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超临界二氧化碳介质中晶圆清洗与选择性刻蚀研究进展

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化工学报 2024年第1期75卷 110-119页

作者：张泽欣郑伟中徐益升胡冬冬卓欣宇宗原孙伟振赵玲华东理工大学化学工程联合国家重点实验室上海200237

随着集成电路特征尺寸的逐渐减小,器件结构会要求更高的纵横比,常规湿法清洗由于表面张力很难进入晶圆深沟槽结构内部,不能满足更细线条工艺要求和高深宽比结构,直接影响沟槽内的污染物去除效果;常规湿法刻蚀各向异性差、结构坍塌严重... 详细信息

随着集成电路特征尺寸的逐渐减小,器件结构会要求更高的纵横比,常规湿法清洗由于表面张力很难进入晶圆深沟槽结构内部,不能满足更细线条工艺要求和高深宽比结构,直接影响沟槽内的污染物去除效果;常规湿法刻蚀各向异性差、结构坍塌严重、深沟槽刻蚀效果不明显;而等离子体干法刻蚀则存在刻蚀速率慢、光刻胶脱落和黏附、结构损伤、废气处理等一系列问题。超临界清洗和刻蚀技术是最具有前景的环境友好、无损伤技术,能够耦合刻蚀、清洗与干燥工艺为一体,且可以循环使用,安全环保,是晶圆制造过程中常规清洗和刻蚀的首选替代技术。综述了超临界二氧化碳中晶圆清洗与选择性刻蚀的研究进展,重点介绍了超临界二氧化碳共溶剂、微乳液体系在光刻胶剥离以及含硅基底选择性蚀刻中的应用,展望了超临界二氧化碳晶圆清洗和刻蚀存在的问题和发展趋势。

关键词：晶圆清洗晶圆刻蚀超临界二氧化碳超临界流体微乳液

聚苯乙烯/碳纳米管/纳米黏土导电复合材料的制备及性能

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工程塑料应用 2024年第2期52卷 1-8页

作者：张汉杰王秋峰魏浩然王杰徐益升范传杰华东理工大学化工学院上海200237 南通君江材料科技有限公司江苏南通226000

为了考察纳米黏土(NC)的引入对碳纳米管(CNTs)在聚苯乙烯(PS)树脂基体中分散的影响,使用NC作为非导电填料,通过熔融共混工艺制备了PS/CNTs/NC导电复合材料,探讨了NC与CNTs的含量及密炼时间对PS/CNTs/NC复合材料导电性能和力学性能的影... 详细信息

为了考察纳米黏土(NC)的引入对碳纳米管(CNTs)在聚苯乙烯(PS)树脂基体中分散的影响,使用NC作为非导电填料,通过熔融共混工艺制备了PS/CNTs/NC导电复合材料,探讨了NC与CNTs的含量及密炼时间对PS/CNTs/NC复合材料导电性能和力学性能的影响规律。扫描电子显微镜分析表明NC的加入减少了CNTs在PS基体中的团聚现象,并促使CNTs在较低添加量下形成了导电网状结构。复合材料的电阻率表征结果表明,在相同的CNTs含量下随着复合材料中NC含量的增加,体系电阻率呈现出逐渐减小趋势,并且在低CNTs添加量下,NC的引入促使体系电阻率降低的现象更明显,随着密炼时间的增加,体系电阻率呈现进一步减小的现象;力学性能表征结果表明,PS/CNTs/NC复合材料的拉伸性能总体上随着CNTs和NC含量的增加而增大,并且随着密炼时间的增加,复合材料拉伸强度最高可增加50.2%。NC与CNTs的质量比为1∶1时,可获得具有良好导电性能的复合材料。

关键词：导电聚合物复合材料聚苯乙烯碳纳米管导电网络

Formation mechanism of typical aromatic sulfuric anhydrides and their potential role in atmospheric nucleation process

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Journal of Environmental Sciences 2023年第1期123卷 54-64页

作者： Haijie Zhang Rui Gao Hong Li Yunfeng Li yisheng xu Fahe Chai State Key Laboratory of Environmental Criteria and Risk Assessment Chinese Research Academy of Environmental SciencesBeijing 100012China

