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Effect of Nano-sized CeO_2 Abrasives on Chemical Mechanical Polishing of Silicon Wafer

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Semiconductor Photonics and Technology 2006年第2期12卷 81-84,94页

作者： zhang bao-sen CHEN Yang School of Materials Science and Engineering Anhui University of Technology Maanshan 243002 CHN Department of Materials Engineering Jiangsu Polytechnic University Changzhou 213016 CHN

The conception of the soft layer during chemical mechanical polishing(CMP) was proposed for the first time. The soft layer was a reaction layer formed on the silicon surface; it was softer than the silicon substrate and its thickness was about several nanometers. The existence of the soft layer could increase the material volume removed by one particle and increase the material removal rate during CMP. At the same time, the soft layer could decrease the cutting depth of the abrasive particle so as to realize ductile grinding, and it is useful to decrease the roughness of the polished surface and to improve the polishing quality.

关键词： CMP Cerium oxide Soft layer Chemical effect

An extended state observer with adjustable bandwidth for measurement noise

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Journal of Systems Engineering and Electronics 2024年第1期35卷 233-241页

作者： zhang Shihua QI Xiaohui YANG sen Shijiazhuang Campus Army Engineering University of PLAShijiazhuang 050053China

In this paper,a bandwidth-adjustable extended state observer(ABESO)is proposed for the systems with measurement *** is known that increasing the bandwidth of the observer improves the tracking speed but tolerates noise,which conflicts with observation ***,we introduce a bandwidth scaling factor such that ABESO is formulated to a 2-degree-of-freedom *** observer gain is determined and the bandwidth scaling factor adjusts the bandwidth according to the tracking *** the tracking error decreases,the bandwidth decreases to suppress the noise,otherwise the bandwidth does not *** is proven that the error dynamics are bounded and converge in finite *** relationship between the upper bound of the estimation error and the scaling factor is *** the scaling factor is less than 1,the ABESO has higher estimation accuracy than the linear extended state observer(LESO).Simulations of an uncertain nonlinear system with compound disturbances show that the proposed ABESO can successfully estimate the total disturbance in noisy *** mean error of total disturbance of ABESO is 15.28% lower than that of LESO.

关键词： extended state observer(ESO) boundedness and convergence adjustable bandwidth measurement noise

A novel weld-pool-length monitoring method based on pixel analysis in plasma arc additive manufacturing

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Advances in Manufacturing 2024年第2期12卷 335-348页

作者： bao-Ri zhang Yong-Hua Shi Bionic Robot Research Department Ji Hua LaboratoryFoshan528200GuangdongPeople’s Republic of China Guangdong Provincial Engineering Research Center for Special Welding Technology and Equipment School of Mechanical and Automotive EngineeringSouth China University of TechnologyGuangzhou510640People’s Republic of China

The real-time monitoring of the weld pool during deposition is important for automatic control in plasma arc additive *** obtain a high deposition accuracy,it is essential to maintain a stable weld pool *** this study,a novel passive visual method is proposed to measure the weld pool *** the proposed method,the image quality was improved by designing a special visual system that employed an endoscope and a *** also includes pixel brightness-based and gradient-based algorithms that can adaptively detect feature points at the boundary when the weld pool geometry *** algorithm can also be applied to materials with different solidification *** was performed to measure the real weld pool length in world coordinates,and outlier rejection was performed to increase the accuracy of the ***,tests were carried out on the intersection component,and the results showed that the proposed method performed well in tracking the changing weld pool length and was applicable to the real-time monitoring of different types of materials.

