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Pattern scaling effect on the radiative properties of wafer's surface

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Science China(Technological Sciences) 2010年第7期53卷 1886-1892页

作者： WANG AiHua & cai jiuju School of Materials and Metallurgy, Northeastern University, Shenyang 110819, China School of Materials and Metallurgy Northeastern University Shenyang China

This paper presents a parametric study of the radiative properties of patterned wafers with a polysilicon gate array on the Si substrate, considering the effect of wavelength and polarization. The finite-difference time-domain (FDTD) method was employed to examine the pattern scaling effect on the spectral absorptance via numerical solutions of the Maxwell's equations. The effective medium theory (EMT) was also used to help explain the absorptance predictions. While the gate sizes are very small compared to wavelength, the results show rather unusual phenomena. The absorptance calculated by EMT is in agreement with FDTD in the cases with small gate and period sizes. With the increase of period and decrease of the ratio of the gate width to the grating period, both EMT and FDTD results for the TM (transverse magnetic) mode approach to pure silicon since the grating effect diminishes. However, the error of EMT results for the TE mode in some cases becomes considerable due to the limitation of EMT, which requires the period to be significantly smaller than the wavelength. Besides, the TE (transverse electric) absorptance curve separates from that of plain Si when the wavelength equals the grating period, this is because the gate can interact with its neighbering region by diffraction and the diffraction effects are weak, when the wavelength is small. The peak absorptance can be attributed to the thin film effect. It shows that a slight increase in the gate height can drastically increase the absorptance and the increased gate height shifts the peak absorptance to longer wavelength due to the increase of optical path length in the effective thin film. This work is of great importance for optimization of advanced annealing techniques in semiconductor manufacturing.

关键词： finite-difference time-domain method effective medium theory radiative property resonance cavity effect patterned wafer

Modeling radiative properties of nanoscale patterned wafers

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Science China(Technological Sciences) 2010年第2期53卷 352-359页

作者： WANG AiHua & cai jiuju School of Materials and Metallurgy, Northeastern University, Shenyang 110004, China School of Materials and Metallurgy Northeastern University Shenyang China

Temperature nonuniformity in rapid thermal processing of wafers is a critical problem facing the semiconductor industry. One cause of the problem is the nonuniform absorption of thermal radiation in patterned wafers where the optical properties vary across the wafer surface. This paper presents a parametric study of the radiative properties of patterned wafers, considering the effect of temperature, wavelength, and polarization. The finite-difference time-domain (FDTD) method is employed to examine the effect of various trench sizes on the radiative properties via numerically solving the Maxwell equations. The effective medium theory (EMT) is also used to help explain the absorptance prediction. The results show that in the cases with trench size variation, the resonance cavity effect may increase the absorptance as the trench width increases. And in the cases with trench size increasing at several different filling ratios, the absorptance does not change much at small filling ratio. The effects of the resonant cavity, diffraction, wave interferences on the spectral-directional absorptance were also discussed. This work is of great importance for optimization of advanced annealing techniques in semiconductor manufacturing.

关键词： finite-difference time-domain method effective medium theory radiative property periodic nanostructure

Theoretical Derivation of Thermal Value Equations for Heating Furnaces

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Open Journal of Applied Sciences 2012年第2期2卷 104-109页

作者： Hainan Wu Wenqiang Sun jiuju cai Institute of Thermal and Environmental Engineering Northeastern University Shenyang China

Based on thermal value theory, the aim of this paper is to deduce the theoretical formulas for evaluating the energy effective utilization degree in technological pyrological processes exemplified by metallurgical heating furnaces. Heat transfer models for continuous heating furnaces, batch-type heating furnaces, and regenerative heating furnaces are established, respectively. By analyzing the movement path of injected infinitesimal heat attached on steel or gas, thermal value equations of continuous, batch-type, and regenerative heating furnaces are derived. Then the influences of such factors as hot charging, gas preheating and intake time of heat on energy effective utilization degree are discussed by thermal value equations. The results show that thermal value rises with hot charging and air preheating for continuous heating furnaces, with shorter intake time when heat is attached on steel or longer intake time when heat is attached on gas for batch-type heating furnaces and that with more heat supply at early heating stage or less at late stage for regenerative heating furnaces.

