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Stratospheric Ozone Detection Using a Photon Stimulated Ozone Sensor Based on Indium Oxide Nanoparticles

Journal of Environmental Protection 2011年第8期2卷 1108-1112页

作者： Chunyu Wang Robert Willi Becker Otmar Kappeler volker cimalla Michael Matthes Jens Mundhenke 不详

Stratospheric ozone is normally measured using stationary equipments, such as a Dobson spectrometer and filter ozonometer, which have the disadvantages of large size, high price and high cost for operation and maintenance. In this work, a balloon-borne photostimulated ozone sensor based on indium oxide nanoparticles has been developed to measure stratospheric ozone. Using the remote compact energy-saving room-temperature ozone sensor, a vertical distribution of ozone concentration with a high resolution was obtained, and the ozone concentration at ~ 27 km over sea level between Lake Constance, Germany and Lake Zurich, Switzerland was determined to be ~ 5.6 ppm.

关键词： Stratospheric Ozone Photon Stimulation Indium Oxide Nanoparticles

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Densification of Thin Aluminum Oxide Films by Thermal Treatments

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Materials Sciences and Applications 2014年第8期5卷 628-638页

作者： V. cimalla M. Baeumler L. Kirste M. Prescher B. Christian T. Passow F. Benkhelifa F. Bernhardt G. Eichapfel M. Himmerlich S. Krischok J. Pezoldt Fraunhofer Institute for Applied Solid State Physics Freiburg Germany Institute of Micro- and Nanoelectronics Ilmenau University of Technology Ilmenau Germany Institute of Physics Ilmenau University of Technology Ilmenau Germany

Thin AlOx films were grown on 4H-SiC by plasma-assisted atomic layer deposition (ALD) and plasma assisted electron-beam evaporation at 300°C. After deposition, the films were annealed in nitrogen at temperatures between 500°C and 1050°C. The films were analyzed by X-ray reflectivity (XRR) and atomic force microscopy (AFM) in order to determine film thickness, surface roughness and density of the AlOx layer. No differences were found in the behavior of AlOx films upon annealing for the two different employed deposition techniques. Annealing results in film densification, which is most prominent above the crystallization temperature (800°C). In addition to the increasing density, a mass loss of ~5% was determined and attributed to the presence of aluminum oxyhydroxide in as deposited films. All changes in film properties after high temperature annealing appear to be independent of the deposition technique.

关键词： Atomic Layer Deposition Crystallization Thermal Treatment Aluminum Oxide

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