关键词： Plasma arc additive manufacturing(PAAM) Weld pool geometry Gradient analysis Real-time detection

Optical responses of metallic plasmonic arrays under the localized excitation

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Nano Research 2024年第3期17卷 1571-1577页

作者： sen Yan Hao Ma Yi-Fan bao Maofeng Cao Chuan Liu Kaifeng zhang Xiaowei Wu Jianbo He Xiang Wang Bin Ren State Key Laboratory of Physical Chemistry of Solid Surfaces Department of ChemistryCollege of Chemistry and Chemical EngineeringXiamen UniversityXiamen 361005China Innovation Laboratory for Sciences and Technologies of Energy Materials of Fujian Province(IKKEM) Xiamen 361005China Research&Development Group HitachiLtd.Yokohama 244-0817KanagawaJapan Department of Electronic Science and Engineering Kyoto UniversityKyoto 615-8510Japan

The metallic plasmonic array that can support both propagating surface plasmon polaritons(PSPPs)and localized surface plasmon resonance(LSPR)possesses rich optical properties and remarkable optical performance,making it a powerful platform for applications in photonics,chemistry,and *** practical applications,the excitation spot is usually smaller than the area of metal *** is thus imperative to address“how many array units are enough?”towards a rational design of plasmonic ***,we employed focused ion beam(FIB)to precisely fabricate a series of plasmonic array structures with increased unit *** utilizing photoluminescence(PL)and surface-enhanced Raman spectroscopy(SERS),we found that the array units outside the excitation spot still have a significant impact on the optical response within the *** with the numerical simulation,we found that the boundary of the finite array leads to the loss of PSPP outside the excitation point,which subsequently affects the coupling of PSPP and LSPR in the excitation spot,leading to variations in PL and SERS *** on the findings,we further tuned the LSPR mode of the metal arrays by electrodeposition to obtain strong near-field enhancement without any influence on the PSPP *** work advances the understanding of near-field and far-field optical behavior in finite-size array structures and provides guidance for designing highly-efficient photonic devices.

关键词： plasmonic periodic array finite-size effects dark field scattering surface-enhanced Raman spectroscopy(SERS)

Identification of carbonates with high positive carbon isotope excursion from the Liaohe Group in the northeastern North China Craton and implications for the Lomagundi-Jatuli Event

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Science China Earth Sciences 2024年第9期67卷 2824-2844页

作者： Hongyu WANG Shuanhong zhang sen WANG Linghao KONG Yue ZHAO Qiqi zhang sen GAO Guohui HU Institute of Geomechanics Chinese Academy of Geological SciencesBeijing 100081China Key Laboratory of Paleomagnetism and Tectonic Reconstruction Ministry of Natural ResourcesBeijing 100081China SinoProbe Laboratory Chinese Academy of Geological SciencesBeijing 100037China School of Earth Science and Mineral Resources China University of GeosciencesBeijing 100083China

The Great Oxidation Event(GOE)during the early Paleoproterozoic represents the first significant buildup in Earth’s atmospheric oxygen and resulted in a series of significant changes in the Earth’s surface *** them is the 2.22(or 2.33)–2.06 Ga Lomagundi-Jatuli Event(LJE),which is globally,the largest magnitude and longest duration,marine carbonate positive carbon isotope excursion(δ^(13)C_(V-PDB)>10‰)*** event has attracted the attention of scholars all over the ***,except for a high positive carbon isotope excursion(δ^(13)C_(V-PDB)>10‰)recently identified from marine carbonate rocks within the Daposhan Formation in the lower Fanhe Group(or the Sanchazi Group)in the Longgang Block in the northeast North China Craton(NCC),Paleoproterozoic carbonates in the NCC are characterized by a low-amplitude positive carbon isotope excursion(δ^(13)C_(V-PDB)10‰)of marine carbonate rocks occurred at about 2.15 *** co

关键词： Lomagundi-Jatuli Event(LJE) Great Oxidation Event(GOE) Carbon-oxygen isotopes Liaohe Group Marine carbonate Jiao-Liao-Ji Belt North China Craton

A Spleen Tyrosine Kinase’s Sky in Neuronal Degeneration

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Neuroscience Bulletin 2024年第2期40卷 273-276页

