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Porous-structure engineered spacer for high-throughput and rapidgrowth of high-quality graphene films

Nano Research 2022年第11期15卷 9741-9746页

作者： Ziteng Ma Heng Chen Xiaofeng Song Buhang Chen Qin li yanglizhi li Haiyang liu Kaicheng Jia Shenghong Huang Luzhao Sun Zhongfan liu Center for Nanochemistry Beijing Science and Engineering Center for NanocarbonsBeijing National Laboratory for Molecular SciencesCollege of Chemistry and Molecular EngineeringPeking UniversityBeijing 100871China Beijing Graphene Institute Beijing 100095China College of Materials Science and Technology Beijing University of Chemical TechnologyBeijing 100029China Academy for Advanced Interdisciplinary Studies Peking UniversityBeijing 100871China College of Energy Soochow Institute for Energy and Materials InnovationS(SIEMIS)Key Laboratory of Advanced Carbon Materials and Wearable Energy Technologies of Jiangsu ProvinceSoochow UniversitySuzhou 215006China CAS Key Laboratory of Mechanical Behavior and Design of Materials Department of Modern MechanicsUniversity of Science and Technology of ChinaHefei 230027China

Chemical vapor deposition(CVD)in conjunction with batch-to-batch manufacturing process is considered as the most promising technical route for mass-production of high-quality graphene films.To improve the space utilization of the CVD chamber and increase the throughput per batch,stacking of the Cu foil substrates is efficient,but suffers from the problems of adjacent fusion and the poor mass-transfer.Here,we demonstrate an efficient strategy for high-throughput and rapid growth of high-quality graphene by alternate stacking of Cu foils and porous carbon fiber paper(CFP).Relying on the unhindered mass-transfer through the pores of CFPs,full-covered high-quality graphene films on compact-stacked Cu foils were achieved within 2 min.Computational fluid dynamics(CFD)simulation and isotope labeling technique were performed to explore the gas diffusion and graphene growth process in the confined space of the Cu-CFP stacks.This work provides a feasible method for industrial production of graphene films,which may also be used for batch production of other two-dimensional materials.

关键词： graphene chemical vapor deposition fast growth high-throughput batch-to-batch production

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