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Science China(Technological Sciences) 2016年第10期59卷 1581-1590页

作者： yan yangyang XIONG Miao LIU Bin DING YingTao CHEN ZhiMing School of Information and Electronics Beijing Institute of Technology

Low-k and high aspect ratio blind through-silicon-vias （TSVs） to be applied in ＂via-last/backside via＂ 3-D integration paradigm were fabricated with polyimide dielectric liners formed by vacuum-assisted spin coating technique. MIS trench capacitors with diameter of-6 μm and depth of-54 μm were successfully fabricated with polyimide insulator step coverage better than 30%. C-V characteristics and leakage current properties of the MIS trench capacitor were evaluated under thermal treat- ment. Experimental results show that, the minimum capacitance density is around 4.82 nF/cm2, and the leakage current density after 30 cycles of thermal chock tests becomes stable and it is around 30 nA/cm2 under bias voltage of 20 V. It also shows that, the polyimide dielectric liner is with an excellent capability in constraining copper ion diffusion and mobile charges even un- der test temperature as high as 125℃. Finite element analysis results show that TSVs with polyimide dielectric liner are with lower risks in SiO2 interlayer dielectric （ILD） fracture and interfacial delamination along dielectric-silicon interface, thus, higher thermo-mechanical reliability can be expected.

关键词： low capacitance through-silicon-vias (TSVs) polyimide liner 3-D integration vacuum-assisted spin coating FEA

Effect of additional cylinders on power-extraction performance of a Savonius vertical-axis wind turbine

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Journal of Zhejiang University-Science A(Applied Physics & Engineering) 2023年第6期24卷 531-542页

作者： yangyang yan Jintao ZHANG Junao SHE Wenhao LIU Jianghong DENG Jianyang ZHU Institute of Robotics and Intelligent Systems Wuhan University of Science and TechnologyWuhan 430081China Key Laboratory of Metallurgical Equipment and Control Technology Ministry of EducationWuhan University of Science and TechnologyWuhan 430081China

To improve the power-extraction performance of the Savonius vertical-axis wind turbine(S-VAWT),additional cylinders,which are used to control the fluid flow around the wind turbine blade,were introduced into the blade *** contrast to the traditional numerical method,a mathematical model in the form of a dynamical system was used in this study.A numerical calculation program that could effectively solve the equations of wind-induced rotation of S-VAWT was developed,and combined with the Taguchi experimental method to investigate the influence of additional cylinders on the power-extraction characteristics of the *** results showed that the additional cylinders have a significant impact on the power-extraction performance of the *** 4-m/s wind speed,the average power coefficient of the S-VAWT with additional cylinders is 15%higher than that of the conventional *** construction of the wind turbine prototype and power-extraction tests,the results showed that compared with a conventional S-VAWT,the output power was 29%higher for the S-VAWT with additional cylinders under the same particular conditions.

关键词： Additional cylinders Taguchi experimental method Savonius vertical-axis wind turbine(S-VAWT) Average power coefficient Wind-induced rotation

Evaluation on Fabrication and Properties of Composite Polyurethane Coatings with Wollastonite Partially Substituting for Rutile Titanium Dioxide

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Transactions of Tianjin University 2019年第3期25卷 293-300页

作者： Xiaojing Wang Wei Zhang yangyang yan Jing Wang Xiyao Wang School of Chemical Engineering and Technology Tianjin University School of Environmental Science and Engineering Tianjin University

This study aims to prepare a composite polyurethane coating through a facile synthesis process. Titanium dioxide, which is a component of the prepared hydroxyl acrylic resin polyurethane varnish, was partially substituted by wollastonite, and an optimal substitution ratio was obtained. Analyses based on scanning electron microscope, powder X-ray diffraction, and Raman scattering measurements demonstrated that the addition of wollastonite caused nearly no change in the basic structure of the coating. Coating with a substitution ratio of 25% showed high thermal stability, good cover effect, considerable moisture-proof and water resistance ability, great acidic and basic resistance, and improved performance and hardness in performance tests. Furthermore, the production cost was reduced significantly at this substitution ratio.

关键词： Polyurethane coating Wollastonite Rutile titanium dioxide Hydroxyl acrylic acid Thermal stability

Investigation on mechanism of polymer filling in high-aspect-ratio trenches for through-silicon-via(TSV) application

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Science China(Technological Sciences) 2014年第8期57卷 1616-1625页

作者： DING YingTao yan yangyang CHEN QianWen WANG ShiWei CHEN Xiu CHEN Yueyang School of Information and Electronics Beijing Institute of Technology

Vacuum-assisted spin-coating is an effective polymer filling technology for sidewall insulating of through-silicon-via(TSV).This paper investigated the flow mechanism of the vacuum-assisted polymer filling process based on experiments and numerical simulation,and studied the effect of vacuum pressure,viscosity of polymer and aspect-ratio of trench on the filling performance.A 2D axisymmetric model,consisting of polymer partially filled into the trench and void at the bottom of trench,was developed for the computational fluid dynamics(CFD)*** simulation results indicate that the vacuum-assisted polymer filling process goes through four stages,including bubble formation,bubble burst,air elimination and polymer ***,the simulation results suggest that the pressure significantly affects the bubble formation and the polymer re-filling procedure,and the polymer viscosity and the trench aspect-ratio influence the duration of air elimination.

