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Research 2024年第2期6卷 319-327页

作者： Lihong Hong Haiyao Yang Liqiang Liu Mingzhou Li Yuanyuan Liu baoqin chen Huakang Yu Wenbo Ju Zhi-Yuan Li School of Physics and Optoelectronics South China University of TechnologyGuangzhou 510641China State Key Laboratory of Luminescent Materials and Devices South China University of TechnologyGuangzhou 510640China

An optical spectrometer is a basic spectral instrument that probes microscopic physical and chemical properties of macroscopic objects but generally suffers from difficulty in broadband time-resolved *** this work,we report the creation of ultrabroadband white-light laser with a 3-dB bandwidth covering 385 to 1,080 nm,pulse energy of 1.07 mJ,and pulse duration of several hundred femtoseconds by passing 3-mJ pulse energy,50-fs pulse duration Ti:Sapphire pulse laser through a cascaded fused silica plate and chirped periodically poled lithium niobate *** utilize this unprecedented superflat,ultrabroadband,and intense femtosecond laser light source to build a single-shot(i.e.,single-pulse)subpicosecond pulse laser ultraviolet-visible-near-infrared spectrometer and successfully measure various atomic and molecular absorption *** single-shot ultrafast spectrometer may open up a frontier to monitor simultaneously the ultrafast dynamics of multiple physical and chemical processes in various microscopic systems.

关键词： Pulse utilize frontier

Silicon cuboid nanoantenna with simultaneous large Purcell factor for electric dipole,magnetic dipole and electric quadrupole emission

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Opto-Electronic Advances 2022年第2期5卷 13-21页

作者： Qiurong Deng Jianfeng chen Li Long baoqin chen Huakang Yu Zhiyuan Li School of Physics and Optoelectronics South China University of TechnologyGuangzhou 510641China

The Purcell effect is commonly used to increase the spontaneous emission rate by modifying the local environment of a light ***,we propose a silicon dielectric cuboid nanoantenna for simultaneously enhancing electric dipole(ED),magnetic dipole(MD)and electric quadrupole(EQ)*** study the scattering cross section,polarization charge distribution,and electromagnetic field distribution for electromagnetic plane wave illuminating the silicon dielectric cuboid nanoantenna,from which we have identified simultaneous existence of ED,MD and EQ resonance modes in this *** have calculated the Purcell factor of ED,MD and EQ emitters with different moment orientations as a function of radiation wavelength by placing these point radiation source within the nanoantenna,*** find that the resonances wavelengths of the Purcell factor spectrum are matching with the resonance modes in the ***,the maximum Purcell factor of these ED,MD and EQ emitters is 18,150 and 118 respectively,occur-ring at the resonance wavelength of 475,750,and 562 nm,respectively,all within the visible *** polarization charge distribution features allow us to clarify the excitation and radiation of these resonance modes as the physical ori-gin of large Purcell factor simultaneously occurring in this silicon cuboid *** theoretical results might help to deeply explore and design the dielectric nanoantenna as an ideal candidate to enhance ED,MD and EQ emission simultaneously with very small loss in the visible range,which is superior than the more popular scheme of plasmonic nanoantenna.

关键词： dielectric nanostructure spontaneous emission resonance Purcell effect

Robust modal phase matching in subwavelength x-cut and z-cut lithium niobate thin-film waveguides

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Chinese Optics Letters 2021年第7期19卷 72-76页

作者： Lingzhi Peng Lihong Hong baoqin chen Peng He Zhiyuan Li School of Physics and Optoelectronics South China University of TechnologyGuangzhou 510641China Guangdong Full-Spectra Laser Technology Co. Ltd.Dongguan 523808China Dongguan Sanhang Innovation Research Institute Dongguan 523808China

We use the nonlinear coupled-mode theory to theoretically investigate second-harmonic generation(SHG) in subwavelength x-cut and z-cut lithium niobate(LN) thin-film waveguides and derive the analytical formula to calculate SHG efficiency in x-cut and z-cut LN thin-film waveguides *** the scheme of optimal modal phase matching(MPM), two types of LN thin films can achieve highly efficient frequency doubling of a 1064 nm laser with a comparable conversion efficiency due to very consistent modal field distribution of the fundamental wave and second-harmonic wave with efficient overlap between *** a robust MPM for high-efficiency SHG in both the subwavelength x-cut and z-cut LN thin-film waveguides is further confirmed in a broad wavelength range, which might facilitate design and application of micro–nano nonlinear optical devices based on the subwavelength LN thin film.

