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In-channel integration of designable microoptical devices using flat scaffold-supported femtosecond-laser microfabrication for coupling-free optofluidic cell counting

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Light(Science & Applications) 2015年第1期4卷 569-576页

作者： Dong Wu Jian Xu Li-Gang Niu Si-Zhu Wu katsumi midorikawa Koji Sugioka Laser Technology Laboratory RIKENSaitama 351-0198Japan State Key Laboratory on Integrated Optoelectronics College of Electronic Science and EngineeringJilin UniversityChangchun 130012China

The high-precision integration of three-dimensional(3D)microoptical components into microfluidics in a customizable manner is crucial for optical sensing,fluorescence analysis,and cell detection in optofluidic applications;however,it remains challenging for current microfabrication *** paper reports the in-channel integration of flexible two-dimensional(2D)and 3D polymer microoptical devices into glass microfluidics by developing a novel technique:flat scaffold-supported hybrid femtosecond laser microfabrication(FSS-HFLM).The scaffold with an optimal thickness of 1–5 μm is fabricated on the lower internal surface of a microfluidic channel to improve the integration of high-precision microoptical devices on the scaffold by eliminating any undulated internal channel surface caused by wet *** a proof of demonstration,two types of typical microoptical devices,namely,2D Fresnel zone plates(FZPs)and 3D refractive microlens arrays(MLAs),are *** devices exhibit multicolor focal spots,elongated(>three times)focal length and imaging of the characters‘RIKEN’in a liquid *** resulting optofluidic chips are further used for coupling-free white-light cell counting with a success rate as high as 93%.An optofluidic system with two MLAs and a W-filter is also designed and fabricated for more advanced cell filtering/counting applications.

关键词： cell counting 3D optofluidic chips hybrid femtosecond laser microfabrication microlens arrays two-photon polymerization

Opening a new route to multiport coherent XUV sources via intracavity high-order harmonic generation

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Light(Science & Applications) 2020年第1期9卷 398-406页

作者： Natsuki Kanda Tomohiro Imahoko Koji Yoshida Akihiro Tanabashi AAmani Eilanlou Yasuo Nabekawa Tetsumi Sumiyoshi Makoto Kuwata-Gonokami katsumi midorikawa RIKEN Center for Advanced Photonics RIKENWakoSaitama 351-0198Japan Photon Science Center The University of TokyoTokyo 113-8656Japan Intstitute for Solid State Physics The University of TokyoKashiwaChiba 277-8581Japan Cyber Laser Inc. WakoSaitama 351-0104Japan Institute for Photon Science and Technology The University of TokyoTokyo 113-0033Japan Department of Physics The University of TokyoTokyo 113-0033Japan

High-order harmonic generation(HHG)is currently utilized for developing compact table-top radiation sources to provide highly coherent extreme ultraviolet(XUV)and soft X-ray pulses;however,the low repetition rate of fundamental lasers,which is typically in the multi-kHz range,restricts the area of application for such HHG-based radiation ***,we demonstrate a novel method for realizing a MHz-repetition-rate coherent XUV light source by utilizing intracavity HHG in a mode-locked oscillator with an Yb:YAG thin disk laser medium and a 100-m-long ring *** have successfully implemented HHG by introducing two different rare gases into two separate foci and picking up each HH *** to the two different HH beams generated from one cavity,this XUV light source will open a new route to performing a time-resolved measurement with an XUV-pump and XUV-probe scheme at a MHzrepetition rate with a femtosecond resolution.

关键词： intracavity coherent repetition

Controllable alignment of elongated microorganisms in 3D microspace using electrofluidic devices manufactured by hybrid femtosecond laser microfabrication

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Microsystems & Nanoengineering 2017年第1期3卷 396-404页

作者： Jian Xu Hiroyuki Kawano Weiwei Liu Yasutaka Hanada Peixiang Lu Atsushi Miyawaki katsumi midorikawa Koji Sugioka RIKEN Center for Advanced Photonics 2-1 HirosawaWakoSaitama 351-0198Japan Laboratory for Cell Function Dynamics RIKEN Brain Science Institute2-1 HirosawaWakoSaitama 351-0198Japan Wuhan National Laboratory for Optoelectronics and School of Physics Huazhong University of Science and TechnologyWuhan 430074China Laboratory of Optical Information and Technology School of ScienceWuhan Institute of TechnologyWuhan 430073China