关键词： through-silicon-via (TSV) vacuum process polymer filling computational fluid dynamics (CFD)

An acquisition system of digital nuclear signal processing for the algorithm development

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Nuclear Science and Techniques 2013年第6期24卷 115-121页

作者： WANG Peng ZHANG Ruanyu yan yangyang HAO Dejian HUANG Ning WU Qingxing AN Zhu Institute of Nuclear Science and Technology of Sichuan University Key Laboratory of Radiation Physics and TechnologyMinistry of Education The College of Physics Science and Technology of Sichuan University

A principle and method of constructing the digital acquisition system is presented in this work,which is convenient for the study on the theories and algorithms of digital nuclear signal *** hardware system of the digital acquisition system consists of front-end controller,waveform digitizer and PC workstation,on which the software system has been developed based on Visual C++under Windows *** alterable-frequency sampling(AFS)algorithm and the alterable-frequency trapezoidal filter(AFTF)algorithm have also been studied in the real-time environment,along with a digital nuclear spectrum acquisition system being set up based on the new algorithms and theγ-ray spectra of 241Am being shown.A useful experimental platform could be provided by this work for the successive work such as the development of global digitized nuclear measurement system and the study of digital nuclear signal processing.

关键词：数字信号处理数字采集系统研究开发算法 Windows环境波形数字转换器可变频率前端控制器

Fabrication of Intracranial Vascular Nitinol Alloy Stents with Improved Mechanical Property and Endothelialization Function

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Acta Metallurgica Sinica(English Letters) 2022年第12期35卷 2069-2081页

作者： yangyang yan Na Li Feng Guo Anhua Wu Wei Jin Rui yang Yun Bai Xing Zhang Shi-Changxu Innovation Center for Advanced Materials Institute of Metal ResearchChinese Academy of SciencesShenyang 110016China School of Materials Science and Engineering University of Science and Technology of ChinaShenyang 110016China College of Life Science and Engineering Shenyang UniversityShenyang 110044China Department of Neurosurgery The First Affi liated Hospital of China Medical UniversityShenyang 110001China

Intracranial vascular stenting has been widely used for ischemic ***,there are complication risks with stent implantation,such as poor wall apposition,stent migration,thromboembolism and stent restenosis,due to the mismatched radial force and conformability of the stents."Therefore,a novel intracranial vascular nitinol stent was fabricated in order to improve mechanical property and endothelialization *** bending moment of the stents was calculated to be 0.346 N mm,which shows improved *** radial force of the stents evaluated by the flat plate test was0.0112 N/mm,within the range of the commercially available stent force(0.0065-0.0116 N/mm).Furthermore,the TyrIle-Gly-Ser-Arg(YIGSR)peptide derived from laminin was grafted onto the stent surfaces to promote endothelialization on vascular stents evaluated by the proliferation,adhesion and migration of human umbilical vein endothelial cells in *** nitinol stents with improved mechanical property and endothelialization function are expected to reduce the recurrence risk of ischemic stroke after implantation.

关键词： Nitinol stents Conformability Radial force Endothelialization Intracranial stenosis treatment

A robust lateral shift free(LSF)electrothermal micromirror with flexible multimorph beams

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Microsystems & Nanoengineering 2023年第4期9卷 303-314页

作者： Hengzhang yang Anrun Ren Yingtao Ding Lei Xiao Teng Pan yangyang yan Wenlong Jiao Huikai Xie School of Integrated Circuits and Electronics Beijing Institute of TechnologyBeijing 100081China BIT Chongqing Institute of Microelectronics and Microsystems Chongqing 400030China

Electrothermal bimorph-based scanning micromirrors typically employ standard silicon dioxide(SiO_(2))as the electrothermal isolation ***,due to the brittle nature of SiO_(2),such micromirrors may be incapable to survive even slight collisions,which greatly limits their application *** improve the robustness of electrothermal micromirrors,a polymer material is incorporated and partially replaces SiO_(2) as the electrothermal isolation and anchor *** particular,photosensitive polyimide(PSPI)is used,which also simplifies the fabrication ***,PSPIbased electrothermal micromirrors have been designed,fabricated,and *** PSPI-type micromirrors achieved an optical scan angle of±19.6°and a vertical displacement of 370μm at only 4 *** a mirror aperture size of 1 mm×1 mm,the PSPI-type micromirrors survived over 200 g accelerations from either vertical or lateral directions in impact *** the drop test,the PSPI-type micromirrors survived falls to a hard floor from heights up to 21 *** the standard frequency sweeping vibration test,the PSPI-type micromirrors survived 21 g and 29 g acceleration in the vertical and lateral vibrations,*** all these tests,the PSPI-type micromirrors demonstrated at least 4 times better robustness than SiO_(2)-type micromirrors fabricated in the same batch.

