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Comparison of Single-Step and Two-Step EBL T-Gates Fabrication Techniques for In P-Based HEMT

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Chinese Journal of Electronics 2016年第2期25卷 199-202页

作者： ZHONG Yinghui zang huaping SUN Shuxiang WANG Haili LI Kaikai LI Xinjian DING Peng JIN Zhi School of Physics and Engineering Zhengzhou University Institute of Microelectronics Chinese Academy of Sciences

T-Gate fabrication processes for In P-based High electron mobility transistors(HEMTs) are described using PMMA/Al/UVIII. The single-step and two-step Electron beam lithography(EBL) methods are proposed contrastively without dielectric support layer. The optimal gate-foot length is 196 nm for 50 nm geometry path by single-step EBL technique. Since the gate-foot and gate-head are defined independently, the two-step EBL process minimizes forward scattering and enables smaller gate-foot length, which improves to be 141 nm for 50 nm geometry path and also 88 nm for 30 nm geometry *** EBL methods have been incorporated into In Pbased HEMTs fabrication. With the gate-foot length decreases from 196 nm to 141 nm, the current-gain cutoff frequency(fT) is improved from 125 GHz to 164 GHz, and also the maximum oscillation frequency(fmax) increases from305 GHz to 375 GHz.

关键词： T-Gate HEMTs EBL technique Two-step EBL technique Polymethylmethacrylate(PMMA)

All-silicon chiral metasurfaces and wavefront shaping assisted by interference

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Science China(Physics,Mechanics & Astronomy) 2021年第11期64卷 69-77页

作者： Chenglong Zheng Jie Li Jitao Li Zhen Yue Silei Wang Mengyao Li Hongliang Zhao Xuanruo Hao huaping zang Yating Zhang Jianquan Yao Key Laboratory of Opto-Electronics Information Technology(Tianjin University) Ministry of EducationSchool of Precision Instruments and Opto-Electronics EngineeringTianjin UniversityTianjin 300072China School of Physics and Microelectronics Zhengzhou UniversityZhengzhou 450001China

Chiral metasurfaces have different electromagnetic responses with circularly polarized lights,showing as circular dichroism and optical ***,a novel kind of all-silicon chiral metasurface is proposed by introducing destructive interference between achiral *** maximum value of circular dichroism spectra can reach *** adding an antireflective layer at the side of the silicon substrate,the maximum circular dichroism reaches *** is more,the bandwidth of circular dichroism greater than 0.4 reaches 0.15 *** samples are fabricated to verify the feasibility of this scheme,and the experimental results are in good agreement with the *** addition,the proposed scheme can also be used to generate various interesting functions,such as beam control and vortex *** flexible and efficient implementation solution of chiral metasurface can bring new ideas to the development of chiral devices in the future.

关键词： metasurface chiral terahertz decoupling

Generation of single-focus phase singularity by the annulusquadrangle-element coded binary square spiral zone plates

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Science China(Physics,Mechanics & Astronomy) 2022年第9期65卷 72-78页

作者： huaping zang Zhuanglei Miao Mengguang Wang Quanping Fan Lai Wei Chuanke Wang Weimin Zhou Yilei Hua Leifeng Cao Xinlian Xue Haizhong Guo Key Laboratory of Material Physics Ministry of EducationSchool of Physics and MicroelectronicsZhengzhou UniversityZhengzhou 450052China Science and Technology on Plasma Physics Laboratory Laser Fusion Research CenterChina Academy of Engineering PhysicsMianyang 621900China Laboratory of Microelectronic Devices and Integrated Technology Institute of MicroelectronicsChinese Academy of SciencesBeijing 100029China School of Engineering Physics Shenzhen Technology UniversityShenzhen 518118China Collaborative Innovation Center of Light Manipulations and Applications Shandong Normal UniversityJinan 250358China

Optical vortices(OVs) with unique square symmetry are widely used in various applications including particle manipulation,microscopy, and image processing. However, the undesired higher-order foci introduced by the conventional vortex lens such as square spiral zone plates(SSZPs) may lead to additional artifacts and thus degrade contrast sensitivity. In this endeavor, herein,we propose a methodology to combine the merit of SSZPs and the advantage of Gabor zone plates(GZPs) in establishing a specific single optical element, termed binary single focused square spiral zone plates(BSSZPs). In contrast to the abrupt transitions of the SSZPs, our central idea aims to realize the sinusoidal transmittance along the radial direction of SSZPs by a series of randomly distributed annulus-quadrangle-shaped nanometer structure apertures. The innovative design can simultaneously generate OVs with unique square symmetry, and eliminate the interference of higher-order foci along the propagation direction. Guided by our theoretical predication, the focusing property of such optics was further experimentally *** findings are expected to direct new avenue towards improving the performance of optical image processing and alignment system.