This paper presents a simple technique to fabricate new electrofluidic devices for the three-dimensional(3D)manipulation of microorganisms by hybrid subtractive and additive femtosecond(fs)laser microfabrication(fs laser-assisted wet etching of glass followed by water-assisted fs laser modification combined with electroless metal plating).The technique enables the formation of patterned metal electrodes in arbitrary regions in closed glass microfluidic channels,which can spatially and temporally control the direction of electric fields in 3D microfluidic *** fabricated electrofluidic devices were applied to nanoaquariums to demonstrate the 3D electro-orientation of Euglena gracilis(an elongated unicellular microorganism)in microfluidics with high controllability and *** particular,swimming Euglena cells can be oriented along the z-direction(perpendicular to the device surface)using electrodes with square outlines formed at the top and bottom of the channel,which is quite useful for observing the motions of cells parallel to their swimming ***,z-directional electric field control ensured efficient observation of manipulated cells on the front side(45 cells were captured in a minute in an imaging area of~160×120μm),resulting in a reduction of the average time required to capture the images of five Euglena cells swimming continuously along the z-direction by a factor of~43 compared with the case of no electric *** addition,the combination of the electrofluidic devices and dynamic imaging enabled observation of the flagella of Euglena cells,revealing that the swimming direction of each Euglena cell under the electric field application was determined by the initial body angle.

关键词： dynamic imaging electrofluidic devices electro-orientation femtosecond laser microfabrication flagellar motions selective metallization 3D electric fields 3D microfluidics

At wavelength coherent scatterometry microscope using high-order harmonics for EUV mask inspection

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International Journal of Extreme Manufacturing 2019年第3期1卷 1-12页

作者： Yutaka Nagata Tetsuo Harada Takeo Watanabe Hiroo Kinoshita katsumi midorikawa RIKEN Center for Advanced Photonics RIKEN2-1 HirosawaWako Saitama 351-0198Japan Center for EUV Lithography Laboratory of Advanced Science and Technology for IndustryUniversity of HyogoKamigoriHyogo 678-1205Japan

In this review,we describe our research on the development of the 13.5 nm coherent microscope using high-order harmonics for the mask inspection of extreme ultraviolet(EUV)*** lithography is a game-changing piece of technology for high-volume manufacturing of commercial *** top manufacturers apply EUV technology for fabricating the most critical layers of 7 nm *** and inspection of defect-free masks,however,still remain critical issues in EUV ***,in our pursuit for a resolution,we have developed the coherent EUV scatterometry microscope(CSM)system with a synchrotron radiation(SR)source to establish the actinic metrology,along with inspection *** intensity and phase images of patterned EUV masks were reconstructed from diffraction patterns using ptychography *** expedite the practical application of the CSM,we have also developed a standalone CSM,based on high-order harmonic generation,as an alternative to the *** the application of a coherent 13.5 nm harmonic enabled the production of a high contrast diffraction pattern,diffraction patterns of sub-100 ns size defects in a 2D periodic pattern mask could be *** of intensity and phase images from diffraction patterns were also performed for a periodic line-and-space structure,an aperiodic angle edge structure,as well as a cross pattern in an EUV mask.

关键词： high-order harmonics coherent EUV light EUV lithography coherent EUV scatterometry microscope synchrotron radiation EUV mask inspection

Selective deposition of conductive copper films on glass surfaces using femtosecond laser surface modification and electroless plating

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Selective deposition of conductive copper films on glass sur...

