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Exploring the nonlinear piezoresistive effect of 4HSiC and developing MEMS pressure sensors for extreme environments

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Microsystems & Nanoengineering 2023年第2期9卷 59-76页

作者： Chen Wu Xudong Fang Qiang Kang Ziyan Fang Junxia Wu Hongtao He Dong Zhang Libo Zha Bian Tian Ryutaro Maedai zhuangde jjang State Key Laboratory for Manufacturing Systems Engineering International Joint Laboratory for Micro/Nano Manufacturing and Measurement TechnologiesXian Jiaotong UniversityXian 710049China School of Mechanical Engineering Xian Jiaotong UniversityXi'an 710049China Shandong Laboratory of Yantai Advanced Materials and Green Manufacturing Yantai 265503China Xi'an Jiaotong University(Yantai)Research Institute for Intelligent Sensing Technology and System Xi'an Jiaotong UniversityXianChina HeBei Semiconductor Research Institute Shjiazhuang 050051China

Microelectromechanical system(MEMS)pressure sensors based on silicon are widely used and offer the benefits of miniaturization and high ***,they cannot easily withstand high temperatures exceeding 150 ℃ because of intrinsic material ***,we proposed and executed a systematic and full-process study of Sic-based MEMS pressure sensors that operate stably from-50 to 300 ℃.First,to explore the nonlinear piezoresistive effect,the temperature coefficient of resistance(TCR)values of 4H-SiC piezoresistors were obtained from-50 to 500 ℃.A conductivity variation model based on scattering theory was established to reveal the nonlinear variation ***,a piezoresistive pressure sensor based on 4H-SiC was designed and *** sensor shows good output sensitivity(3.38 mVN/MPa),accuracy(0.56%FS)and low temperature coefficient of sensitivity(TCS)(-0.067%FS/℃)in the range of-50 to 300 ℃.In addition,the survivability of the sensor chip in extreme environments was demonstrated by its anti-corrosion capability in H_(2)SO_(4) and NaOH solutions and its radiation tolerance under 5 W ***,the sensor developed in this work has high potential to measure pressure in high-temperature and extreme environments such as are faced in geothermal energy extraction,deep well dilling,aeroengines and gas turbines.

关键词： environments extreme nonlinear

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