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激光诱导放电等离子体极紫外辐射的模拟

物理学报 2024年第1期73卷 258-265页

作者：王均武玄洪文俞航航王新兵 vassily s.zakharov 广东大湾区空天信息研究院广州510700 华中科技大学武汉国家光电研究中心武汉430074 凯尔迪什应用数学研究所莫斯科125047 中国科学院大学北京100049

极紫外光刻是目前新一代超高集成度半导体芯片制造流程中重要的一环,激光诱导放电等离子体是极紫外光源产生的重要技术手段之一.本文基于全局状态方程、原子结构计算程序、碰撞辐射模型建立了一个辐射磁流体力学模型,对激光诱导放电等... 详细信息

极紫外光刻是目前新一代超高集成度半导体芯片制造流程中重要的一环,激光诱导放电等离子体是极紫外光源产生的重要技术手段之一.本文基于全局状态方程、原子结构计算程序、碰撞辐射模型建立了一个辐射磁流体力学模型,对激光诱导放电等离子体的动力学特性及极紫外的辐射特性进行模拟,模拟复现了放电过程中的箍缩现象,得到的极紫外光的转化效率与实验符合.研究发现放电电流的上升速率对极紫外光的产生有极大的影响,该结果对后续极紫外光输出功率、转化效率以及光谱纯度的提升有重要的指导意义.

关键词：辐射磁流体力学激光诱导放电等离子体碰撞辐射模型极紫外光

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Micro-pinch formation and extreme ultraviolet emission of laser-induced discharge plasma

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Chinese Physics B 2021年第9期30卷 355-363页

作者：王均武王新兵左都罗 vassily s.zakharov Wuhan National Research Center for Optoelectronics Huazhong University of Science and TechnologyWuhan 430074China Keldysh Institute of Applied Mathematics Russian Academy of SciencesMoscowRussia

Extreme ultraviolet(EUV)source produced by laser-induced discharge plasma(LDP)is a potential technical means in inspection and metrology.A pulsed Nd:YAG laser is focused on a tin plate to produce an initial plasma thereby triggering a discharge between high-voltage electrodes in a vacuum *** process of micro-pinch formation during the current rising is recorded by a time-resolved intensified charge couple device *** evolution of electron temperature and density of LDP are obtained by optical emission *** extreme ultraviolet spectrometer is built up to investigate the EUV spectrum of sn LDP at 13.5 *** laser and discharge parameters such as laser energy,voltage,gap distance,and anode shape can influence the EUV emission.

关键词： laser-induced discharge plasma micro-pinch electron temperature and density extreme ultraviolet spectra

Laser-induced liquid tin discharge plasma and its EUV spectra

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Chinese Optics Letters 2020年第5期18卷 40-43页

作者：王均武王新兵左都罗 vassily zakharov Wuhan National Research Center for Optoelectronics Huazhong University of Science and TechnologyWuhan 430074China Keldysh Institute of Applied Mathematics Russian Academy of SciencesMoscow 125047Russia

Laser-induced discharge plasmas(LDPs) have the potential to be inspection and metrology sources in extreme ultraviolet(EUV) lithography. An LDP EUV source was developed to avoid tin electrode erosion in which a tin pool was used as a cathode. A CO2 pulse laser was focused on the liquid tin target surface, and then a breakdown occurred in a very short time. The voltage-current characteristics of the discharge oscillated, lasting for several microseconds, and an RLC fitting model was used to obtain the inductance and resistance. An intensified chargecoupled device(ICCD) camera was used to investigate the dynamics of LDP, which can explain the formation of a discharge channel. The EUV spectra of laser-induced liquid tin discharge plasma were detected by a grazing incident ultraviolet spectrometer, compared with a laser-produced tin droplet plasma EUV spectrum. To explain the EUV spectrum difference of laser-induced liquid tin discharge plasma and laser-produced tin droplet plasma,the collision radiation(CR) model combined with COWAN code was used to fit the experimental EUV spectrum, which can estimate the electron temperature and density of the plasma.