关键词： mirror acceleration replace

An ultra-deep TSV technique enabled by the dual catalysis-based electroless plating of combined barrier and seed layers

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Microsystems & Nanoengineering 2024年第3期10卷 409-419页

作者： Yuwen Su Yingtao Ding Lei Xiao Ziyue Zhang yangyang yan Zhifang Liu Zhiming Chen Huikai Xie School of Integrated Circuits and Electronics Beijing Institute of TechnologyBeijingChina Chongqing Institute of Microelectronics and Microsystems Beijing Institute of TechnologyChongqingChina

Silicon interposers embedded with ultra-deep through-silicon vias(TSVs)are in great demand for the heterogeneous integration and packaging of opto-electronic chiplets and microelectromechanical systems(MEMS)*** the cost-effective and reliable manufacturing of ultra-deep TSVs,the formation of continuous barrier and seed layers remains a crucial challenge to ***,we present a novel dual catalysis-based electroless plating(ELP)technique by tailoring polyimide(PI)liner surfaces to fabricate dense combined Ni barrier/seed layers in ultradeep *** additional to the conventional acid catalysis procedure,a prior catalytic step in an alkaline environment is proposed to hydrolyze the PI surface into a polyamide acid(PAA)interfacial layer,resulting in additional catalysts and the formation of a dense Ni layer that can function as both a barrier layer and a seed layer,particularly at the bottom of the deep *** with depths larger than 500μm and no voids are successfully fabricated in this *** fabrication process involves low costs and *** a fabricated 530-μm-deep TSV with a diameter of 70μm,the measured depletion capacitance and leakage current are approximately 1.3 pF and 1.7 pA at 20 V,respectively,indicating good electrical *** proposed fabrication strategy can provide a cost-effective and feasible solution to the challenge of manufacturing ultra-deep TSVs for modern 3D heterogeneous integration and packaging applications.

关键词： properties catalysis alkaline

Triboelectric-electromagnetic hybrid generator with swing-blade structures for effectively harvesting distributed wind energy in urban environments

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Nano Research 2023年第9期16卷 11621-11629页

作者： yangyang yan Jinzhi Zhu Yuejun Zhang Zhaohui Wang Lin Jiang Zhong Lin Wang Jianyang Zhu Tinghai Cheng Key Laboratory of Metallurgical Equipment and Control Technology Ministry of Education Wuhan University of Science and TechnologyWuhan 430081China Beijing Institute of Nanoenergy and Nanosystems Chinese Academy of SciencesBeijing 101400China Georgia Institute of Technology AtlantaGA 30332-0245USA Faculty of Electrical Engineering and Computer Science Ningbo UniversityNingbo 315211China

The wind energy in cities cannot be exploited effectively because natural wind is unstable and ***,a triboelectricelectromagnetic hybrid generator with swing-blade structures(SBS-TEHG)was designed to effectively harvest intermittent and continuous wind energy in an urban ***,the spring structure and base were considered to realize the maximum output performance of triboelectric ***,the computational fluid dynamics method was applied to optimize the structure of the SBS-TEHG to improve its aerodynamic *** starting wind speed of the SBS-TEHG was 2 m/s,and its energy conversion efficiency was 9.04%,159%higher than that of the SBS-TEHG without guide plates at 4 m/*** results demonstrated that the SBS-TEHG lit 105 light-emitting diodes(LEDs)under the intermittent-wind harvesting mode at a wind frequency of 1 Hz when the single swing blade operated,while a wireless PM_(2.5)&PM_(10)sensor was powered by the SBS-TEHG after a period of operation under the continuous-wind harvesting *** findings of this study provide a novel solution for lowspeed wind energy harvesting in cities and demonstrate the potential of SBS-TEHG as a distributed energy source.

关键词： triboelectric nanogenerator swing-blade structure low-speed wind energy computational fluid dynamics distributed energy source

A Flower Image Classification Algorithm Based on Saliency Map and PCANet

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通讯和计算机（中英文版） 2019年第1期15卷 14-24页

作者： yan yangyang Fu Xiang Institute of Computer Vision Nanchang Hang Kong UniversityNanchangChina

Flower Image Classification is a Fine-Grained Classification *** main difficulty of Fine-Grained Classification is the large inter-class similarity and the inner-class *** this paper,we propose a new algorithm based on Saliency Map and PCANet to overcome the *** algorithm mainly consists of two parts:flower region selection,flower feature *** first part,we combine saliency map with gray-scale map to select flower *** second part,we use the flower region as input to train the PCANet which is a simple deep learning network for learning flower feature automatically,then a 102-way softmax layer that follow the PCANet achieve *** approach achieves 84.12%accuracy on Oxford 17 Flowers *** results show that a combination of Saliency Map and simple deep learning network PCANet can applies to flower image classification problem.

关键词： Saliency map PCANet deep learning flower image classification