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Ultra-simplified diffraction-based computational spectrometer

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Light(Science & Applications) 2024年第6期13卷 1022-1031页

作者： Chuangchuang Chen Honggang Gu shiyuan liu State Key Laboratory of Intelligent Manufacturing Equipment and Technology Huazhong University of Science and TechnologyWuhanHubei430074China Optics Valley Laboratory WuhanHubei430074China

Miniaturizing spectrometers for compact and cost-effective mobile platforms is a major challenge in current spectroscopy research,where conventional spectrometers are impractical due to their bulky *** miniaturized designs primarily rely on precalibrated response functions of nanophotonic structures to encode spectral information captured in a snapshot by detector *** spectrum reconstruction is achieved through computational techniques,but this requires precise component design,high-precision fabrication,and *** propose an ultra-simplified computational spectrometer that employs a one-to-broadband diffraction decomposition strategy facilitated by a numerical regularized transform that depends only on the spectrum of the diffracted *** key feature of our design is the use of a simple,arbitrarily shaped pinhole as the partial disperser,eliminating the need for complex encoding designs and full spectrum *** spectrometer achieves a reconstructed spectral peak location accuracy of better than 1 nm over a 200 nm bandwidth and excellent resolution for peaks separated by 3 nm in a bimodal spectrum,all within a compact footprint of under half an ***,our approach also reveals a breakthrough in broadband coherent diffractive imaging without requiring any prior knowledge of the broadband illumination spectrum,assumptions of non-dispersive specimens,or correction for detector quantum efficiency.

关键词： simplified spectrum illumination

Pixelated non-volatile programmable photonic integrated circuits with 20-level intermediate states

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International Journal of Extreme Manufacturing 2024年第3期6卷 477-487页

作者： Wenyu Chen shiyuan liu Jinlong Zhu State Key Laboratory of Intelligent Manufacturing Equipment and Technology Huazhong University of Science and TechnologyWuhan 430074People’s Republic of China Optics Valley Laboratory WuhanHubei 430074People’s Republic of China

Multi-level programmable photonic integrated circuits(PICs)and optical metasurfaces have gained widespread attention in many fields,such as neuromorphic photonics,opticalcommunications,and quantum *** this paper,we propose pixelated programmable Si_(3)N_(4)PICs with record-high 20-level intermediate states at 785 nm *** flexibility in phase or amplitude modulation is achieved by a programmable Sb_(2)S_(3)matrix,the footprint of whose elements can be as small as 1.2μm,limited only by the optical diffraction limit of anin-house developed pulsed laser writing *** believe our work lays the foundation for laser-writing ultra-high-level(20 levels and even more)programmable photonic systems and metasurfaces based on phase change materials,which could catalyze diverse applications such as programmable neuromorphic photonics,biosensing,optical computing,photonic quantum computing,and reconfigurable metasurfaces.

关键词： programmable photonic integrated circuits phase change materials multi-level intermediate states metasurfaces

A simple path to ambient temperature ionic H^(-)superconductors

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Science China Chemistry 2024年第1期67卷 321-322页

作者： Bingru liu shiyuan liu Jianglan Shui School of Materials Science and Engineering Beihang UniversityBeijing 100191China

Hydride ion(H^(-))has high polarizability(α_(H^(-))=10.17A^(3))and high redox potential(H^(-)/H_(2):-2.3 V),and therefore is an attractive energy carrier[1,2].The H^(-)superconductors play a crucial role in the devel... 详细信息

关键词： attractive ambient superconductors

Advanced Mueller matrix ellipsometry:Instrumentation and emerging applications

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Science China(Technological Sciences) 2022年第9期65卷 2007-2030页

作者： CHEN XiuGuo GU HongGang liu JiaMin CHEN Chao liu shiyuan State Key Laboratory of Digital Manufacturing Equipment and Technology Huazhong University of Science and TechnologyWuhan 430074China Optics Valley Laboratory Wuhan 430074China

Mueller matrix ellipsometry(MME)provides the 4×4 Mueller matrix of a sample under test,which determines how the state of polarization is changed as light interacts with the *** to the redundant information contained in the Mueller matrix,MME has gained more and more extensive applications in the characterization of surfaces,interfaces,thin films,and *** addition,the instrumentation of MME has also achieved great developments since its advent in the 1970 *** this paper,we will first review the basic principle as well as the common system layouts of MME for the full Mueller matrix ***,the basic procedure of ellipsometry data analysis is *** that,some new developments in MME in our lab for different applications are introduced,including the broadband MME,the high-resolution imaging MME,and the high-speed *** emerging applications of the developed MMEs are also *** and perspectives of the advanced ellipsometry are finally drawn and discussed.

