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基于硅MEMS技术的高灵敏度微型光纤法布里-珀罗压力传感器

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光子学报 2024年第5期53卷 149-157页

作者：李文豪贾平岗王军薛波万顺侯凯耀熊继军中北大学仪器与电子学院省部共建动态测试技术国家重点实验室太原030051

基于微机电系统技术设计制备了一种微型化光纤法布里-珀罗传感器,具备高灵敏度和可批量制造的特点。传感器内部的法珀腔由刻蚀后的SOI晶圆与BF33玻璃阳极键合而成,传感器敏感膜片采用了绝缘衬底上的单晶硅材料。采用激光精细切割技术对... 详细信息

基于微机电系统技术设计制备了一种微型化光纤法布里-珀罗传感器,具备高灵敏度和可批量制造的特点。传感器内部的法珀腔由刻蚀后的SOI晶圆与BF33玻璃阳极键合而成,传感器敏感膜片采用了绝缘衬底上的单晶硅材料。采用激光精细切割技术对传感器单元进行独立分离,使得单个传感器的整体外径仅为400μm,高度为220μm。在此基础上,搭建了信号解调实验平台,并对传感器的感压特性进行了详尽测试。测试结果显示,在0~50 kPa的压力范围内,传感器的压力灵敏度可达到18.5 nm/kPa,最大非线性度为0.47%,重复性为0.18%,迟滞为0.18%。此外,该传感器具有体积小、灵敏度高、电磁兼容、生物兼容以及稳定性强等优点,在生物医学和医疗领域具备巨大的商业转化价值。

关键词：光纤传感器法布里-珀罗微型化压力测量微机电系统

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基于FBG传感器的卫星天线形变重构技术

红外与激光工程 2024年第6期53卷 135-145页

作者：赵继春李元浩宋育苗安国文贾平岗熊继军中北大学省部共建动态测试技术国家重点实验室山西太原030051

针对由温度变化和外界机械载荷等因素引起的卫星天线结构形变重构需求,提出了一种基于光纤布拉格光栅(FBG)传感器的可视化形变重构技术。利用非金属封装材料和聚酰亚胺光纤光栅制备了FBG应变传感器和温度传感器进行应变与温度的测量,采... 详细信息

针对由温度变化和外界机械载荷等因素引起的卫星天线结构形变重构需求,提出了一种基于光纤布拉格光栅(FBG)传感器的可视化形变重构技术。利用非金属封装材料和聚酰亚胺光纤光栅制备了FBG应变传感器和温度传感器进行应变与温度的测量,采用光纤传感解调系统实现结构的形变重构。搭建了变温环境天线结构模拟试件形变重构测试平台,采用激光测距仪完成对比测试。研究结果表明,通过相同工艺制备的FBG传感器具有很好的一致性,常温下FBG传感测量的误差小于5.94%,变温环境下的测量误差小于6.97%。重构后的曲面能够真实反映模拟试件的形变情况,验证了该系统的有效性。该技术在卫星天线结构形变重构领域中有良好的应用前景。

关键词：形变重构 FBG传感器应变检测温度解耦卫星天线

100 GHz双频带通腔体滤波器的设计及制作工艺研究

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传感技术学报 2024年第3期37卷 416-422页

作者：冯伟雷程秦瑞杰张斌珍段俊萍熊继军中北大学仪器与电子学院省部共建动态测试技术国家重点实验室山西太原030051

针对当前双频或多频带通滤波器主要以30 GHz以内的工作范围为主,在高频毫米波范围内以单频超宽带设计为主这一现象,设计出一款可以在100 GHz~103 GHz工作范围内存在两个超窄带工作带宽的双频腔体滤波器。两个工作频段分别为100.67 GHz~1... 详细信息

针对当前双频或多频带通滤波器主要以30 GHz以内的工作范围为主,在高频毫米波范围内以单频超宽带设计为主这一现象,设计出一款可以在100 GHz~103 GHz工作范围内存在两个超窄带工作带宽的双频腔体滤波器。两个工作频段分别为100.67 GHz~101.36 GHz和102.67 GHz~102.78 GHz,与之对应的相对带宽分别为0.68%和0.11%。所设计腔体滤波器采用UV-LIGA工艺完成其样品的制备,并使用由矢量网络分析仪和扩频模块所搭建的测试平台完成测试,经测试,相对带宽的绝对误差分别为0.19%和0.02%。