关键词： lithium niobate thin film modal phase matching nonlinear coupled-mode theory second-harmonic generation

Gate oxide punching thru mechanism in plasma dry etching

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Science China(Technological Sciences) 2008年第11期51卷 1990-1994页

作者： ZHANG QingZhao XIE ChangQing LIU Ming LI Bing chen baoqin ZHU XiaoLi Laboratory of Nanofabrication and Novel Device Integration Institute of MicroelectronicsChinese Academy of SciencesBeijing 100029China

The punching thru mechanism of gate oxide (thickness about 15A) was investi- gated. Because of the thin thickness of gate oxide, gate oxide punching thru may easily happen during the plasma process. It was found that what caused the punching thru was not only the selectivity of poly-silicon/oxide but also the pattern topography. We used the basic SRAM pattern to check this topography effect, and found that gate oxide located at the narrow spacing of two parallel serpentine lines was the most easily punched thru. What caused the topography effect was the starvation of oxygen in these places which were induced by the residue of poly-silicon and enhanced by electron shading effect. So, to solve the issue of gate oxide punching thru, firstly the selectivity should be enough, secondly we should pay attention to the etching pattern topography.

关键词： plasma etch punch thru gate oxide

Unicity of Meromorphic Solutions of Some Nonlinear Difference Equations

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Advances in Pure Mathematics 2019年第7期9卷 611-618页

作者： baoqin chen Faculty of Mathematics and Computer Science Guangdong Ocean University Zhangjiang China

This paper is to study the unicity of transcendental meromorphic solutions to some nonlinear difference equations. Let be a nonzero rational function. Consider the uniqueness of transcendental meromorphic solutions to some nonlinear difference equations of the form . For two finite order transcendental meromorphic solutions of the equation above, it shows that they are almost equal to each other except for a nonconstant factor, if they have the same zeros and poles counting multiplicities, when . Two relative results are proved, and examples to show sharpness of our results are provided.

关键词： Unicity Meromorphic Solution Difference Equation

Ultrabroadband nonlinear Raman-Nath diffraction against femtosecond pulse laser

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Photonics Research 2022年第4期10卷 905-912页

作者： Lihong Hong baoqin chen chenyang Hu Zhi-Yuan Li School of Physics and Optoelectronics South China University of TechnologyGuangzhou 510641China Guangdong Jingqi Laser Technology Corporation Limited Dongguan 523808China

Nonlinear Raman–Nath diffraction(NRND) offers an effective way to realize multiple noncollinear parametric processes based on the partially satisfied transverse phase-matching conditions in quadratic nonlinear ***, the realization of ultrabroadband NRND(UB-NRND) driven by a high-peak-power ultrashort femtosecond pump laser in two types of nonlinear crystals is reported: periodically poled lithium niobate(PPLN) and chirped PPLN(CPPLN). Multi-order ultrabroadband Raman–Nath second-harmonic(SH) signal outputs along fixed diffraction angles are simultaneously observed. This distinguished transversely phase-matched supercontinuum phenomenon is attributed to the synergic action of natural broad bandwidth of an ultrashort femtosecond pump laser and the third-order nonlinear effect induced spectral broadening, in combination with the principal ultrabroadband noncollinear second-harmonic generation processes. The NRND process with multiple quasiphase matching(QPM) interactions from CPPLN leads to the SH output covering a wide range of wavelengths between 389 and 997 nm and exhibiting an energy conversion efficiency several orders of magnitude higher than previous studies. This UB-NRND scheme would bring better techniques and tools for applications ranging from ultrashort pulse characterization and nondestructive identification of domain structures to accurate parameter monitoring of second-and third-order nonlinear susceptibilities within solid-state nonlinear microstructured materials.

关键词： nonlinear diffraction matching

Data Quality Control Method of a New Drifting Observation Technology Named Drifting Air-Sea Interface Buoy

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Journal of Ocean University of China 2024年第1期23卷 11-22页

作者： LI Shuo WANG Bin DENG Zeng’an WU baoqin ZHU Xiande chen Zhaohui National Ocean Technology Center Tianjin 300112China School of Marine Science and Technology Tianjin UniversityTianjin 300072China Key Laboratory of Ocean Observation Technology Ministry of Natural ResourcesTianjin 300112China People’s Liberation Army 92859 Tianjin 300061China Physical Oceanography Laboratory Ocean University of ChinaQingdao 266100China

An integral quality control(QC)procedure that integrates various QC methods and considers the design indexes and operational status of the instruments for the observations of drifting air-sea interface buoy was developed in the order of basic in-spection followed by targeted *** innovative method of combining a moving Hampel filter and local anomaly detection com-plies with statistical laws and physical processes,which guarantees the QC performance of meteorological *** sets of observation data were used to verify the applicability and effectiveness of the QC procedure,and the effect was evaluated using the observations of the Kuroshio Extension Observatory buoy as the *** results showed that the outliers in the time series can be correctly identified and processed,and the quality of data improved *** linear correlation between the quality-controlled observations and the reference increased,and the difference *** correlation coefficient of wind speed before and after QC increased from 0.77 to 0.82,and the maximum absolute error decreased by approximately 2.8ms^(-1).In addition,air pressure and relative humidity were optimized by 10^(-3)–10^(-2) orders of *** the sea surface temperature,the weight of coefficients of the continuity test algorithm was optimized based on the sea area of data acquisition,which effectively expanded the applicability of the algorithm.

