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Microsystems & Nanoengineering 2024年第1期10卷 1-16页

作者： byoungsu ko Nara Jeon Jaekyung Kim Hyunjung Kang Junhwa Seong Suhyeon Yun Trevon Badloe Junsuk Rho Department of Mechanical Engineering Pohang University of Science and Technology(POSTECH)Pohang 37673Republic of Korea Department of Chemical Engineering Pohang University of Science and Technology(POSTECH)Pohang 37673Republic of Korea Graduate School of Artificial Intelligence Pohang University of Science and Technology(POSTECH)Pohang 37673Republic of Korea POSCO-POSTECH-RIST Convergence Research Center for Flat Optics and Metaphotonics Pohang 37673Republic of Korea

Conventional photonic devices exhibit static optical properties that are design-dependent,including the material’s refractive index and geometrical ***,they still possess attractive optical responses for applications and are already exploited in devices across various *** photonics has emerged as a promising solution in the field of active photonics by providing primarily deformable geometric parameters in response to external *** the past few years,various studies have been undertaken to attain stimuli-responsive photonic devices with tunable optical ***,we focus on the recent advancements in hydrogel-based photonics and micro/nanofabrication techniques for *** particular,fabrication techniques for hydrogel photonic devices are categorized into film growth,photolithography(PL),electron-beam lithography(EBL),and nanoimprint lithography(NIL).Furthermore,we provide insights into future directions and prospects for deformable hydrogel photonics,along with their potential practical applications.

关键词： lithography photonics attractive

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Nanoimprint lithography for high-throughput fabrication of metasurfaces

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Frontiers of Optoelectronics 2021年第2期14卷 229-251页

作者： Dong Kyo OH Taejun LEE byoungsu ko Trevon BADLOE Jong G.OK Junsuk RHO Department of Mechanical Engineering Pohang University of Science and Technology(POSTECH)Pohang 37673.Republic of Korea Department of Mechanical and Automotive Engineering Seoul National University of Science and Technology(SEOULTECH)Seoul 01811Republic of Korea Department of Chemical Engineering Pohang University of Science and Technology(POSTECH)Pohang 37673Republic of Korea

Metasurfaces are composed of periodic subwavelength nanostructures and exhibit optical properties that are not found in *** have been widely investigated for optical applications such as holograms,wavefront shaping,and structural color printing,however,electron-beam lithography is not suitable to produce large-area metasurfaces because of the high fabrication cost and low *** alternative optical technologies,such as holographic lithography and plasmonic lithography,can overcome these drawbacks,such methods are still constrained by the optical diffraction *** break through this fundamental problem,mechanical nanopatteming processes have been actively studied in many fields,with nanoimprint lithography(NIL)coming to the *** NIL replicates the nanopattem of the mold regardless of the diffraction limit,NIL can achieve sufficiently high productivity and patterning resolution,giving rise to an explosive development in the fabrication of *** this review,we focus on various NIL technologies for the manufacturing of ***,we briefly describe conventional NIL and then present various NIL methods for the scalable fabrication of *** also discuss recent applications of NIL in the realization of ***,we conclude with an outlook on each method and suggest perspectives for future research on the high-throughput fabrication of active metasurfaces.

关键词： nanoimprint scalable fabrication large-area metasurface tailored nanostructure hierarchical nanostructures

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