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Polymer interdigitated pillar electrostatic(PIPE)actuators

Microsystems & Nanoengineering 2022年第1期8卷 185-192页

作者： Di Ni Ronald Heisser Benyamin Davaji landon ivy Robert Shepherd Amit Lal School of Electrical and Computer Engineering Cornell UniversityIthacaNY 14853USA Sibley School of Mechanical and Aerospace Engineering Cornell UniversityIthacaNY 14853USA

This work reports a three-dimensional polymer interdigitated pillar electrostatic actuator that can produce force densities 5-10×higher than those of biological *** theory of operation,scaling,and stability is investigated using analytical and FEM *** actuator consists of two high-density arrays of interdigitated pillars that work against a restoring force generated by an integrated flexure *** actuator architecture enables linear actuation with higher displacements and pull-in free actuation to prevent the in-use stiction associated with other electrostatic *** pillars and springs are 3D printed together in the same *** pillars are coated with a gold-palladium alloy layer to form conductive *** space between the pillars is filled with liquid dielectrics for higher breakdown voltages and larger electrostatic forces due to the increase in the dielectric *** demonstrated a prototype actuator that produced a maximum work density of 54.6μJ/cc and an electrical-tomechanical energy coupling factor of 32%when actuated at 4000 *** device was operated for more than 100,000 cycles with no degradation in *** flexible polymer body was robust,allowing the actuator to operate even after high mechanical force impact,which was demonstrated by operation after drop *** it is scaled further,the reported actuator will enable soft and flexible muscle-like actuators that can be stacked in series and parallel to scale the resulting *** work paves the way for high-energy density actuators for microrobotic applications.

关键词： alloy electrostatic enable

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