关键词：腔体滤波器双频 UV-LIGA工艺非谐振节点超窄带

Wireless passive flexible accelerometer fabricated using micro-electro-mechanical system technology for bending structure surfaces

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Frontiers of Information Technology & Electronic Engineering 2022年第5期23卷 801-809页

作者： Chen LI Mangu JIA Yingping HONG Yanan XUE jijun xiong Science and Technology on Electronic Test and Measurement Laboratory North University of ChinaTaiyuan 030051China Key Laboratory of Instrumentation Science and Dynamic Measurement Ministry of EducationNorth University of ChinaTaiyuan 030051China

We propose an inductor-capacitor(LC)wireless passive flexible accelerometer,which eliminates the difficulty in measuring the acceleration on the surface of a bending *** accelerometer is composed of a flexible polyimide(PI)substrate and a planar spiral inductance coil(thickness 300 nm),made using micro-electro-mechanical system(MEMS)*** can be bent or folded at will,and can be attached firmly to the surface of objects with a bending *** principle of radio frequency wireless transmission is used to measure the acceleration signal by changing the distance between the accelerometer and the *** with other accelerometers with a lead wire,the accelerometer can prevent the lead from falling off in the course of vibration,thereby prolonging its service *** establishment of an experimental platform,when the distance between the antenna and accelerometer was 5 mm,the characterization of the surface of bending structures demonstrated the sensing capabilities of the accelerometer at accelerations of 20-100 m/*** results indicate that the acceleration and peak-to-peak output voltage were nearly linear,with accelerometer sensitivity reaching 0.27 mV/(m·s-2).Moreover,the maximum error of the accelerometer was less than 0.037%.

关键词： Bending structure surfaces Flexible accelerometer Micro-electro-mechanical system(MEMS)technology Wireless non-contact measurement

An Arc Tangent Function Demodulation Method of Fiber-Optic Fabry-Perot High-Temperature Pressure Sensor

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Photonic Sensors 2017年第3期7卷 211-216页

作者： Qianyu REN Junhong LI Yingping HONG Pinggang JIA jijun xiong Science and Technology on Electronic Test & Measurement Laboratory North University of China Taiyuan 030051 China Key Laboratory Instrumentation Science & Dynamic Measurement Ministry of Education North University of China Taiyuan 030051 China Department of Automation Shanxi University 030006 China

A new demodulation algorithm of the fiber-optic Fabry-Perot cavity length based on the phase generated carrier （PGC） is proposed in this paper, which can be applied in the high-temperature pressure sensor. This new algorithm based on arc tangent function outputs two orthogonal signals by utilizing an optical system, which is designed based on the field-programmable gate array （FPGA） to overcome the range limit of the original PGC arc tangent function demodulation algorithm. The simulation and analysis are also carried on. According to the analysis of demodulation speed and precision, the simulation of different numbers of sampling points, and measurement results of the pressure sensor, the arc tangent function demodulation method has good demodulation results： 1 MHz processing speed of single data and less than 1% error showing practical feasibility in the fiber-optic Fabry-Perot cavity length demodulation of the Fabry-Perot high-temperature pressure sensor.

关键词： Arc tangent Fabry-Perot demodulation pressure sensor

All-SiC Fiber-Optic Sensor Based on Direct Wafer Bonding for High Temperature Pressure Sensing

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Photonic Sensors 2022年第2期12卷 130-139页

作者： Ting LIANG Wangwang LI Cheng LEI Yongwei LI Zhiqiang LI jijun xiong Science and Technology on Electronic Test&Measurement Laboratory North University of ChinaTaiyuan 030051China Department of Physics Taiyuan Normal UniversityJinzhong 030619China Institute of Computational and Applied Physics Taiyuan Normal UniversityJinzhong 030619China

This paper presents an all-SiC fiber-optic Fabry-Perot(FP)pressure sensor based on the hydrophilic direct bonding technology for the applications in the harsh *** operating principle,fabrication,interface characteristics,and pressure response test of the proposed all-SiC pressure sensor are *** FP cavity is formed by hermetically direct bonding of two-layer SiC wafers,including a thinned SiC diaphragm and a SiC wafer with an etched *** light interference is used for the detection and demodulation of the sensor pressure *** results demonstrate the sensing capabilities for the pressure range up to 800 *** all-SiC structure without any intermediate layer can avoid the sensor failure caused by the thermal expansion coefficient mismatch and therefore has a great potential for pressure measurement in high temperature environments.