Sulfuric anhydrides,generated from the cycloaddition reaction of SO3with carboxylic acids,have been revealed to be potential participants in the nucleation process of new particle formation(NPF).Hence the reaction mechanisms of typical aromatic acids(benzoic acid(BA),phenylacetic acid(PAA),phthalic acid(PA),isophthalic acid(mPA),and terephthalic acid(PTA))with SO3to generate the corresponding aromatic sulfuric anhydrides were investigated by density functional theory calculations at the level of M06-2X/6-311++G(3df,3pd).As a result,these reactions were found to be feasible in the gas phase with barriers of 0.34,0.30,0.18,0.08 and 0.12 kcal/mol to generate corresponding aromatic sulfuric anhydrides,*** thermodynamic stabilities of clusters containing aromatic sulfuric anhydrides and atmospheric nucleation precursors(sulfuric acid,ammonia and dimethylamine)were further analyzed to identify the potential role of aromatic sulfuric anhydrides in *** the thermodynamic stability of a cluster depends on both the number and strength of hydrogen bonds,the greater stability of the interactions between atmospheric nucleation precursors and aromatic sulfuric anhydrides than with aromatic acids make aromatic sulfuric anhydrides potential participators in the nucleation process of ***,compared with BA,the addition of a-CH_(2)-functional group in PAA has little influence on the reaction barrier with SO3but an inhibitive effect on the thermodynamic stability of *** position of the two-COOH functional groups in PA,m PA and PTA does not have a consistent impact on the reaction barrier with SO3or the thermodynamic stability.

关键词： New particle formation(NPF) Sulfuric anhydride Reaction mechanism Atmospheric clusters Thermodynamic stability

Highly dispersed CeO_(2-x)nanoparticles with rich oxygen vacancies enhance photocatalytic performance of g-C_(3)N_(4)toward methyl orange degradation under visible light irradiation

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Journal of Rare Earths 2022年第8期40卷 1255-1263页

作者： xuejun xu Tianhua Huang yisheng xu Huawen Hu Shuang Liao Xiaohong Hu Dongchu Chen Min Zhang School of Materials Science and Hydrogen Energy Foshan UniversityFoshan 528000China Guangdong Key Laboratory for Hydrogen Energy Technologies Foshan 528000China

CeO_(2)/g-C_(3)N_(4)photocatalysts have attracted tremendous attention in the photocatalytic degradation of organic *** design and construction of highly active CeO_(2)/g-C_(3)N_(4)photocatalysts without harsh conditions are still ***,highly dispersed CeO_(2-x)nanoparticles with rich oxygen vacancies were successfully precipitated on the surface of g-C_(3)N_(4)under mild *** fabricated CeO_(2-x)/g-C_(3)N_(4)exhibits remarkable activity and stability for photocatalytic degradation of MO *** optimal rate constant of MO degradation over CeO_(2-x)/g-C_(3)N_(4)is about 0.031 min^(-1),which is three times higher than that of g-C_(3)N_(4).A negligible activity decrease is observed after three cycling *** enhanced catalytic performance can be ascribed to the excellent dispersion of CeO_(2-x)with rich oxygen vacancies that benefit O_(2)adsorption and visible light *** addition,the proper band alignment between CeO_(2-x)and gC_(3)N_(4)is conducive to the highly efficient separation of photogenerated electron-hole pairs.

关键词： CeO_(2-x) G-C_(3)N_(4) Heterojunctions Oxygen vacancies Rare earths

Polymeric assembled nanoparticles through kinetic stabilization by confined impingement jets dilution mixer for fluorescence switching imaging

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Chinese Journal of Chemical Engineering 2023年第4期56卷 89-96页

作者： Jingran Liu Yue Wu Jie Tang Tao Wang Feng Ni Qiumin Wu Xijiao Yang Ayyaz Ahmad Naveed Ramzan yisheng xu State Key Laboratory of Chemical Engineering East China University of Science and TechnologyShanghai 200237China Shanghai Shyndec Pharmaceutical Co. LtdShanghai 200040China Department of Chemical Engineering Muhammad Nawaz Sharif University of Engineering and TechnologyMultanPakistan Faculty of Chemical Metallurgicaland Polymer EngineeringUniversity of Engineering&TechnologyLahorePakistan

Traditional fluorescence switching molecules achieving the state change between on and off states commonly based on UV irradiation. However, it is worth noting that UV irradiation is harmful to both the cancer cells and the normal cells. To achieve fluorescence switching under visible wavelength and avoid complicate molecular design, a fluorophore of 2,4,5,6-tetrakis(carbazol-9-yl)-1,3-dicyanobenzene(4Cz IPN) and a quencher of diarylethene(DAE) were physically incorporated within the biocompatible block copolymer poly(lactic-co-glycolic acid)-b-poly(ethylene glycol)(PLGA-b-PEG) to form 4Cz IPNDAE nanoparticles(NPs) through flash nanoprecipitation(FNP). By using the FNP method, the NPs were prepared within milliseconds in a confined impingement jets dilution(CIJ-D) mixer. Quenching and recovery of fluorescence could achieve in the presence of DAE under 475 nm and 560 nm *** structure and fluorescent properties of the nanoparticles can be tuned by external conditions for their efficient fluorescence resonance energy transfer(FRET) in a kinetic stabilization process. This NPs formation process was further optimized by varying the dilution ratio, Reynolds number(Re) and polymer concentration to modulate the mixing and particle nucleation and growth process. The size and fluorescence switching properties of the NPs were systematically investigated in solution and in cellular uptake experiments. This work is anticipated to provide a simple and highly effective engineering strategy for the modulation of fluorescence switching nanoparticles and beneficial to its engineering application.