关键词： drifting air-sea interface buoy quality control oceanic variables meteorological variables continuity test

White Laser Realized via Synergic Second-and Third-Order Nonlinearities

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Research 2021年第1期2021卷 8-20页

作者： baoqin chen Lihong Hong chenyang Hu Zhiyuan Li School of Physics and Optoelectronics South China University of TechnologyGuangzhou 510641China Guangdong Jingqi Laser Technology Corporation Limited SongshanhuDongguan 523808China

White laser with balanced performance of broad bandwidth,high average and peak power,large pulse energy,high spatial and temporal coherence,controllable spectrum profile,and overall chroma are highly desirable in various fields of modern ***,for the first time,we report an innovative scheme of harnessing the synergic action of both the second-order nonlinearity(2^(nd)-NL)and the third-order nonlinearity(3^(rd)-NL)in a single chirped periodically poled lithium niobate(CPPLN)nonlinear photonic crystal driven by a high-peak-power near-infrared(NIR)(central wavelength~1400 nm,energy~100μJ per pulse)femtosecond pump laser to produce visible to near infrared(vis-NIR,400-900 nm)supercontinuum white *** CPPLN involves a series of reciprocal-lattice bands that can be exploited to support quasiphase matching for simultaneous broadband second-and third-harmonic generations(SHG and THG)with considerable conversion *** to the remarkable 3rdNL which is due to the high energy density of the pump,SHG and THG laser pulses will induce significant spectral broadening in them and eventually generate bright vis-NIR white laser with high conversion efficiency up to 30%.Moreover,the spectral profile and overall chroma of output white laser can be widely modulated by adjusting the pump laser intensity,wavelength,and *** work indicates that one can deeply engineer the synergic and collective action of 2^(nd)-NL and 3^(rd)-NL in nonlinear crystals to accomplish high peak power,ultrabroadband vis-NIR white laser and hopefully realize the even greater but much more challenging dream of ultraviolet-visible-infrared full-spectrum laser.

关键词： pump visible nonlinearity

Entire Function Sharing Small Function with Its Difference Operators or Shifts

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Journal of Mathematical Research with Applications 2012年第4期32卷 431-438页

作者： baoqin chen ,Zongxuan chen School of Mathematical Sciences,South China Normal University,Guangdong 510631,P.R.China School of Mathematical Sciences South China Normal University Guangdong 510631

In this paper,we give some interesting results concerning the entire function f(z) sharing a small function a CM with its difference operators or shifts.

关键词： Brck conjecture shift difference shared value.

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光刻技术六十年

激光与光电子学进展 2022年第9期59卷 508-528页

作者：陈宝钦中国科学院微电子研究所北京100029 中国科学院大学集成电路学院北京100049

当今世界离不开信息产业,信息产业离不开半导体集成电路芯片制造技术,即微电子技术。集成电路芯片制造工艺中最关键的就是光刻技术。光刻技术开始于1958年美国德克萨斯公司试制的世界上第一块平面集成电路,在短短的60年中,光刻分辨率极... 详细信息

当今世界离不开信息产业,信息产业离不开半导体集成电路芯片制造技术,即微电子技术。集成电路芯片制造工艺中最关键的就是光刻技术。光刻技术开始于1958年美国德克萨斯公司试制的世界上第一块平面集成电路,在短短的60年中,光刻分辨率极限一次又一次被突破,创造了人间奇迹。作为微电子技术工艺基础的光刻技术与微/纳米加工技术是人类迄今为止所能达到的精度最高的加工技术。光刻加工尺寸从百微米到10 nm,加工手段从钢板尺手术刀照相机到电子束光刻,光源波长从光学曝光到极紫外曝光。集成度提高了约百亿倍,特征尺寸线宽缩小到原来的约1/10000。随着纳米集成电路迅猛发展,光刻技术也从等效摩尔时代进入后摩尔时代。

关键词：光刻技术光学分辨率增强技术下一代光刻微纳米加工技术