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A new DRIE cut-off material in SOG MEMS process

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Journal of Semiconductors 2023年第4期44卷 98-102页

作者： Chaowei Si Yingchun Fu Guowei han Yongmei Zhao jin Ning Zhenyu Wei Fuhua yang Institute of Semiconductors Chinese Academy of SciencesBeijing 100083China Beijing Smart-chip Microelectronics Technology Co. LtdBeijing 100083China Zhongguancun Xinhaizeyou Technology Co. LtdBeijing 100049China Center of Materials Science and Optoelectronics Engineering University of Chinese Academy of SciencesBeijing 100049China

The silicon on glasses process is a common preparation method of micro-electro-mechanical system inertial devices,which can realize the processing of thick silicon *** paper proposes that indium tin oxides(ITO)film can serve as a deep silicon etching cut-off layer because ITO is less damaged under the attack of fluoride *** has good electrical conductivity and can absorb fluoride ions for silicon etching and reduce the reflection of fluoride ions,thus reducing the foot *** removal and release of ITO use an acidic solution,which does not damage the silicon ***,the selection of the sacrificial layer has an excellent effect in maintaining the shape of the MEMS *** method is used in the preparation of MEMS accelerometers with a structure thickness of 100μm and a feature size of 4μ*** over-etching of the bottom of the silicon structure caused by the foot effect is *** difference between the simulated value and the designed value of the device characteristic frequency is less than 5%.This indicates that ITO is an excellent deep silicon etch stopper material.

关键词： SOG process DRIE cut-off layer ITO film foot effect

Voltage-induced material removal mechanism of copper for electrochemical-mechanical polishing applications

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中国有色金属学会会刊：英文版 2009年第B09期19卷 262-265页

作者： Sang-Jun han Yong-jin SEO Nano-Information Material ＆ Device Laboratory Daebul University Chonnam 526-702 Korea School of Fusion Technology Daebul University Chonnam 526-702 Korea

The current-voltage (I-V) curves, such as linear sweep voltammetry (LSV) and cyclic voltammetry (CV), were employed to evaluate the effect of electrolyte concentration on the electrochemical reaction trend. From the I-V curve, the electrochemical states of active, passive, transient and trans-passive region could be characterized. And then, the mechanism of the process of voltage-induced material removal in electrochemical mechanical polishing (ECMP) of copper was investigated. Scanning electron microscopy (SEM) and energy dispersive spectroscopy (EDS) analyses were used to observe the surface profile. Finally, the oxidation and reduction processes of the Cu surface were monitored by the repetition of anodic and cathodic potential from cyclic voltammetry (CV) method in acid-and alkali-based electrolyte.

关键词：电化学机械抛光材料去除机理铜电极电压诱导线性扫描伏安法扫描电子显微镜循环伏安法

The Extraction,Isolation and Identification of Exudates from the Roots of Flaveria bidentis

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Journal of Integrative Agriculture 2014年第1期13卷 105-114页

作者： yang Xing ZhanG Li-hui SHI Cui-ping ShanG Yan ZhanG jin-lin han Jian-min DONG jin-gao Molecular Plant Pathology Laboratory College of Life ScienceAgricultural University of Hebei

Large amounts ofFlaveria bidentis＇s root culturing solution were obtained by using DFT （deep flow technique） equipment and these solution which was vacuum concentrated （10, 20 mg mL-~） can have a certain inhibition on Triticum aestivum, Cucumis sativus, Raphanus sativus, Amaranthus retroflexus, Setaria viridis, Chenopodium album, Echinochloa crusgalli and Chloris virgata. This outcome suggested some active compounds in the root exudates ofFIaveria bidentis can inhibit the germination, seedling elongation and root length. The dichloromethane extract of root exudates was identificated by GC-MS, and 29 kinds of compounds, including esters, hydrocarbons, ketones, thiazole, amines, etc. were obtained and the phthalate n-octyl ester, phthalate 2-ethylhexyl ester were proved to be allelochemicals. The culturing solution of root exudates was separated through the resin column and silica gel column and a component inhibiting seedling height, root length and fresh weight of wheat was got. There were 6 kinds of organic compounds in this component including dioctyl phthalate, 1,2-phthalate, mono（2-ethylhexyl） ester by GC-MS.

