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Special issue： Ultra-precision machining

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Frontiers of Mechanical Engineering 2017年第1期12卷 1-2页

作者： zhuangde jiang Dongming GUO State Key Laboratory for Manufacturing Systems Engineering International Joint Laboratory for Micro/Nano Manufacturing and MeasurementTechnologies Collaborative Innovation Center of Suzhou Nano Science and Technology School of Mechanical Engineering Xi'an JiaotongUniversity Xi'an 710049 China Key Laboratory for Precision and Non-traditional Machining Technology of Ministry of Education Dalian University of Technology Dalian 116024China

This special issue in Frontiers of Mechanical Engineering contains seventeen papers contributed by prestigious experts from five countries, including one prospect paper, four research papers and twelve review papers. These papers cover a broad area of the ultra-precision machining, and focus on the recent advances on a wide variety of machining methods, such as precision molding, figuring, milling, lapping and diamond machining, to illustrate how various materials in the macro-scale or micro-scale can be machined with high precision, low surface^subsurface damage and ultra-smooth surfaces to meet the demands of numerous application areas, including high-power laser systems, consumer electronics, flexible devices, etc. Some other hot topics, such as the measurement and simulation technology in the ultra-precision machining field, are also covered to provide the readers with a more comprehensive view.

关键词： Special Ultra precision machining

Fast frequency relocking for synchronization enhanced resonant accelerometer

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Microsystems & Nanoengineering 2022年第5期8卷 53-60页

作者： Liu Xu Yonghong Qi zhuangde jiang Xueyong Wei State Key Laboratory for Manufacturing Systems Engineering Xi’an Jiaotong UniversityXi’anShaanxi 710049China

Synchronization,as a unique phenomenon,has been extensively studied in biology,chaotic systems,nonlinear dynamics,quantum information,and other *** from the characteristics of frequency amplification,noise suppression,and stability improvement,synchronization has been gradually applied in sensing,communication,time keeping,and other *** the sensing field,synchronization provides a new strategy to improve the performance of ***,the performance improvement is only effective within the synchronization range,and the narrow synchronization range has become a great challenge for the wide application of synchronizationenhanced sensing ***,we propose a frequency automatic tracking system(FATS)to widen the synchronization range and track the periodic acceleration signals by adjusting the frequency of the readout oscillator in real *** addition,a high-precision frequency measurement system and fast response control system based on FPGA(Field Programmable Gate Array)are built,and the tracking performance of the FATS for static and dynamic external signals is analyzed to obtain the optimal control *** results show that the proposed automatic tracking system is capable of static acceleration measurement,the synchronization range can be expanded to 975 Hz,and the relocking time is shortened to 93.4 ms at *** selecting the optimal PID parameters,we achieve a faster relocking time to meet the requirements of low-frequency vibration measurements,such as seismic detection and tidal monitoring.

关键词： synchronization locking acceleration

SEGMENTATION ALGORITHM BASED ON EDGE-SEARCHING FOR MULTI-LINEAR STRUCTURED LIGHT IMAGES

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Chinese Journal of Mechanical Engineering 2006年第3期19卷 468-470页

作者： LIU Baohua LI Bing jiang zhuangde State Key Laboratory of Mechanism Manufacture System Engineering Xi＇an Jiaotong University Xi＇an 710049 China Precise Engineering Institute Xi＇an Jiaotong University Xi＇an 710049 China

Aiming at the problem that the existence of disturbances on the edges of light-stripe makes the segmentation of the light-stripes images difficult, a new segmentation algorithm based on edge-searching is presented. It firstly calculates every edge pixel＇s horizontal coordinate grads to produce the corresponding grads-edge, then uses a designed length-variable l D template to scan the light-stripes＇ grads-edges. The template is able to find the disturbances with different width utilizing the distributing character of the edge disturbances. The found disturbances are eliminated finally. The algorithm not only can smoothly segment the light-stripes images, but also eliminate most disturbances on the light-stripes＇ edges without damaging the light-stripes images＇ 3D information. A practical example of using the proposed algorithm is given in the end. It is proved that the efficiency of the algorithm has been improved obviously by comparison.