关键词： laser induced discharge plasma voltage-current characteristics liquid tin plasma plume extreme ultraviolet spectra

simultaneous multiple time scale imaging for kHz-MHz high-speed accelerometry

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Photonics Research 2022年第7期10卷 1712-1722页

作者： vassily KORNIENKO DAVID ANDERssON MEHDI sTITI JONAs RAVELID sIMON EK ANDREAs EHN EDOUARD BERROCAL ELIAs KRIsTENssON Division of Combustion Physics Department of PhysicsLund UniversityLundSweden

Fast transient events,such as the disintegration of liquid bodies or chemical reactions between radical species,involve various processes that may occur at different time ***,there are two alternatives for monitoring such events:burst-or high-speed *** imaging at ultrahigh speeds(~100 MHz to THz)allows for the capture of nature's fastest processes but only for a narrowly confined period of time and at a repetition rate of~10 *** long lasting,rapidly evolving transient events requires a significantly higher repetition rate,which is met by existing~kHz to 1 MHz high-speed imaging ***,the use of such systems eliminates the possibility to observe dynamics occurring on the sub-microsecond time *** this paper,we present a solution to this technological gap by combining multiplexed imaging with high-speed sensor technology,resulting in temporally resolved,high-spatial-resolution image series at two simultaneous time *** further demonstrate how the collection of such data opens up the tracking of rapidly evolving structures up to MHz burst rates over long durations,allowing,for the first time,to our knowledge,the extraction of acceleration fields acting upon the liquid bodies of an atomizing spray in two dimensions at k Hz frame rates.

关键词： repetition high transient

Evolutionary history of mountain voles of the subgenus Aschizomys (Cricetidae, Rodentia), inferred from mitochondrial and nuclear markers

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Integrative Zoology 2020年第3期15卷 187-201页

作者： semen Yu.BODROV Vera K.VAsILJEVA Innokentiy M.OKHLOPKOV Nikolai V.MAMAYEV Evgeniy s.zakharov Alexey Yu OLEINIKOV Evgeniy A.GENELT-YANOVsKIY Natalia I.ABRAMsON Zoological Institute Russian Academy of SciencesSaint PetersburgRussia Institute for Biological Problems of Cryolithozone YakutskSakha Republic(Yakutia)Russia Institute of Water and Ecological Problems KhabarovskRussia saint-Petersburg scientific Center RAs Saint PetersburgRussia

In this study,we present an assessment of the evolutionary history and phylogenetic relationships of Asian mountain voles of the subgenus Aschizomys,genus Alticola,based on extensive sampling and phylogenetic analyses of data from mitochondrial and nuclear *** species of this subgenus are widespread in the mountain areas of north-eastern ***,both their distribution and taxonomic borders remained questionable for more than 100 *** study showed discordance in the phylogenetic patterns between nuclear and mtDNA *** found that mtDNA in *** is paraphyletic relative to ***,but nuclear markers demonstrated reciprocal *** to species distribution modeling,ranges of *** and *** experienced a secondary contact during the Last Glacial Maximum(approximately 22 kyr BP),and thus a hybridization event seems plausible during that *** tree analyses recovered a sister group relationship between the two species of the Aschizomys subgenus,with an estimated divergence date of around 0.8 *** results provided good support for currently recognized subspecies within both *** and *** based on mitochondrial and nuclear datasets.A new,yet undescribed form,supposedly of a subspecific status within ***,was found in the Bureinskiy Range in the Khabarovsk *** finding expands the current species distribution range further to the southeast.

关键词： Asian mountain voles Aschizomys phylogeny taxonomy species tree species distribution modeling

Detection of diabetic retinopathy in its early stages using textural features of optical coherence tomography angiography

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Journal of Innovative Optical Health sciences 2022年第1期15卷 156-165页

作者： W.Gao B.Li s.Chen Y.shi P.Lin O.O.Myakinin V.P.zakharov school of safety Engineering Ningbo University of Technology Ningbo P.R.China Department of Ophthalmology Ningbo First Hospital NingboP.R.China Department of Laser and Biotechnical systems samara University SamaraRussian Federation

