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Nonlinear ionization dynamics of hot dense plasma observed in a laser-plasma amplifier

Light(Science & Applications) 2020年第1期9卷 196-203页

作者： F.Tuitje P.Martinez Gil T.Helk J.Gautier F.Tissandier J.-P.Goddet A.Guggenmos u.kleineberg S.Sebban E.Oliva C.Spielmann M.Zurch Institute for Optics and Quantum Electronics Abbe Center of PhotonicsUniversity of JenaJenaGermany Helmholtz Institute Jena JenaGermany Departamento de Ingenieria Energetica and Instituto de Fusion Nuclear“Guillermo Velarde” ETSI IndustrialesUniversidad Politecnica de MadridMadridSpain Laboratoire d’Optique Appliquee ENSTA ParisEcole PolytechniqueCNRSInstitut Polytechnique de ParisPalaiseauFrance Department for Physics Ludwig-Maximilian-University MunichGarchingGermany ultra Fast Innovations GmbH GarchingGermany Fritz Haber Institute of the Max Planck Society BerlinGermany Department of Chemistry University of California at BerkeleyBerkeleyCAUSA Materials Sciences Division Lawrence Berkeley National LaboratoryBerkeleyCAUSA

understanding the behaviour of matter under conditions of extreme temperature,pressure,density and electromagnetic fields has profound effects on our understanding of cosmologic objects and the formation of the universe.Lacking direct access to such objects,our interpretation of observed data mainly relies on theoretical models.However,such models,which need to encompass nuclear physics,atomic physics and plasma physics over a huge dynamic range in the dimensions of energy and time,can only provide reliable information if we can benchmark them to experiments under well-defined laboratory conditions.Due to the plethora of effects occurring in this kind of highly excited matter,characterizing isolated dynamics or obtaining direct insight remains challenging.High-density plasmas are turbulent and opaque for radiation below the plasma frequency and allow only near-surface insight into ionization processes with visible wavelengths.Here,the output of a high-harmonic seeded laser-plasma amplifier using eightfold ionized krypton as the gain medium operating at a 32.8 nm wavelength is ptychographically imaged.A complexvalued wavefront is observed in the extreme ultraviolet(XuV)beam with high resolution.Ab initio spatio-temporal Maxwell–Bloch simulations show excellent agreement with the experimental observations,revealing overionization of krypton in the plasma channel due to nonlinear laser-plasma interactions,successfully validating this four-dimensional multiscale model.This constitutes the first experimental observation of the laser ion abundance reshaping a laserplasma amplifier.The presented approach shows the possibility of directly modelling light-plasma interactions in extreme conditions,such as those present during the early times of the universe,with direct experimental verification.

关键词： extreme ionization dynamics

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Application of Reactive Ion Etching to the Fabrication of Microstructure on Mo/Si Multilayer

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Chinese Physics Letters 1999年第9期16卷 665-666页

作者：乐孜纯 L.Dreeskornfeld S.Rahn R.Segler u.kleineberg u.Heinzmann Institute of Atomic and Molecular Physics Jilin UniversityChangchun 130012 Fakultät für Physik Universität BielefeldUniversitatsstraβe 25D-33615 BielefeldGermany

Mo/Si muitilayer mirrors(30 periods,doublelayer thickness 7nm)with the AZ-PF514 resist pattern whose smallest lines and spaces structure was 0.5pm were etched by reactive ion etching(RIE)in a fluorinated plasma.The etch rate,selectivity and etch profile were investigated as a function of the gas mixture,pressure,and plasma rf power.The groove depth and the etch proHle were investigated by an atomic force microscope before RIE,after RIE and after resist removal.

关键词： Mo/Si smallest selectivity

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