关键词： Thermal Value Continuous Heating Furnace Batch-Type Heating Furnace Regenerative Heating Furnace Energy Utilization Degree Heat Transfer

热泵供热模式与热电联产供热模式碳排放的对比研究

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太阳能学报 2012年第11期33卷 1914-1919页

作者：刘飞蔡九菊东北大学材料与冶金学院沈阳110819

采用单位能源产品碳排放量指标结合火用分析来评价不同供热模式的碳排放状况,将单位能源产品碳排放视为由最小排放量和附加排放量两部分组成来区别对待,对地下水源热泵和热电联产两种不同供热模式碳排放量以及碳排放特性进行对比研究。... 详细信息

采用单位能源产品碳排放量指标结合火用分析来评价不同供热模式的碳排放状况,将单位能源产品碳排放视为由最小排放量和附加排放量两部分组成来区别对待,对地下水源热泵和热电联产两种不同供热模式碳排放量以及碳排放特性进行对比研究。研究表明:水源热泵供热模式的碳排放量与热电联产供热模式的排放量相同,在热能转换环节水源热泵供热模式具有更低的碳排放量,影响热泵供热碳排放总量的主要因素为电能转换环节的能效。

关键词：水源热泵热电联产碳排放炯分析

Influence of Steam Recovery and Consumption on Energy Consumption per Ton of Steel

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Influence of Steam Recovery and Consumption on Energy Consum...

Study on Removal of SO2 Using Pyrolusite and Mild Manganese in Sintering Process

2011 2nd International Conference on Advances in Energy Engineering(ICAEE)

作者： Guangyu Ma jiuju cai Lihong Zhang Wenqiang Sun Institute of Thermal and Environmental Engineering Northeastern University Technology Center of Ansteel Co. Ltd. Environmental Protection Science Research Institute of the Guangxi Zhuang Autonomous Region

Steam recovery and consumption contributes greatly to energy consumption per ton of *** is studied in this paper that the relationship between energy consumption per ton of steel and steam recovery ＆ consumption,including main processes,auxiliary processes,diffusion and other users,*** the factors attributing to energy consumption per ton of steel is *** expressions of steam consumption per ton of steel and energy consumption per steam supply are proposed in this paper.

关键词： energy consumption per ton of steel steam recovery steam consumption energy consumption per steam supply

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Study on Removal of SO2 Using Pyrolusite and Mild Manganese ...

钢铁企业富余煤气-蒸汽-电力耦合模型及其应用

2008年全国冶金物理化学学术会议

作者： Wu Fuzhong~* cai jiuju (Key Laboratory on Eco-Industry,Northeastern University,Shenyang 110004,China)

The BF-converter process of modem iron and steel co-corporation is a chemical process of iron and coal. Sulfur dioxide is released in sintering process which can be absorbed by Pyrolusite and Mild manganese to produce manganese sulfate. The experiments of removal of SO are held in the conditions that using mild manganese, the pH scale of pulp is controlled;of pyrolusite, the oxidability of MnO and reducibility of SO are utilized;and the pyrolusite pulp is put into the absorption tower of padding. The above-90% absorptivity of flue dust indicates that wet dust collection is available to this technique, in which the absorptivity of SO is above 95%, and the byproduct manganese sulfate is produced to technical grade. The technique is proved to be a new technology on the: removal of SO, which really changes wastes into valuables and conforms to comprehensive treatment.

