检索结果-南通市图书馆

Combining thermal scanning probe lithography and dry etching for grayscale nanopattern amplification

Microsystems & Nanoengineering 2024年第1期10卷 335-344页

作者： Berke Erbas Ana Conde-Rubio Xia Liu Joffrey Pernollet Zhenyu Wang Arnaud Bertsch Marcos Penedo Georg Fantner Mitali Banerjee Andras Kis giovanni boero Juergen Brugger Microsystems Laboratory École Polytechnique Fédérale de Lausanne(EPFL)Lausanne 1015Switzerland Center of MicroNanoTechnology(CMi) EPFLLausanne 1015Switzerland Laboratory of Nanoscale Electronics and Structures École Polytechnique Fédérale de Lausanne(EPFL)Lausanne 1015Switzerland Laboratory for Bio-and Nano-Instrumentation École Polytechnique Fédérale de Lausanne(EPFL)Lausanne 1015Switzerland Laboratory of Quantum Physics Topology and CorrelationsÉcole Polytechnique Fédérale de Lausanne(EPFL)Lausanne 1015Switzerland Present address:Institute of Materials Science of Barcelona ICMAB-CSIC Campus UABBellaterra 08193Spain Present address:School of Integrated Circuits and Electronics MIIT Key Laboratory for Low-Dimensional Quantum Structure and DevicesBeijing Institute of TechnologyBeijing 100081China

Grayscale structured surfaces with nanometer-scale features are used in a growing number of applications in optics and *** scanning probe lithography achieves a lateral resolution below 10 nm and a vertical resolution below 1 nm,but its maximum depth in polymers is ***,we present an innovative combination of nanowriting in thermal resist and plasma dry etching with substrate cooling,which achieves up to 10-fold amplification of polymer nanopatterns into SiO_(2) without proportionally increasing surface *** nanopatterns in SiO_(2) with 400 nm pitch and 150 nm depth are fabricated free of shape distortion after dry *** exemplify the possible applications of the proposed method,grayscale dielectric nanostructures are used for scalable manufacturing through nanoimprint lithography and for strain nanoengineering of 2D *** a method for aspect ratio amplification and smooth grayscale nanopatterning has the potential to find application in the fabrication of photonic and nanoelectronic devices.

关键词： lithography thermal pattern

来源：

维普期刊数据库评论

在线全文

维普期刊数据库

学校读者我要写书评

暂无评论

SU-8 cantilever with integrated pyrolyzed glass-like carbon piezoresistor

引用

Microsystems & Nanoengineering 2022年第1期8卷 269-280页

作者： Jongmoon Jang Giulia Panusa giovanni boero Juergen Brugger Microsystems Laboratory École Polytechnique Fédérale de Lausanne(EPFL)1015 LausanneSwitzerland Department of Functional Ceramics Korea Institute of Materials Science(KIMS)51508 ChangwonRepublic of Korea Optics Laboratory École Polytechnique Fédérale de Lausanne(EPFL)1015 LausanneSwitzerland

Glass-like carbon(GC)is a nongraphitizing material composed entirely of carbon atoms produced from selected organic polymer resins by controlled pyrolysis in an inert *** GC properties are a combination of the properties of glass,ceramic,and graphite,including hardness,low density,low thermal conductivity,high chemical inertness,biocompatibility,high electrical conductivity,and microfabrication process *** these unique properties,the application of GC in mechanical sensors has not been explored thus ***,we investigate the electrical,structural,and chemical properties of GC thin films derived from epoxy-based negative photoresist SU-8 pyrolyzed from 700 to 900°*** addition,we fabricated microGC piezoresistors pyrolyzed at 700 and 900°C and integrated them into nonpyrolyzed SU-8 cantilevers to create microelectromechanical systems(MEMS)mechanical *** sensitivities of the GC sensor to strain,force,surface stress,and acceleration are characterized to demonstrate their potential and limits for electromechanical microdevices.

关键词： cantilever glass carbon

来源：

维普期刊数据库评论

在线全文

维普期刊数据库

学校读者我要写书评

暂无评论

欢迎您,

建议与咨询留下您的常用邮箱和电话号码，以便我们向您反馈解决方案和替代方法

时间限定

文献类型

馆藏选择

核心期刊

语言

文献类型

帮助

文字说明：

检索规则说明：

检索范例：

分类表

所选分类

限定检索结果

文献类型

馆藏范围

日期分布

学科分类号

主题

机构

作者

语言

在线全文

在线全文

请选择保存的检索档案：

请选择收藏分类：

通借通还

欢迎您,

建议与咨询 留下您的常用邮箱和电话号码，以便我们向您反馈解决方案和替代方法

时间限定

文献类型

馆藏选择

核心期刊

语言

文献类型

帮助

文字说明：

检索规则说明：

检索范例：

分类表

所选分类

限定检索结果

文献类型

馆藏范围

日期分布

学科分类号

主题

机构

作者

语言

在线全文

在线全文

请选择保存的检索档案： 新增检索档案 确定 取消

请选择收藏分类： 新增自定义分类 确定 取消

通借通还

建议与咨询留下您的常用邮箱和电话号码，以便我们向您反馈解决方案和替代方法

请选择保存的检索档案：

请选择收藏分类：