作者： Wan-Yun zhang sen Lin Department of Neurology Xinqiao HospitalThe Second Afliated HospitalArmy Medical UniversityChongqing 400042China Chongqing Institute for Brain and Intelligence Guangyang Bay LaboratoryChongqing 400064China

With the growing elderly population,neurodegenerative disorders like Alzheimer's disease(AD)are emerging as a significant public health *** is widely acknowledged in the scientific community that the accumulation of neurotoxic aggregates,such as amyloid beta(Aβ),within the central nervous system is a major factor in the development of these ***,human genome-wide association studies have identified mutations in microglial receptors that may be linked to a number of neurodegenerative diseases[1].

关键词： Aβ Spleen Alzheimer

Robust Forecasting-Aided State Estimation Considering Uncertainty in Distribution System

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CSEE Journal of Power and Energy Systems 2024年第4期10卷 1632-1641页

作者： Dongchen Hou Yonghui Sun Linchuang zhang sen Wang College of Energy and Electrical Engineering Hohai UniversityNanjing 210098China

With the development of the smart grid,the distribution system operation conditions become more complex and ***,due to the influence of observation outliers and uncertain noise statistics,it is more difficult to grasp the dynamic operation characteristics of distribution *** order to address these problems,by using projection statistics and the noise covariance updating technology based on the Sage-Husa noise estimator,for distribution power system with outliers and uncertain noise statistics,a robust adaptive cubature Kalman filter forecasting-aided state estimation method is proposed based on generalized-maximum likelihood type ***,an adaptive strategy,which can enhance the filtering accuracy under normal conditions,is *** the simulation part,the branch parameters and node load parameters of the test system are appropriately modified to simulate the asymmetry of the three-phase branch parameters and the asymmetry of the three-phase ***,through simulation experiments on the improved test system,it is verified that the robust forecasting-aided state estimation method,presented in this paper,can effectively perceive the actual operating state of the distribution network in different simulation scenarios.

关键词： Cubature Kalman filter distribution power system forecasting-aided state estimation projection statistics

Testing Linearity in Functional Partially Linear Models

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Acta Mathematicae Applicatae Sinica 2024年第3期40卷 875-886页

作者： Fan-rong ZHAO bao-xue zhang School of Mathematical Sciences Shanxi UniversityTaiyuan 030006China School of Statistics Capital University of Economics and BusinessBeijing 100070China

For the functional partially linear models including flexible nonparametric part and functional linear part,the estimators of the nonlinear function and the slope function have been studied in existing *** to test the correlation between response and explanatory variables,however,still seems to be ***,a test procedure for testing the linearity in the functional partially linear models will be proposed in this paper.A test statistic is constructed based on the existing estimators of the nonlinear and the slope ***,we prove that the approximately asymptotic distribution of the proposed statistic is a chi-squared distribution under some regularity ***,some simulation studies and a real data application are presented to demonstrate the performance of the proposed test statistic.

关键词： asymptotic theory functional partially linear model Nadaraya-Watson estimate test statistic

An Online Q-Learning Method for Linear-Quadratic Nonzero-Sum Stochastic Differential Games with Completely Unknown Dynamics

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Journal of Systems Science & Complexity 2024年第5期37卷 1907-1922页

作者： zhang bao-Qiang WANG Bing-Chang CAO Ying School of Control Science and Engineering Shandong UniversityJinan 250000China

In this paper,the authors design a reinforcement learning algorithm to solve the adaptive linear-quadratic stochastic n-players non-zero sum differential game with completely unknown *** each player,a critic network is used to estimate the Q-function,and an actor network is used to estimate the control input.A model-free online Q-learning algorithm is obtained for solving this kind of *** is proved that under some mild conditions the system state and weight estimation errors can be uniformly ultimately bounded.A simulation with five players is given to verify the effectiveness of the algorithm.

关键词： Actor-critic algorithm model-free adaptive control nonzero-sum stochastic game reinforcement learning