关键词： extraction isolation identification exudates Flaveria bidentis

Preface to the special issue on low carbon and environmental protection

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Journal of Central South University 2022年第7期29卷 2099-2100页

作者： jin Dong-han CIMAC Tianjin University CSICE CAE

With growing economic and social development, carbon emissions caused by energy consumption surge, leading to an exacerbated greenhouse effect, rising average temperatures,melting glaciers, and an unstable global clim... 详细信息

关键词： greenhouse carbon unstable

3D interlocked all-textile structured triboelectric pressure sensor for accurately measuring epidermal pulse waves in amphibious environments

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Nano Research 2024年第3期17卷 1923-1932页

作者： Shaobo Si Chenchen Sun Yufen Wu jingjing Li han Wang Yinggang Lin jin yang Zhong Lin Wang Department of Optoelectronic Engineering Key Laboratory of Optoelectronic Technology and Systems Ministry of EducationChongqing UniversityChongqing 400044China College of Physics and Electronic Engineering Chongqing Normal UniversityChongqing 401331China Beijing Institute of Nanoenergy and Nanosystems Chinese Academy of SciencesBeijing 100083China School of Materials Science and Engineering Georgia Institute of TechnologyAtlantaGA 30332USA

The performance degradation and even damage of the e-textiles caused by sweat,water,or submersion during all-weather health monitoring are the main reasons that e-textiles have not been commercialized and routinized so ***,we developed an amphibious,high-performance,air-permeable,and comfortable all-textile triboelectric sensor for continuous and precise measurement of epidermal pulse waves during full-day *** on the principle of preparing gas by acid-base neutralization reaction,a one-piece preparation process of amphibious conductive yarn(ACY)with densely porous structures is *** innovative three-dimensional(3D)interlocking fabric knitted from ACYs(0.6 mm in diameter)and polytetrafluoroethylene yarns exhibit high sensitivity(0.433 V·kPa^(-1)),wide bandwidth(up to 10 Hz),and stability(>30,000 cycles).With these benefits,98.8%agreement was achieved between wrist pulse waves acquired by the sensor and a high-precision laser ***,the polytetrafluoroethylene yarn with good compression resilience provides sufficient mechanical support for the contact separation of the ***,the unique skeletonized design of the 3D interlocking structure can effectively relieve the water pressure on the sensor surface to obtain stable and accurate pulse waves(underwater depth of 5 cm).This achievement represents an important step in improving the practicality of e-textiles and early diagnosis of cardiovascular diseases.

关键词： triboelectric pressure sensor amphibious fabric interlocking fabric pulse wave measurement one-piece preparation method

Influences of ^7Li enrichment on Th-U fuel breeding for an Improved Molten Salt Fast Reactor(IMSFR)

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Nuclear Science and Techniques 2017年第7期28卷 105-113页

作者： Guang-Chao Li yang Zou Cheng-Gang Yu Jian-Long han jin-Gen Chen Hong-Jie Xu Shanghai Institute of Applied Physics Chinese Academy of Sciences Shanghai 201800 China CAS Innovative Academies in TMSR Energy System Shanghai 201800 China University of Chinese Academy of Sciences Beijing 100049China

The molten salt fast reactor(MSFR) shows great promise with high breeding ratio(BR),large negative temperature coefficient of reactivity,high thermal-electric conversion efficiency,inherent safety,and online *** on an improved MSFR optimized by adding axial fertile salt and a graphite reflector,the influences of ~7Li enrichment on Th-U breeding are investigated,aiming to provide a feasible selection for the molten salt with high fissile breeding and a relatively low technology requirement for ~7Li *** the self-developed molten salt reactor reprocessing sequence based on SCALE6.1,the burn-up calculations with online reprocessing are carried *** are explored including BR,^(233)U production,double time(DT),spectrum,~6Li inventory,neutron absorption,and the tritium *** results show that the Li enrichment of 99.95% is appropriate in the fast fission *** this case,BR above 1.10 can be achieved for a long time,corresponding to the ^(233)U production of130 kg per year and DT of 36 *** 80 years' operation,the tritium production for 99.5% is only about 7kg,and there is no obvious increase compared to that for 99.9995%.

