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Precise Control of Highly Ordered Arrays of Nested Semiconductor/Metal Nanotubes

Nano Research 2011年第2期4卷 164-170页

作者： Diefeng Gu helmut baumgart Kandabara Tapily Pragya Shrestha Gon Namkoong Xianyu Ao Frank Müller Department of Electrical Engineering Old Dominion University Norfolk Virginia 23529 USA The Applied Research Center Newport News Virginia 23606 USA Max Planck Institute of Microstructure Physics Halle Germany

Lithographically defined microporous templates in conjunction with the atomic layer deposition （ALD） technique enable remarkable control of complex novel nested nanotube structures. So far three-dimensional control of physical process parameters has not been fully realized with high precision resolution, and requires optimization in order to achieve a wider range of potential applications. Furthermore, the combination of composite insulating oxide layers alternating with semiconducting layers and metals can provide various types of novel applications and eventually provide unique and advanced levels of multifunctional nanoscale devices. Semiconducting TiO2 nanotubes have potential applications in photovoltaic devices. The combination of nanostructured semiconducting materials with nested metal nanotubes has the potential to produce novel multi functional vertically-ordered three-dimensional nanodevices. Platinum growth by ALD has been explored, covering the initial stages of the thin film nucleation process and the synthesis of high aspect ratio nanotube structures. The penetration depth of the Pt into porous templates having various pore sizes and aspect ratios has been investigated. Several multi-walled nested TiO2-Pt nanotubes in series have been successfully fabricated using microporous Si templates. These innovative nested nanostructures have the potential to produce novel multifunctional vertically-ordered three-dimensional nanodevices in photovoltaic and sensing technologies.

关键词： Atomic layer deposition (ALD) platinum nanotubes semiconductor/metal nanotubes microporous Si templates nanoporous alumina templates multilayer nested nanotubes

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