关键词： sitering gas pyrolusite mild manganese mine removal of SO2 manganese sulfate

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化工学报 2011年第3期62卷 753-758页

作者：张琦提威杜涛蔡九菊东北大学国家环境保护生态工业重点实验室辽宁沈阳110819

针对钢铁企业富余煤气产生、储存、缓冲和使用的周期性变化,以及各周期内蒸汽、电力的供应与需求特点,采用数学规划方法,建立以能源消耗最少、效益最优为目标函数的富余煤气、蒸汽和电力多周期耦合数学模型。模型综合考虑了煤气、蒸汽... 详细信息

针对钢铁企业富余煤气产生、储存、缓冲和使用的周期性变化,以及各周期内蒸汽、电力的供应与需求特点,采用数学规划方法,建立以能源消耗最少、效益最优为目标函数的富余煤气、蒸汽和电力多周期耦合数学模型。模型综合考虑了煤气、蒸汽和电力等能源介质的供需变化以及生产成本、安全等约束,通过ILOG Cplex求解出模型的最优解,获得煤气、蒸汽和电力的最优分配方案,用以指导实际生产。应用表明:模型能使钢铁企业富余煤气、蒸汽和电力等能源介质得到合理、安全和高效的分配,提高了能源使用效率,降低了生产费用。

关键词：钢铁企业能源介质多周期优化分配节能

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基于DEM的方筒仓内烧结散料流动特性研究

烧结球团 2019年第5期44卷 12-17页

作者：付俊鹏蔡九菊东北大学冶金学院辽宁沈阳110819 东北大学国家环境保护生态工业重点实验室辽宁沈阳110819

借助离散元方法(DEM)对方筒仓内烧结散料流动特性开展研究。建立三维方筒仓烧结散料床模型,着重研究仓体结构参数对散体流动特性的影响,包括筒仓直径、填充高度、出口直径和料斗顶半角以及它们对散体流动速度、孔隙率和堆密度在仓体内... 详细信息

借助离散元方法(DEM)对方筒仓内烧结散料流动特性开展研究。建立三维方筒仓烧结散料床模型,着重研究仓体结构参数对散体流动特性的影响,包括筒仓直径、填充高度、出口直径和料斗顶半角以及它们对散体流动速度、孔隙率和堆密度在仓体内轴向及径向的分布特征,并以烧结散料在仓体内的微动力参数来表征物料流动的特性规律。研究结果表明:排料斗直径对烧结散料流动速度的影响最大,料层填充高度对其影响最小;料斗顶半角对烧结散料流动形态影响最大,使散料流动状态由中心流向质量流转换。同时,随着仓体直径的逐渐增大,烧结散料层内由流动模式变化引起的分布不均匀现象可得到改善。

关键词：烧结散料流动特性筒仓离散元方法结构参数

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烧结矿散料床空隙率的DEM仿真研究

烧结球团 2019年第6期44卷 7-11页

作者：付俊鹏蔡九菊东北大学冶金学院辽宁沈阳110819 东北大学国家环境保护生态工业重点实验室辽宁沈阳110819

为了研究烧结矿散料床空隙率的空间分布特征,采用离散元分析方法(DEM)建立竖式烧结流动模型,分析烧结矿流动过程中的料层流动形态、床层几何因子对料层高度方向和径向空隙率分布的影响。结果表明:在料层高度方向上,散料床空隙率根据流... 详细信息

为了研究烧结矿散料床空隙率的空间分布特征,采用离散元分析方法(DEM)建立竖式烧结流动模型,分析烧结矿流动过程中的料层流动形态、床层几何因子对料层高度方向和径向空隙率分布的影响。结果表明:在料层高度方向上,散料床空隙率根据流动特性的变化显著呈现3种分布形态;随料层高度和床层几何因子的增加,空隙率逐渐减小;空隙率沿径向在近壁面处获得最大值,随位置远离壁面,空隙率分布波动减弱数值逐渐减小。同时研究了颗粒形态对空隙率径向分布特征的影响,发现非球形颗粒的料层空隙率沿径向的分布更接近经验公式的预测值。

关键词：烧结散料床空隙率径向分布床层几何因子离散元分析方法