,while some mathematical models just suggest generic Lyapunov functions,and the energy function is effective to predict mode *** this paper,a memristive oscillator is approached by two kinds of memristor-based nonlinear circuits,and the energy functions are defined to predict the dependence of oscillatory modes on energy *** absence of capacitive variable for capacitor,the physical time t and charge q are converted into dimensionless variables by using combination of resistance and inductance(L,R),e.g.,τ=t×R/*** energy function for each memristive map is proposed by applying the similar weights as energy function for the memristive *** example,energy function for the map is obtained by replacing the variables and parameters of the memristive oscillator with corresponding variables and parameters for the memristive *** memristive map prefers to keep lower average energy than the memristive oscillator,and chaos is generated in a discrete system with two *** scheme is helpful for energy definition in maps,and it provides possible guidance for verifying the reliability of maps by considering the energy characteristic.

关键词： Hamilton energy memristor Helmholtz theorem scale transformation memristive circuit