关键词： optical vortices higher-order diffraction spiral zone plates topological charges

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Full-Stokes metasurface polarimetry requiring only a single measurement

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Photonics Research 2024年第3期12卷 514-521页

作者： CHENGLONG ZHENG HUI LI JINGYU LIU MENGGUANG WANG huaping zang YAN ZHANG JIANQUAN YAO Key Laboratory of Material Physics Ministry of EducationSchool of Physics and MicroelectronicsZhengzhou UniversityZhengzhou 450052China Key Laboratory of Opto-Electronics Information Technology(Tianjin University) Ministry of EducationSchool of Precision Instruments and Opto-Electronics EngineeringTianjin UniversityTianjin 300072China Beijing Key Laboratory for Metamaterials and Devices Key Laboratory of Terahertz OptoelectronicsMinistry of Educationand Beijing Advanced Innovation Center for Imaging TechnologyDepartment of PhysicsCapital Normal UniversityBeijing 100048China State Key Laboratory of Modern Optical Instrumentation College of Optical Science and EngineeringZhejiang UniversityHangzhou 310027China

Polarization is crucial in various fields such as imaging,sensing,and substance detection.A compact,fast,and accurate polarization detection device is vital for these ***,we demonstrate a multifocus metalens for terahertz polarization detection that requires only a single measurement to obtain complete polarization parameters and reconstruct the polarization state of the incident *** individual subarrays of this metalens convert each of the six polarized components into the same polarization,which in turn links the Stokes parameters to these six *** incident linear polarizations and elliptical polarizations are characterized by Stokes parameters and polarization *** and experimental results show that the scheme can accurately detect the incident polarization with a single *** proposed metasurface polarimetry may find applications in the fields of real-time terahertz detection and integrated optics.

关键词： field incident polar

Terahertz metasurface polarization detection employing vortex pattern recognition

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Photonics Research 2023年第12期11卷 2256-2263页

作者： CHENGLONG ZHENG JINGYU LIU HUI LI MENGGUANG WANG huaping zang YAN ZHANG JIANQUAN YAO Key Laboratory of Material Physics Ministry of EducationSchool of Physics and MicroelectronicsZhengzhou UniversityZhengzhou 450052China Beijing Key Laboratory for Metamaterials and Devices Key Laboratory of Terahertz OptoelectronicsMinistry of Educationand Beijing AdvancedInnovation Center for Imaging TechnologyDepartment of PhysicsCapital Normal UniversityBeijing 100048China Key Laboratory of Opto-Electronics Information Technology(Tianjin University) Ministry of EducationSchool of Precision Instruments andOpto-Electronics EngineeringTianjin UniversityTianjin 300072China State Key Laboratory of Modern Optical Instrumentation College of Optical Science and EngineeringZhejiang UniversityHangzhou 310027China

The manipulation and detection of polarization states play a crucial role in the application of 6G terahertz ***,the development of compact and versatile polarization detection devices capable of detecting arbitrary polarizations continues to be a challenging ***,we demonstrate a terahertz polarization detection scheme by performing mode purity analysis and multidimensional analysis of the transmitted vortex *** power of the proposed polarization recognition is verified by using three polarization trajectories,including linear polarizations,circular polarizations,and elliptical *** the reconstructed complete polarization parameters,the detected polarization states are characterized using polarization ellipses,Poincarésphere,and full-Stokes *** experimental results validate the power of this scheme in polarization *** scheme holds promise for applications in polarization imaging and terahertz communication.

关键词： polarization scheme pattern

Highly sensitive diamond X-ray detector array for high-temperature applications

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Chip 2024年第3期3卷 43-49页

作者： Wenjie Dou Chaonan Lin Wei Fan Xun Yang Chao Fang huaping zang Shaoyi Wang Congxu Zhu Zhi Zheng Weimin Zhou Chongxin Shan Henan Key Laboratory of Diamond Optoelectronic Material and Devices Key Laboratory of Material PhysicsMinistry of EducationSchool of Physics and MicroelectronicsZhengzhou UniversityZhengzhou 450052China Science and Technology on Plasma Physics Laboratory Laser Fusion Research CenterChina Academy of Engineering PhysicsMianyang 621900China Key Laboratory of Micro-Nano Materials for Energy Storage and Conversion of Henan Province College of Chemical and Materials EngineeringXuchang UniversityXuchang 461000China Institute of Quantum Materials and Physics Henan Academy of SciencesZhengzhou450046China

Diamond is a highly suitable material for X-ray detectors that can function effectively in harsh environments due to its unique properties such as ultrawide bandgap,high radiation resistance,excellent carrier mobility as well as remarkable chemical and thermal ***,the sensitivity of diamond X-ray detectors needs further improvement due to the relatively low X-ray absorption efficiency of diamond,and the exploration of singlecrystal diamond array imaging still remains *** the current work,a 10310 X-ray photodetector array was constructed from single-crystal *** improve the sensitivity of the diamond X-ray detector,an asymmetric sandwich electrode structure was ***,trenches were created through laser cutting to prevent crosstalk between adjacent *** diamond X-ray detector array exhibits exceptional performance,including a low detection limit of 4.9 nGy s^(-1),a sensitivity of 14.3 mC Gy^(-1) cm^(-2),and a light-dark current ratio of 18,312,which are among the most favorable values ever reported for diamond X-ray ***,these diamond X-ray detectors can operate at high temperatures up to 450℃,making them suitable for development in harsh environments.

