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A fully electronic microfabricated gas chromatograph with complementary capacitive detectors for indoor pollutants

Microsystems & Nanoengineering 2016年第1期2卷 293-303页

作者： Yutao Qin yogesh B gianchandani Center for Wireless Integrated MicroSensing and Systems(WIMS2) University of MichiganAnn ArborMI 48109USA

This paper reports a complete micro gas chromatography(μGC)system in which all the components are lithographically microfabricated and electronically *** components include a bi-directional Knudsen pump,a preconcentrator,separation columns and a pair of capacitive gas detectors;together,these form the iGC3.c2 *** the fluidic components of the system are fabricated by a common three-mask lithographic *** Knudsen pump is a thermomolecular pump that provides air flow to theμGC without any moving *** film heaters embedded in the separation columns permit temperature *** capacitive detectors provide complementary response patterns,enhancing vapor recognition and resolving coeluting *** the components assembled on printed circuit boards,the system has a footprint of 8×10 cm^(2).Using room air as the carrier gas,the system is used to experimentally demonstrate the analysis of 19 chemicals with concentration levels on the order of parts per million(p.p.m.)and parts per billion(p.p.b.).The tested chemicals include alkanes,aromatic hydrocarbons,aldehydes,halogenated hydrocarbons and *** set of chemicals represents a variety of common indoor air pollutants,among which benzene,toluene and xylenes(BTX)are of particular interest.

关键词： Knudsen pump preconcentrator separation column gas sensor chemical sensing air monitoring BTX

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Resonant magnetoelastic microstructures for wireless actuation of liquid flow on 3D surfaces and use in glaucoma drainage implants

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Microsystems & Nanoengineering 2015年第1期1卷 26-34页

作者： Venkatram Pepakayala Joshua Stein yogesh gianchandani Center for Wireless Integrated MicroSensing and Systems(WIMS2) Department of Electrical Engineering and Computer ScienceUniversity of MichiganAnn ArborMIUSA Department of Ophthalmology and Visual Sciences University of MichiganAnn ArborMIUSA

Magnetoelastic resonators made from metal alloy foils are widely used for miniature wireless anti-theft tags and have also been explored for use in various sensing *** annealing within three-dimensional(3D)molds,these foils can be formed into curved ***,magnetoelastic materials present an opportunity for the development of a new class of wireless,actuators that have small form factors and low surface profiles and that can conform to curved *** paper describes passive,wireless,resonant magnetoelastic actuators intended for the generation of fluid flow on the surfaces of implantable Ahmed glaucoma drainage *** actuators are remotely excited to resonance using a magnetic field generated by external *** fluid flow is intended to limit cellular adhesion to the surface of the implant,as this adhesion can ultimately lead to implant encapsulation and *** actuators are micromachined from planar 29-μm-thick foils of Metglas 2826MB(Fe_(40)Ni_(38)Mo_(4)B_(18)),an amorphous magnetoelastic alloy,using photochemical *** 10.3×5.6 mm^(2),the planar structures are annealed in 3D molds to conform to the surface of the drainage device,which has an aspherical *** actuator designs are described,with varying shapes and resonant mode *** resonant frequencies for the different designs vary from 520 Hz to 4.7 *** velocities of up to 266μm s^(−1) are recorded at a wireless activation range of 25–30 mm,with peak actuator vibration amplitudes of 1.5μ*** actuators such as those described here have the potential to greatly enhance the effectiveness of glaucoma drainage devices at lowering eye pressure and may also be useful in other areas of medicine.

关键词： actuator fibrosis glaucoma magnetostriction Metglas

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