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Microsystems & Nanoengineering 2023年第2期9卷 227-248页

作者： Niels Quack Alain Yuji Takabayashi Hamed Sttari Pieirre Edinger Gaehun Jo simon jbleker Carlos Errando-Herranz Kristinn BGylfason Frank Niklaus Umar Khan Peter Verheyen Arun Kumar Malik Jun Su Lee Moises Jezzini Padraic Morrissey Cleitus Antony Peter O'Brien Wim Bogaertso Ecole Polytechnique Federale de Lausanne(EPFL) 1015 LausanneSwitzerland school of Aerospace Mechanical and Mechatronic EngineeringThe University of SydneyCamperdownNSW 2006Australia swiss Center for Electronics and Microtechnology(CSEM) 2002 NeuchatelSwitzerland Division of Micro and Nanosystems KTH Royal Institute of Technology11428 StockholmSweden Department of Information Technology Photonics Research GroupGhent University-IMECTechnologiepark-Zwijnaarde 1269052 GentBelgium imec vzw.3DSIP Department Si Photonics GroupKapeldreef 753001 LeuvenBelgium Tyndall National Institute Lee Maltings Complex Dyke ParadeCork T12 R5CPIreland

Silicon photonics has emerged as a mature technology that is expected to play a key role in critical emerging applications,including very high data rate optical communications,distance sensing for autonomous vehicles,photonic-accelerated computing,and quantum information *** success of silicon photonics has been enabled by the unique combination of performance,high yield,and high-volume capacity that can only be achieved by standardizing manufacturing ***,standardized silicon photonics technology platforms implemented by foundries provide access to optimized library components,including low-loss optical routing,fast modulation,continuous tuning,high-speed germanium photodiodes,and high-effciency optical and electrical ***,silicon's relatively weak electro-optic effects result in modulators with a significant footprint and thermo-optic tuning devices that require high power consumption,which are substantial impediments for very large-scale integration in silicon *** systems(MEMS)technology can enhance silicon photonics with building blocks that are compact,low-loss,broadband,fast and require very low power ***,we introduce a silicon photonic MEMS platform consisting of high-performance nano-opto-electromechanical devices fully integrated alongside standard silicon photonics foundry components,with wafer-level sealing for long-term reliability,flip-chip bonding to redistribution interposers,and fibre-array attachment for high port count optical and electrical *** experimental demonstration of fundamental silicon photonic MEMS circuit elements,including power couplers,phase shifters and wavelength-division multiplexing devices using standardized technology lifts previous impediments to enable scaling to very large photonic integrated circuits for applications in telecommunications,neuromorphic computing,sensing,programmable photonics,and quantum computing.

关键词： tuning sealing photonics

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