关键词： Preparation Kinetic stabilization Flash nanoprecipitation Nanoparticles Fluorescence switch

高山地区夏季大气PM_(2.5)中元素的污染特征、生态风险及健康风险评估——以武当山为例

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环境化学 2024年第5期43卷 1573-1584页

作者：赵明升韩志勇任丽红李刚杨小阳赵刚韩慧霞杜虹萱高元官徐义生中国环境科学研究院环境基准与风险评估国家重点实验室北京100012 兰州理工大学石油化工学院兰州730050 华北理工大学矿业工程学院唐山063210

为了解华中高山地区夏季大气PM_(2.5)中元素的污染特征,于2018年6月在湖北省十堰市武当山国家空气质量监测站采集PM_(2.5)样品,利用电感耦合等离子体质谱仪(ICP-MS)测定样品中18种元素(Na、K、Ca、Mg、Al、Fe、V、Cr、Mo、Cu、Zn、Mn、N... 详细信息

为了解华中高山地区夏季大气PM_(2.5)中元素的污染特征,于2018年6月在湖北省十堰市武当山国家空气质量监测站采集PM_(2.5)样品,利用电感耦合等离子体质谱仪(ICP-MS)测定样品中18种元素(Na、K、Ca、Mg、Al、Fe、V、Cr、Mo、Cu、Zn、Mn、Ni、As、Se、Cd、Ba和Pb)的浓度,并探讨了其来源、生态风险和健康风险.结果表明,武当山PM_(2.5)的日均浓度范围为5.00—33.65μg·m^(-3),平均浓度为(16.84±7.07)μg·m^(-3);元素K、Na、Fe、Ca、Al、Mg和Zn的浓度较高,7种元素占所分析元素的97.68%以上;富集因子结果表明,Mo、Zn、Pb、Cd和Se的EF值高于100,可能受周边人为活动排放污染物的区域或长距离传输影响;主成分-多元线性回归(PCA-MLR)结果表明,PM_(2.5)中元素主要来自于燃煤和机动车(57.57%)、工业源(22.52%)和地壳(19.91%);武当山PM_(2.5)重金属的生态风险指数极高,其中Cd、Se和Mo的潜在生态危害程度极强;健康风险评估显示,综合非致癌风险(HI)在儿童和成人中分别为2.28×10-2和3.04×10-2,均在可接受水平内,综合致癌风险(CRT)在儿童和成人中分别为4.45×10-7和2.37×10-6,说明成人存在潜在的致癌风险;Cr在成人中的致癌风险为1.88×10-6,说明Cr在成人中存在潜在的致癌风险,同种金属对人体的非致癌风险和致癌风险均表现为成人>儿童.

关键词： PM_(2.5) 元素富集因子主成分-多元线性回归 (PCA-MLR) 生态风险健康风险评估

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外周血前白蛋白、hs-CRP、SAA、IL-6联合检测在小儿上呼吸道感染中的应用价值

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中国医学创新 2024年第21期21卷 128-131页

作者：邝春玲何六六黄梨华游晓燕徐奕胜赣南医学院第二附属医院检验科江西赣州341600 赣南医学院第二附属医院输血科江西赣州341600

目的:分析外周血前白蛋白(PAB)、超敏C反应蛋白(hs-CRP)、血清淀粉样蛋白A(SAA)、白细胞介素-6(IL-6)联合检测在小儿上呼吸道感染中的应用价值。方法:选取2023年3—9月于赣南医学院第二附属医院就诊的100例上呼吸道感染患儿作为研究对... 详细信息