Integration of3D microoptics and microfluidics in a glass chip using a femtosecond laser for photonic applications

2007亚洲光电子会议材料的激光加工与制造分会场

作者： Koji Sugioka katsumi midorikawa Laser Technology Laboratory RIKENHirosawa 2-1WakoSaitama 351-0198Japan Laser Technology Laboratory RIKENHirosawa 2-1WakoSaitama 351-0198Japan

In this paper, selective deposition of conductive copper films on glass surfaces is demonstrated with the assistance of femtosecond laser surface modification followed by electroless plating. Irradiation of femtosecond laser makes it possible to selectively deposit copper films in the irradiated area on glass surfaces coated with silver nitrate films. The influence of the laser direct writing parameters and the electroless plating process on the formation of copper films is discussed. Meanwhile, the electric properties of copper films are investigated, which confirms that copper films are conductive. A tentative mechanism of the selective deposition process is also proposed. In addition, the potential application of this technique for integrating electrical and thermal functions into microdevices is discussed.

关键词： femtosecond laser modification selective electroless plating conductive copper films

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Integration of3D microoptics and microfluidics in a glass ch...

Photonics Asia 2004;Optics and Lasers

作者： Koji Sugioka katsumi midorikawa Laser Technology Laboratory RIKEN-The Institute of Physical and Chemical Research Hirosawa 2-1 Wako Saitama 351-0198 Japan Laser Technology Laboratory RIKEN-The Institute of Physical and Chemical Research Hirosawa 2-1 Wako Saitama 351-0198 Japan

We describe a 3D microprocessing for directly forming microoptics buried in a glass chip using a femtosecond (fs) laser irradiation followed by postannealing and successive chemical etching. By formin

关键词： femtosecond laser, 3D microfabrication, glass, microoptics, microfluidics, microfluidic laser

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Ultrafast Optics V

Attosecond Optical and Ramsey-Type Interferometry by Postgeneration Splitting of Harmonic Pulse

2006年

作者： Shuntaro Watanabe katsumi midorikawa

来源：畅想之星图书光盘版（南... 评论

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Ultrafast Science 2022年第3期2卷 9-17页

作者： Takuya Matsubara Yasuo Nabekawa Kenichi L.Ishikawa Kaoru Yamanouchi katsumi midorikawa Attosecond Science Research Team RIKEN Center for Advanced Photonics2-1 HirosawaWako-shiSaitama 351-0198Japan Department of Chemistry School of ScienceThe University of Tokyo7-3-1 HongoBunkyo-kuTokyo 113-0033Japan Department of Nuclear Engineering and Management Graduate School of EngineeringThe University of Tokyo7-3-1 HongoBunkyo-kuTokyo 113-8656Japan Photon Science Center Graduate School of EngineeringThe University of Tokyo7-3-1 HongoBunkyo-kuTokyo 113-8656Japan Research Institute for Photon Science and Laser Technology The University of Tokyo7-3-1 HongoBunkyo-kuTokyo 113-0033Japan

Attosecondattosecond science;extreme ultraviolet;high-order harmonic generation;Ramsey-type spectroscopy Optical and Ramsey-Type Interferometry by Postgeneration Splitting of Harmonic PulseTime domain Ramsey-type interferometry is useful for investigating spectroscopic information of quantum states in atoms and *** energy range of the quantum states to be observed with this scheme has now reached more than 20 eV by resolving the interference fringes with a period of a few hundred *** attosecond Ramsey-type interferometry requires the irradiation of a coherent pair of extreme ultraviolet(XUV)light pulses,while all the methods used to deliver the coherent XUV pulse pair until now have relied on the division of the source of an XUV pulse in two before the *** this paper,we report on a novel technique to perform attosecond Ramsey-type interferometry by splitting an XUV high-order harmonic(HH)pulse of a sub-20 fs laser pulse after its *** virtue of the postgeneration splitting of the HH pulse,we demonstrated that the optical interference emerging at the complete temporal overlap of the HH pulse pair seamlessly continued to the Ramsey-type electronic interference in a helium *** technique is applicable for studying the femtosecond dephasing dynamics of electronic wavepackets and exploring the ultrafast evolution of a cationic system entangled with an ionized electron with sub-20 fs resolution.

关键词： attosecond science extreme ultraviolet high-order harmonic generation Ramsey-type spectroscopy Optical and Ramsey-Type Interferometry by Postgeneration Splitting of Harmonic Pulse

3-D microstructuring inside photosensitive glass using femtosecond laser for biological applications

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3-D microstructuring inside photosensitive glass using femto...