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Multilayer CVD graphene electrodes using a transfer-free process for the next generation of optically transparent and MRI-compatible neural interfaces

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Microsystems & Nanoengineering 2022年第5期8卷 183-196页

作者： Nasim Bakhshaee Babaroud merlin palmar Andrada Iulia Velea Chiara Coletti Sebastian Weingärtner Frans Vos Wouter A.Serdijn Sten Vollebregt Vasiliki Giagka Department of Microelectronics Faculty of Electrical EngineeringMathematics and Computer ScienceDelft University of TechnologyMekelweg 4Delft 2628 CDThe Netherlands Technologies for Bioelectronics Group Department of System Integration and Interconnection TechnologiesFraunhofer Institute for Reliability and Micro-integration IZMGustav-Meyer-Allee 25Berlin 13355Germany Department of Imaging Physics Faculty of Applied ScienceDelft University of TechnologyLorentzweg 1Delft 2628 CJThe Netherlands Erasmus University Medical Center(Erasmus MC) dr.Molewaterplein 40Rotterdam 3015 GDThe Netherlands

Multimodal platforms combining electrical neural recording and stimulation,optogenetics,optical imaging,and magnetic resonance(MRI)imaging are emerging as a promising platform to enhance the depth of characterization in neuroscientific *** conductive,optically transparent,and MRI-compatible electrodes can optimally combine all *** as a suitable electrode candidate material can be grown via chemical vapor deposition(CVD)processes and sandwiched between transparent biocompatible ***,due to the high graphene growth temperature(≥900℃)and the presence of polymers,fabrication is commonly based on a manual transfer process of pre-grown graphene sheets,which causes reliability *** this paper,we present CVD-based multilayer graphene electrodes fabricated using a wafer-scale transfer-free process for use in optically transparent and MRI-compatible neural *** fabricated electrodes feature very low impedances which are comparable to those of noble metal electrodes of the same size and *** also exhibit the highest charge storage capacity(CSC)reported to date among all previously fabricated CVD graphene *** graphene electrodes did not reveal any photo-induced artifact during 10-Hz light pulse ***,we show here,for the first time,that CVD graphene electrodes do not cause any image artifact in a 3T MRI *** results demonstrate that multilayer graphene electrodes are excellent candidates for the next generation of neural interfaces and can substitute the standard conventional metal *** fabricated graphene electrodes enable multimodal neural recording,electrical and optogenetic stimulation,while allowing for optical imaging,as well as,artifact-free MRI studies.

关键词： transparent transfer process

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