The aim of this study is to detect whether the quantitative textural features of optical coherencetomography angiography (OCTA) images can be used to detect the eyes in the early stage ofdiabetic retinopathy (DR) from eyes with diabetes and no DR (NDR). Textural features includingfractal dimension, contrast, correlation, entropy, energy, and homogeneity were calculatedfrom the OCTA images. The student's t-test was performed to identify the textural featuresthat can be able to detect DR in the early stage. The area under the receiver operating characteristic(AUROC) curves, sensitivity, and specicity were calculated between the study *** results indicated that the fractal dimension in ICP and sVP and the correlation in sVCshowed the statistical signicance between mild NPDR patients and NDR patients. The ROCanalysis results showed that the AUROC of the fractal dimension in ICP was 0.736 with 0.773sensitivity and 0.700 specicity. The cuto® point in ICP was 2.616. The OCTA-based fractaldimension was able to discriminate diabetic eyes with early retinopathy from healthy and NDRwith higher sensitivity and specicity. The OCTA-based correlation showed the power to differentiatethe mild NPDR eyes from the normal healthy and diabetic eyes. These results suggestthat texture-based features of OCTA have the potential to assist in the assessment of therapeuticinterventions to prevent early DR in diabetic subjects.

关键词： Optical coherence tomography angiography texture fractal dimension diabetic retinopathy

Adaptive Grids in simulations of Toroidal Plasma starting from Magneto-Hydrodynamic Equilibrium

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Plasma science and Technology 2015年第2期17卷 97-104页

作者：李旭静 L.E.zakharov s.A.GALKIN Institute of Computational Mathematics and scientific/Engineering Computing Academy of Mathematics and Systems ScienceChinese Academy of Sciences Princeton Plasma Physics Laboratory FAR-TECH Inc. 10350 Science Center Dr.Bld 14St 150San DiegoCA 92121USA

This paper introduces the notion of Tokamak Magneto-Hydrodynamics （TMHD）, which explicitly reflects the anisotropy of a high temperature tokamak plasma. The set of TMHD equations is formulated for simulation of macroscopic plasma dynamics and disruptions in tokamaks. Free from the Courant restriction on the time step, this set of equations is adequate to plasma dynamics with realistic parameters of high performance plasmas and does not require any extension of the MHD plasma model. At the same time, TMHD requires the use of magnetic field aligned numerical grids. Examples of their use in 2-dimensional cases of tokamak equilibria and dynamics of the wall touching kink mode are presented. For the 3-dimensional case of an ergodic magnetic field, this paper introduces the reference magnetic coordinates as a practical algorithm for generating adaptive grids for TMHD.

关键词： tokamak magneto-hydrodynamics disruptions numerical simulations adaprive grid

significance of Caucasian sections for Working out Carbon-Isotope standard for Upper Permian and Lower Triassic (Induan) and Their Correlation with the Permian of North-Eastern Russia

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Journal of China University of Geosciences 2005年第2期16卷 141-151页

作者： Yuri D zakharov Alexander s Biakov Aymon Baud Heinz Kozur Far Eastern Geological Institute Russian Academy of Sciences (Far Eastern Branch) Vladivostok 690022 Russia North-East Interdisciplinary Scientific Research InstituteRussian Academy of Sciences (Far Eastern Branch)Magadan 685000 RussiaMusee de GeologieBFSH2-UNI 1015 Lausanne Switzerland Rézsü u. 83H-1029 Budapest Hungary

Data obtained on conodont distribution in the Permian-Triassic sovetashen section of Transcaucasia provide further limitations on the age of the carbon-isotopic anomalies discovered by Baud et al. (1989). The significance of Caucasian sections for working out the carbon-isotope standard for the Upper Permian and Lower Triassic (Induan) is shown. Original data on carbon-isotope composition of bivalve and brachiopod shells from Permian sediments of North-Eastern Russia (Omolon and Okhotsk areas) have been obtained, which may be used for their correlation.

关键词： Armenia North-Eastern Russia Permian Triassic conodonts ammonoids bivalves brachiopods isotopic composition paleotemperatures correlation

Effects of low temperatures on strength and power input into rock failure

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Research in Cold and Arid Regions 2014年第5期6卷 455-460页

作者： Evgenii V.zakharov Alexander s.Kurilko Federal state Academic Institution "Chersky Mining Institute of the North" Siberian Branch of the Russian Academy of Sciences

study results of low temperature effects on the strength index and specific power input into rock failure are *** has been experimentally determined that within the range of-5 °С to-15 °С,there is a local minimum at which the compression strength and specific power input into failure of some rocks are 10%-50% lower than those at positive temperatures.

关键词： strength power input into failure low temperatures carbonate rocks kimberlite porosity