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Improvement of High Dynamic Range Capacitive Displacement Sensor by a Globalm Planarization

Journal of Sensor Technology 2011年第4期1卷 99-107页

作者： Daesil Kang wonkyu moon 不详

This study presents an improvement of high dynamic range contact-type capacitive displacement sensor by applying planarization. The sensor is called the contact-type linear encoder-like capacitive displacement sensor (CLECDiS), is a nano-meter-resolution sensor with a wide dynamic range. However, height differences due to patterned electrodes may cause a variety of problems or performance degradation. In devices of two glass wafer surfaces with patterned structures assembled face-to-face and in sliding contact, the heights of the patterns crucially affect their performance and practicality, so it should be planarized for reducing the problem. A number of techniques for planarizing glass wafer surfaces with patterned chrome electrodes were evaluated and the following three were selected as adequate: lift-off, etch-back, and chemical mechanical polishing (CMP). The fabricated samples showed that CMP provided the best planarization. CMP was successfully employed to produce CLECDiS with improved signal reliability due to reduced collisions between electrodes.

关键词： High Dynamic Range Capacitive Displacement Sensor Planarization Contact Method

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Power Efficiency Calculation of Acoustic Energy Transmission by a Stepped-Plate Radiator

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Energy and Power Engineering 2017年第4期9卷 232-240页

作者： Yonghwan Hwang wonkyu moon Department of Mechanical Engineering Pohang University of Science and Technology Pohang Korea

One performance measure of in-air ultrasonic radiators, such as wireless power transmission, is the power efficiency of the transducers. The efficiency of most in-air acoustic radiators is low, even at ultrasonic frequencies;however, a large radiating plate with steps introduced by Gallego-Juarez et al., can provide efficient radiation. Their in-air acoustic radiator consists of a Langevin transducer for wave excitation, a mechanical amplifier, and a stepped plate with a large radiating area. This study describes a design processing technique for a stepped-plate radiator developed for optimum energy transmission at the target point in air. The total efficiency required to transfer the acoustic energy was divided into three categories, and the design parameters of each category were calculated to maximize the efficiency. This design technique allows optimum acoustic radiation efficiency and maximum acoustic energy transmission depending on various acoustic energy transfer conditions.

关键词： Stepped-Plate Radiator Maximum Radiation Efficiency Acoustic Energy Transmission

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