关键词： Structured light Image segmentation Disturbances Edge-searching

Foreword to the Special Issue on the 7th International Conference on Nanomanufacturing(nanoMan2021)

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Nanomanufacturing and Metrology 2022年第4期5卷 325-326页

作者： Shuming Yang zhuangde jiang State Key Laboratory for Manufacturing Systems Engineering Xi’an Jiaotong UniversityXi’an710049China

Global trends towards miniaturization of devices and systems open up many new fields in *** encompasses the synthesis of nanomaterials[1],fabrication of devices[2],nanofeatures for various products and systems,process monitoring and quality control,simulations,characterization methods,and applications of nanoscience and nanotechnologies[3,4,5].All these promote the development of nanomanufacturing.

关键词： synthesis characterization Foreword

Programmable synchronization enhanced MEMS resonant accelerometer

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Microsystems & Nanoengineering 2020年第1期6卷 654-663页

作者： Liu Xu Shudong Wang zhuangde jiang Xueyong Wei State Key Laboratory for Manufacturing Systems Engineering Xi’an Jiaotong UniversityXi’an 710049China

Acceleration measurement is of great significance due to its extensive applications in military/industrial *** recent years,scientists have been pursuing methods to improve the performance of accelerometers,particularly through seeking new sensing ***,we present a synchronized oscillator-based enhancement approach to realize a fivefold resolution improvement of a microelectromechanical resonant *** the unidirectional electrical coupling method,we achieved synchronization of the sensing oscillator of the microelectromechanical resonant accelerometer and an external reading oscillator,which remarkably enhanced the stability of the oscillation system to 19.4 ppb and the resolution of the accelerometer to 1.91μ*** addition,the narrow synchronization bandwidth of conventional synchronized oscillators was discussed,and hence,we propose a novel frequency automatic tracking system to expand the synchronization bandwidth from 113 to 1246 Hz,which covers the full acceleration measurement range of±1 *** the first time,we utilized a unidirectional electrical synchronization mechanism to improve the resolution of resonant *** comprehensive scheme provides a general and powerful solution for performance enhancement of any microelectromechanical system(MEMS)resonant sensor,thereby enabling a wide spectrum of applications.

关键词： resonant oscillator hence

Advanced tools and methods for single-cell surgery

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Microsystems & Nanoengineering 2022年第2期8卷 1-21页

作者： Adnan Shakoor Wendi Gao Libo Zhao zhuangde jiang Dong Sun Department of Biomedical Engineering City University of Hong KongHong KongChina State Key Laboratory for Manufacturing Systems Engineering International Joint Laboratory for Micro/Nano Manufacturing and Measurement TechnologiesThe School of Mechanical EngineeringXi'an Jiaotong UniversityXi'anChina

Highly precise micromanipulation tools that can manipulate and interrogate cell organelles and components must be developed to support the rapid development of new cell-based medical therapies,thereby facilitating in-depth understanding of cell dynamics,cell component functions,and disease *** paper presents a literature review on micro/nanomanipulation tools and their control methods for single-cell *** methods specifically based on laser,microneedle,and untethered micro/nanotools are presented in *** limitations of these techniques are also *** biological significance and clinical applications of single-cell surgery are also addressed in this paper.

关键词： manipulation surgery needle

DISTRIBUTED OPTICAL FIBER SENSOR FOR LONG-DISTANCE OIL PIPELINE HEALTH

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Chinese Journal of Mechanical Engineering 2006年第1期19卷 137-139页

作者： WANG Yannian jiang zhuangde CHEN Xiaonan ZHAO Yulong State Key Laboratory for Manufacturing Systems Engineering Xi＇ an Jiaotong University Xi＇ an 710049 China Institute of Precision Engineering Xi＇ an Jiaotong University Xi＇ an 710049 China