关键词：繁殖率熔盐富集铀燃料裂变反应堆快堆在线处理负温度系数

Magnetometer-only linear attitude estimation for bias momentum pico-satellite

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Journal of Zhejiang University-Science A(Applied Physics & Engineering) 2010年第6期11卷 455-464页

作者： Ke han Hao WANG Zhong-he jin Department of Information Science and Electronic Engineering Zhejiang University Hangzhou 310027 China

Satellite attitude information is essential for pico-satellite applications requiring light-weight,low-power,and fast-computation *** objective of this study is to provide a magnetometer-only attitude estimation method for a low-altitude Earth orbit,bias momentum *** on two assumptions,the spacecraft spherical symmetry and damping of body rates,a linear kinematics model of a bias momentum satellite's pitch axis is derived,and the linear estimation algorithm is *** algorithm combines the linear Kalman filter(KF) with the classic three-axis attitude determination method(TRIAD).KF is used to estimate satellite's pitch axis orientation,while TRIAD is used to obtain information concerning the satellite's three-axis *** tests confirmed that the algorithm is suited to the time-varying model errors resulting from both *** estimate result keeps tracking satellite attitude motion during all damping,stable,and free rotating control *** with nonlinear algorithms,such as extended Kalman filer(EKF) and square root unscented Kalman filer(SRUKF),the algorithm presented here has an almost equal performance in terms of convergence time and estimation accuracy,while the consumption of computing resources is much lower.

关键词： Pico-satellite Attitude estimation Bias momentum Magnetometer Kalman filter(KF)

Endobiliary brush cytology during percutaneous transhepatic cholangiodrainage in patients with obstructive jaundice

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Hepatobiliary & Pancreatic Diseases International 2005年第1期4卷 98-103页

作者： Gu-Sheng Xing jin-Chao Geng Xin-Wei han jin-han Dai Chao-yang Wu Department of Radiology First Hospital of Tsinghua University Beijing 100016 China. xgs1259@***

BACKGROUND: Nonsurgical pathologic diagnosis of malignant bile duct stricture with a high sensitivity and specificity is desirable for therapeutic scheme. Percutaneous transhepatic endobiliary brush cytology in detecting obstructive jaundice is evaluated.METHODS: Fifty-eight consecutive patients with obstructive jaundice underwent percutaneous transhepatic cholangiodrainage (PTCD). During the process, a brush was inserted into the bile duct through the preexisted percutaneous transhepatic 8-F sheath, then exfoliated cells were collected from the bile duct stenosis and sent for cytologic diagnosis. The suspicious results were considered of negative diagnosis. All patients had relevant clinical data and follow-up results (15 months to 3 years). Statistical analysis was performed with the chi-square test and Fisher's exact test of probabilities, and a P valuehan that in those with non-cholangiocarcinoma (P0.05).CONCLUSION: The results of this study indicate that cytological brushing of biliary stricture during PTCD is a useful method to establish a diagnosis of malignant biliary stenosis with a high sensitivity, but the negative predictive value is not satisfied.

关键词： bile duct neoplasm brush cytology diagnosis pathology

Influence of structural damage on evaluation of microscopic pore structure in marine continental transitional shale of the Southern North China Basin:A method based on the low-temperature N2 adsorption experiment

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Petroleum Science 2022年第1期19卷 100-115页

作者： Mei-Ling han Xiao-Liang Wei jin-Chuan Zhang yang Liu Xuan Tang Pei Li Zi-Yi Liu Key Laboratory of Strategy Evaluation for Shale Gas of Ministry of Land and Resources China University of GeosciencesBeijing100083China Exploration and Development Institute of Shengli Oilfield Company SinopecDongyingShandong 257015China Petroleum Exploration and Production Research Institute China Petroleum and Chemical Corporation(Sinopec)No.197 Baisha RoadChangping DistrictBeijing102206China State Key Laboratory of Petroleum Resources and Prospecting China University of PetroleumBeijing102200China

Structural damage from sample preparation processes such as cutting and polishing may change the pore structure of ***,changes in pore structure caused by this structural damage from crushing and its effect on marine continental transitional shale have not been well *** changes of microscopic pore structure in marine continental transitional shale during the sample preparation have important research value for subsequent exploration and development of shale *** this study,the pore structures of transitional shale samples from the Shanxi-Taiyuan Formation of the Southern North China Basin under different degrees of damage were analyzed through low-temperature N;adsorption experiments,combined with X-ray diffraction,total organic carbon,vitrinite reflectance analysis,and scanning electron *** results showed that(1)With increasing structural damage,the specific surface area(SSA)changed within relatively tight bounds,while the pore volume(PV)varied significantly,and the growth rate(maximum)exhibited a certain critical value with the crushing mesh number increasing from 20 to 200.(2)The ratio of SSA to PV can be used as a potential proxy for evaluating the influence of changes in the pore structure.(3)Correlation analysis revealed that the microscopic pore structure of marine continental transitional shale from the Shanxi-Taiyuan Formations is mainly controlled by organic matter and clay *** minerals play a leading role in the development of microscopic pores and changes in pore structure.

关键词： Marine continental transitional shale N_(2)adsorption Structural damage Crushing mesh Pore structure parameters