关键词： SiC pressure sensor optical-fiber high temperature direct bonding

A Phase Readout Method for Wireless Passive Sensor Used in Pressure Measurement System

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Chinese Journal of Electronics 2015年第4期24卷 702-708页

作者： HONG Yingping LIANG Ting ZHENG Tingli ZHANG Hairui LIU Wenyi xiong jijun Key Laboratory of Instrumentation Science & Dynamic Measurement Ministry of Education North University of China Science and Technology on Electronic Test & Measurement Laboratory North University of China

A phase difference detection method used for reading the resonant frequency through mutual coupling is designed to meet the pressure measurement in harsh environments, and a testing device of integrated modular by developing the hardware circuits is *** and discussion of the novel theoretical model in the phase readout system is presented, and a pressure test platform based on the phase difference detection is also established, which is to measure the frequency of a LC resonant sensor on the basis of 96% alumina ceramic substrate. The experimental results show that the proposed phase difference readout system presents sweep-frequency detection in the range of 1–100MHz bandwidth, and a high frequency resolution of 0.006 MHz. Sensitivity of the sensor is approximately 0.225 MHz/bar from 1 bar to 2 bar. The accuracy and functionality of the phase readout system have emphasized a wider engineering application range, so that we can make it possible that the wireless passive LC resonant sensor revolves well in practical engineering occasions outside the laboratory environment.

关键词： LC resonant sensor Resonant frequency Phase difference detection Pressure test

Nanopillar-forest based surface-enhanced Raman scattering substrates

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Science China(Information Sciences) 2014年第8期57卷 230-237页

作者： BAO AiDa MAO HaiYang xiong jijun CHEN ZhuoJie OU Wen CHEN DaPeng MOE Key Laboratory of Instrumentation Science & Dynamic Measurement North University of China School of Information and Electronics Beijing Institute of Technology Key Laboratory of Microelectronics Devices & Integrated Technology Institute of MicroelectronicsChinese Academy of Sciences National Key Laboratory of Science and Technology on Micro/Nano Fabrication Institute of MicroelectronicsPeking University

In this work,nanopillar-forest based surface-enhanced Raman scattering substrates were fabricated using a novel *** key technique of the approach is taking advantage of convexes on Poly-Si surfaces as support structures in sidewall *** tip-diameters of the fabricated nanopillars are from 5 to 10 nm,heights are of several microns,and density of the nanopillar-based forests is around 20/μ*** these nanopillar forests,there are plenty of nanoscale *** covered with a thin layer of noble metal,the nanopillar forests exhibit a high SERS-active *** measurement results demonstrate that the nanopillar-forest based SERS substrates have an enhancement factor of an order of 4.62×*** is expected that such SERS substrates may have applications in biological monitoring and chemical detection.

关键词： surface-enhanced Raman scattering(SERS) nanopillar forests sidewall technology Poly-Si films electromagnetic field distributions

A Novel Readout System for Wireless Passive Pressure Sensors

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Photonic Sensors 2014年第1期4卷 70-76页

作者： Huixin Zhang Yingping Hong Binger Ge Ting Liang jijun xiong Key Laboratory of Instrumentation Science&Dynamic Measurement(North University of China) Ministry of EducationTaiyuan030051China Ministry of Education and Science Technology on Electronic Test&Measurement Laboratory Department of Electronic Science and technologyNorth University of ChinaTaiyuan030051China

This paper presents a novel readout system for wireless passive pressure sensors based on the inductively coupled inductor and cavity （LC） resonant circuits. The proposed system consists of a reader antenna inductively coupled to the sensor circuit, a readout circuit, and a personal computer （PC） post processing unit. The readout circuit generates a voltage signal representing the sensor＇s capacitance. The frequency of the reader antenna driving signal is a constant, which is equal to the sensor＇s resonant frequency at zero pressure. Based on mechanical and electrical modeling, the pressure sensor design based on the high temperature co-fired ceramic （HTCC） technology is conducted and discussed. The functionality and accuracy of the readout system are tested with a voltage-capacitance measurement system and demonstrated in a realistic pressure measurement environment, so that the overall performance and the feasibility of the readout system are proved.

关键词： Wireless passive pressure sensors LC resonant circuits HTCC inductive coupling