A fully distributed optical fiber sensor （DOFS） for monitoring long-distance oil pipeline health is proposed based on optical time domain reflectometry （OTDR）. A smart and sensitive optical fiber cable is installed along the pipeline acting as a sensor, The experiments show that the cable swells when exposed to oil and induced additional bending losses inside the fiber, and the optical attenuation of the fiber coated by a thin skin with periodical hardness is sensitive to deformation and vibration caused by oil leakage, tampering, or mechanical impact. The region where the additional attenuation occurred is detected and located by DOFS based on OTDR, the types of pipeline accidents are identified according to the characteristics of transmitted optical power received by an optical power meter, Another prototype of DOFS based on a forward traveling frequency-modulated continuous-wave （FMCW） is also proposed to monitor pipeline. The advantages and disadvantages of DOFSs based on OTDR and FMCW are discussed. The experiments show that DOFSs are capable of detecting and locating distant oil pipeline leakages and damages in real time with an estimated precision of ten meters over tens of kilometers.

关键词： Optical fiber sensor Fault diagnostic Leak detection Oil pipeline

Wheel Setting Error Modeling and Compensation for Arc Envelope Grinding of Large-Aperture Aspherical Optics

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Chinese Journal of Mechanical Engineering 2022年第5期35卷 87-99页

作者： Changsheng Li Lin Sun Zhaoxiang Chen Jianfang Chen Qijing Lin Jianjun Ding zhuangde jiang State Key Laboratory for Manufacturing Systems Engineering Xi’an Jiaotong UniversityXi’an 710049China School of Mechanical Engineering Xi’an Jiaotong UniversityXi’an 710049China Shaanxi Qinchuan Precision CNC Machine Tool Engineering Research Co Xi’an 710018China

Precision grinding is a key process for realizing the use of large-aperture aspherical optical elements in laser nuclear fusion devices,large-aperture astronomical telescopes,and high-resolution space *** this study,the arc envelope grinding process of large-aperture aspherical optics is investigated using a CM1500 precision grinding machine with a maximum machinable diameter ofΦ1500 *** form error of the aspherical workpiece induced by wheel setting errors is analytically modeled for both parallel and cross *** show that the form error is more sensitive to the wheel setting error along the feed direction than that along the lateral *** is a bilinear function of the feed-direction wheel setting error and the distance to the optical *** on the error function above,a method to determine the wheel setting error is ***,grinding tests are performed with the wheels aligned *** a newly proposed partial error compensation method with an appropriate compensation factor,a form error of 3.4μm peak-to-valley(PV)for aΦ400 mm elliptical K9 glass surface is achieved.

关键词： Aspherical optics Wheel setting Arc envelope grinding Form error Large aperture

Fabrication of Nanoscale Step Height Structure Using Atomic Layer Deposition Combined with Wet Etching

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Chinese Journal of Mechanical Engineering 2016年第1期29卷 91-97页

作者： WANG Chenying YANG Shuming JING Weixuan REN Wei LIN Qijing ZHANG Yijun jiang zhuangde State Key Laboratory for Manufacturing Systems Engineering Xi'an Jiaotong University Electronic Materials Research Laboratory Key Laboratory of the Ministry of Education & International Center for Dielectric Research Xi'an Jiaotong University

The current techniques used for the fabrication of nanosteps are normally done by layer growth and then ion beam thinning. There are also extra films grown on the step surfaces in order to reduce the roughness. So the whole process is time consuming. In this paper, a nanoscale step height structure is fabricated by atomic layer deposition （ALD） and wet etching techniques. According to the traceable of the step height value, the fabrication process is controllable. Because ALD technology can grow a variety of materials, aluminum oxide （Al2O3） is used to fabricate the nanostep. There are three steps of Al2O3 in this structure including 8 nm, 18 nm and 44 inn. The thickness of Al2O3 film and the height of the step are measured by anellipsometer. The experimental results show that the thickness of Al2O3 film is consistent with the height of the step. The height of the step is measured by AFM. The measurement results show that the height is related to the number of cycles of ALD and the wet etching time. The bottom and the sidewall surface roughness are related to the wet etching time. The step height is calibrated by Physikaliseh-Technische Bundesanstalt （PTB） and the results were 7.5±1.5 nm, 15.5±2.0 nm and 41.8±2.1 nm, respectively. This research provides a method for the fabrication of step height at nanoscale and the nanostep fabricated is potential used for standard references.

关键词： atomic layer deposition (ALD) wet etching step height