目的:分析外周血前白蛋白(PAB)、超敏C反应蛋白(hs-CRP)、血清淀粉样蛋白A(SAA)、白细胞介素-6(IL-6)联合检测在小儿上呼吸道感染中的应用价值。方法:选取2023年3—9月于赣南医学院第二附属医院就诊的100例上呼吸道感染患儿作为研究对象。所有研究对象均检测外周血PAB、hs-CRP、SAA、IL-6,并根据小儿危重病例评分(PCIS)将患儿分为重度感染组、中度感染组和轻度感染组,比较各组外周血PAB、hs-CRP、SAA、IL-6水平,分析外周血PAB、hs-CRP、SAA、IL-6对小儿重度上呼吸道感染的诊断价值。结果:重度感染组外周血hs-CRP、SAA及IL-6水平均高于轻度感染组和中度感染组,PAB低于轻度感染组和中度感染组,中度感染组SAA、IL-6均高于轻度感染组(P<0.05);Pearson或Spearman相关性分析显示,在上呼吸道感染患儿中,PAB与PCIS评分呈显著负相关(P<0.05),hs-CRP、SAA及IL-6与PCIS评分均呈显著正相关(P<0.05);ROC曲线显示,PAB、hs-CRP、SAA、IL-6及联合诊断小儿上呼吸道重度感染的曲线下面积分别为0.654、0.740、0.928、0.783、0.962。结论:上呼吸道感染患儿PAB水平降低,hs-CRP、SAA、IL-6水平均升高,对重度上呼吸道感染具有较高诊断价值。

关键词：上呼吸道感染前白蛋白超敏C反应蛋白血清淀粉样蛋白A 白细胞介素-6

Theoretical study on the reaction mechanism of ozone addition to the double bonds of keto-limonene

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Journal of Environmental Sciences 2012年第1期24卷 147-151页

作者： Lei Jiang yisheng xu Baohui Yin Zhipeng Bai College of Environmental Sciences and Engineering Peking UniversityBeijing 100871China State Key Laboratory of Environmental Criteria and Risk Assessment Chinese Research Academy of Environmental SciencesBeijing 100012China

The reaction mechanism of ozone （O 3） addition to the double bonds of gas phase keto-limonene was investigated using ab initio *** different possibilities for O 3 addition to the double bond were considered and two corresponding van der Waals complexes （Complex 1 and Complex 2） were found for 1-endo and *** rate constants were calculated using the transition state theory at the CCSD（T）/6-31G（d）＋ CF//B3LYP/6-31G（d,p） *** high-pressure limit of the total rate constant at 298 K was 3.51×10-16 cm 3/（molecule·sec）,which was in a good agreement with the experimental data.

关键词： keto-limonene O3 transition state theory

Adipose-derived stem cell/FGF19-loaded microfluidic hydrogel microspheres for synergistic restoration of critical ischemic limb

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Bioactive Materials 2023年第9期27卷 394-408页

作者： Ruihan Wang Fangqian Wang Shan Lu Bin Gao Yuanqing Kan Tong Yuan yisheng xu Chen Yuan Daqiao Guo Weiguo Fu Xiaohua Yu Yi Si Department of Vascular Surgery Zhongshan Hospital Fudan UniversityShanghai200032PR China Institute of Vascular Surgery Fudan UniversityShanghai200032PR China National Clinical Research Center for Interventional Medicine Shanghai200032PR China Department of Orthopedics The Second Affiliated Hospital of Zhejiang University School of MedicineHangzhou310009ZhejiangPR China Key Laboratory of Motor System Disease Research and Precision Therapy of Zhejiang Province Hangzhou310000ZhejiangPR China State Key Laboratory of Chemical Engineering East China University of Science and TechnologyShanghai200237China

The efficacy of stem cell therapy is substantially compromised due to low cell survival rate and poor local retention post-delivery. These issues drastically limit the application of stem cells for ischemic limb therapy, which requires effective blood perfusion and skeletal muscle regeneration. Herein, based on microfluidic technology, an integrated stem cell and cytokine co-delivery system designed for functional ischemic limb salvage was constructed by first incorporating the myogenic cytokine, fibroblast growth factor 19 (FGF19), into microspheres composed of methacrylate gelatin (GelMA). Then adipose-derived stem cells (ADSCs) were highly absorbed into the porous structure of the microspheres, overcoming the insufficient loading efficiency and activities by conventional encapsulation strategy. The fabricated ADSCs/FGF19@μsphere system demonstrated a uniform size of about 180 μm and a highly porous structure with pore sizes between 20 and 40 μm. The resultant system allowed high doses of ADSCs to be precisely engrafted in the lesion and to survive, and achieved sustained FGF19 release in the ischemic region to facilitate myoblast recruitment and differentiation and myofibrils growth. Furthermore, the combination of ADSCs and FGF19 exhibited a positive synergistic effect which substantially improved the therapeutic benefit of angiogenesis and myogenesis, both in vitro and in vivo. In summary, a stem cell and cytokine co-delivery system with the properties of easy preparation and minimal invasiveness was designed to ensure highly efficient cell delivery, sustained cytokine release, and ultimately realizes effective treatment of ischemic limb regeneration.

关键词： Microfluidic technology Stem cell Cytokine Porous microspheres Ischemic limb salvage