关键词： Diamond X-ray detector array X-ray imaging Sensi-tivity Detection limit

Generation of X-ray vortex with ultra-long depth of focus using axial line-focused spiral zone plates

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Chinese Optics Letters 2018年第8期16卷 12-16页

作者： huaping zang Chenglong Zheng Quanping Fan Chuanke Wang Lai Wei Leifeng Cao Xiangru Wang Erjun Liang School of Physics and Engineering Zhengzhou UniversityZhengzhou 450001China Research Center of Laser Fusion China Academy of Engineering PhysicsMianyang 621900China School of Optoelectronic Information University of Electronic Science and Technology of ChinaChengdu 610054China

We propose axial line-focused spiral zone plates （ALFSZPs） for generating tightly focused X-ray vortex beams with ultra-long depth of focus （DOF） along the propagation direction. In this typical design, compared with the conventional spiral zone plates （SZPs） under the same numerical aperture （NA）, the DOF of ALFSZPs has been extended to an ultra-length by optimizing the corresponding parameters. Besides, it also exhibits lower side lobes and smaller dark cores in the whole focus volume. The diameters of dark cores increase as the topological charge value increases.

关键词： Generation of X-ray vortex with ultra-long depth of focus using axial line-focused spiral zone plates

基于Bruggerman理论的双金属合金光学特性研究

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郑州大学学报（工学版） 2016年第6期37卷 15-18页

作者：范春珍臧华平牧凯军郑州大学物理工程学院河南郑州450001 新乡医学院第一附属医院河南新乡453100

双金属合金纳米颗粒基于杂化的表面等离子共振特性表现出优异的光学性能,因而利用Bruggerman理论研究双金属合金的光学调控特性,在准静态近似下计算双金属合金的光学消光系数、吸收系数、反射率和透射率,通过调节复合双金属合金的体积分... 详细信息

双金属合金纳米颗粒基于杂化的表面等离子共振特性表现出优异的光学性能,因而利用Bruggerman理论研究双金属合金的光学调控特性,在准静态近似下计算双金属合金的光学消光系数、吸收系数、反射率和透射率,通过调节复合双金属合金的体积分数,体系的共振峰得到有效调节.结果表明,该研究方法是一种简单、快速、有效的方法,不需要求解复杂的微分方程,仅仅通过改变体积分数和颗粒周围的介电常数即可以实现光谱的调节.

关键词：双金属合金表面等离子体共振调控性 Bruggerman理论反射率透射率

Performance analysis of single-focus phase singularity based on elliptical reflective annulus quadrangle-element coded spiral zone plates

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Chinese Physics B 2024年第1期33卷 441-448页

作者：臧华平王宝珍郑程龙魏来范全平王少义杨祖华周维民曹磊峰郭海中 Key Laboratory of Material Physics Ministry of EducationSchool of Physics and MicroelectronicsZhengzhou UniversityZhengzhou 450052China National Key Laboratory for Laser Fusion Research Center of Laser FusionChina Academy of Engineering PhysicsMianyang 621900China School of Engineering Physics Shenzhen Technology UniversityShenzhen 518118China

Optical vortices generated by the conventional vortex lens are usually disturbed by the undesired higher-order foci,which may lead to additional artifacts and thus degrade the contrast sensitivity. In this work, we propose an efficient methodology to combine the merit of elliptical reflective zone plates(ERZPs) and the advantage of spiral zone plates(SZPs) in establishing a specific single optical element, termed elliptical reflective annulus quadrangle-element coded spiral zone plates(ERAQSZPs) to generate single-focus phase singularity. Differing from the abrupt reflectance of the ERZPs, a series of randomly distributed nanometer apertures are adopted to realize the sinusoidal reflectance. Typically, according to our physical design, the ERAQSZPs are fabricated on a bulk substrate;therefore, the new idea can significantly reduce the difficulty in the fabrication process. Based on the Kirchhoff diffraction theory and convolution theorem, the focusing performance of ERAQSZPs is calculated. The results reveal that apart from the capability of generating optical vortices,ERAQSZPs can also integrate the function of focusing, energy selection, higher-order foci elimination, as well as high spectral resolution together. In addition, the focusing properties can be further improved by appropriately adjusting the parameters, such as zone number and the size of the consisted primitives. These findings are expected to direct a new direction toward improving the performance of optical capture, x-ray fluorescence spectra, and forbidden transition.

关键词： optical vortex single-focus spiral zone plate topological charges