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tunable high-Q SAW resonator loaded on a changing capacitance

Journal of Advanced Dielectrics 2020年第1期10卷 55-60页

作者： G.Ya.Karapetyan V.E.Kaydashev M.E.Kutepov t.a.minasyan V.A.Kalinin V.O.Kislitsyn E.M.Kaidashev Laboratory of Nanomaterials Southern Federal University Stachki 200/1344090 Rostov-on-DonRussia Moscow Institute of Physics and technology 9 Institutskiy per. 141701 DolgoprudnyRussia LLC StC“RUS” 199178Saint-Petersburg Maly av.V.I.54built 5

A tunable high-Q surface acoustic wave(SAW)resonator in the form of several parallel-connected interdigital transducers loaded on a varying capacitance on lithium niobate substrates was developed and *** working frequency range was 90-2450 MHz.A method of calculating such resonators,considering losses in the metal film as well as losses due to the propagation of SAWs and transformations into bulk waves is *** a design allows one to obtain a quality factor over 5000 in the frequency range 2400-2483 *** resonant frequency shifts by 600 kHz when the capacitance changes by±25%of the value of 21 pF(or 32 ppm/pF)and has an almost linear character.

关键词： Crystal growth directional crystallization defects internal stresses analytical methods

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Embedding epitaxial VO_(2)film with quality metal-insulator transition to SAW devices

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Journal of Advanced Dielectrics 2022年第5期12卷 53-59页

作者： M.E.Kutepov §,G.Ya.Karapetyan t.a.minasyan V.E.Kaydashev I.V.Lisnevskaya K.G.Abdulvakhidov A.A.Kozmin E.M.Kaidashev Laboratory of Nanomaterials Southern Federal University200/1 Stachki Ave.344090 Rostov-on-DonRussia Department of Chemistry Southern Federal University7 Zorge St.344090 Rostov-on-DonRussia Smart Materials Research Institute Southern Federal University178/24 Sladkova St.344090 Rostov-on-DonRussia

Epitaxial VO_(2)films grown by pulsed laser deposition(PLD)method with superior phase transition related switching characteristics are successfully embedded to SAW devices using concept of the“impedance loaded SAW sensor”.A resistance of VO2 sensor abruptly drops from 0.7 MΩto 90Ωwhen it is heated above~65℃and shows a narrow hysteresis loops when *** designs of SAW devices are examined in which RF signal is reflected back from interdigital transducer(IDt)or a surface acoustic waves(SAW)is transferred through a coupler and the RF response is altered 2 and 3 times correspondingly upon the phase transition in *** the proposed devices with external load,a SAW does not propagate via VO2 film and therefore is not attenuated which is beneficiary for wireless ***,a SAW phase shift as great as 50°is induced to the SAW transferred through the coupler due to the phase transition in *** proposed approach may boost the development of remotely controlled autonomous sensors,including those based on VO2 metamaterials and hybrid plasmonic structures for near IR/middle IR and sub-tHz/tHz applications.

关键词： Surface acoustic wave SAW pulsed laser deposition PLD VO_(2) epitaxial film.

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