关键词： ellipsometry Mueller matrix Mueller matrix ellipsometry imaging ellipsometry high-speed ellipsometry

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Efficient measurement and optical proximity correction modeling to catch lithography pattern shift issues of arbitrarily distributed hole layer

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Frontiers of Mechanical Engineering 2024年第4期19卷 45-54页

作者： Yaobin FENG Jiamin liu Zhiyang SONG Hao JIANG shiyuan liu State Key Laboratory of Inteligent Manufacturing Equipment and Technology Huazhong University of Science and TechnologyWuhan 430074China Optics Valley Laboratory Wuhan 430074China

With the continued shrinking of the critical dimensions(CDs)of wafer patterning,the requirements for modeling precision in optical proximity correction(OPC)increase *** requirement extends beyond CD controlling accuracy to include pattern alignment accuracy because misalignment can lead to considerable overlay and metal-via coverage issues at advanced nodes,affecting process window and *** paper proposes an efficient OPC modeling approach that prioritizes pattern-shift-related elements to tackle the issue *** method integrates careful measurement selection,the implementation of pattern-shift-aware structures in design,and the manipulation of the cost function during model tuning to establish a robust *** experiments are performed on a via layer fabricated using a negative tone *** demonstrate that pattern shifts can be constrained within a range of+1 nm,remarkably better than the original range of±3 ***,simulations reveal notable differences between post OPC and original masks when considering pattern shifts at locations sensitive to this *** validation confirms the accuracy of the proposed modeling approach,and a firm consistency is observed between the simulation results and experimental data obtained from actual design structures.

关键词： computational lithography optical proximity correction modeling pattern shift metrology

Kinetic study of complicated anti-solvent and cooling crystallization of disodium 5′-ribonucleotide

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Particuology 2023年第2期73卷 103-112页

作者： Wang Zhao Binghui Li shiyuan liu Yuehua Deng Rui Zhang Yanbin Jiang Guangdong Provincial Key Lab of Green Chemical Product Technology School of Chemistry and Chemical EngineeringSouth China University of TechnologyGuangzhou510640China Zhuhai Institute of Modern Industrial Innovation South China University of TechnologyZhuhai519175China School of Chemical Engineering Guangdong University of Petrochemical TechnologyMaoming525000China

Disodium 5′-ribonucleotide,which is composed of disodium 5′-inosine(IMP)and disodium 5′-guanosine(GMP),is an important food *** lack of kinetic studies of it causes a lack of clarity in understanding the complicated multi-solute crystallization of IMP+GMP in *** this work,process analytical technology tools were used to obtain the thermodynamics and kinetic data from the experiments,the kinetic parameters of anti-solvent and cooling crystallization were *** crystal form of IMP+GMP mixed crystal was determined,which was consistent with the IMP whether crystallized from pure water or *** effects of different anti-solvent addition rates and cooling rates on the metastable zone widths were studied,and the opposite effect on metastable zone width was *** modified exponential empirical function was developed to correlate nucleation and growth kinetic equations under different *** kinetic data were well fitted with adjusted correlation coefficient(adj-R^(2)>0.7),which is sufficient to provide a valid reference for process design and control.

关键词： Disodium 5′-ribonucleotide Multi-solute crystallization Nucleation and growth kinetics Process analytical technology tools Metastable zone widthMixed crystal

Hole mobility enhancement in monolayer WSe2 p-type transistors through molecular doping

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Science China(Information Sciences) 2024年第6期67卷 207-213页

作者： shiyuan liu Xiong XIONG Xin WANG Xinhang SHI Ru HUANG Yanqing WU School of Integrated Circuits and Beijing Advanced Innovation Center for Integrated Circuits Peking University Wuhan National High Magnetic Field Center and School of Integrated Circuits Huazhong University of Science and Technology

Two-dimensional （2D） transition metal dichalcogenide （TMDC） semiconductor materials exhibit extraordinary electrical properties,holding promise for the realization of next-generation complementary metal-oxide-semiconductor （CMOS） devices at ultimate ***,constrained by effective device doping strategies,the hole mobility and device performance of tungsten diselenide （WSe2） p-type transistors,especially monolayer chemical vapor deposition （CVD）-grown WSe2,have not met *** this paper,an effective performance enhancement of monolayer WSe2p-type transistor was achieved through a molecular doping *** monolayer WSe2directly on SiO2back-gated substrates and leveraging energy band alignment design,4-nitrobenzenediazonium tetrafluoroborate （4-NBD） molecular dopant with a concentration of 10 m M was utilized to modulate the Fermi level position of monolayer WSe2for hole *** devices demonstrated a more than 98%increase in hole mobility,reaching up to 97 cm2·V-1·s-1while maintaining the current on/off ratio of *** p-type WSe2transistors with 1μm channel length exhibit a high drive current surpassing 176μA·μm-1,exceeding previous CVD-WSe2devices with similar channel *** straightforward and effective approach to improving the electrical performance of WSe2transistors paves the way for advanced logic technologies based on transition metal dichalcogenide semiconductors.

关键词： CVD-grown WSe2 molecular doping 4-NBD p-type transistors hole mobility

DISTRIBUTED MONITORING SYSTEM RELIABILITY ESTIMATION WITH CONSIDERATION OF STATISTICAL UNCERTAINTY

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Chinese Journal of Mechanical Engineering 2005年第4期18卷 519-524页

作者： Yi Pengxing Yang Shuzi Du Runsheng Wu Bo liu shiyuan School of Mechanical Science and Engineering Huazhong University of Science and Technology Wuhan 430074 China

Taking into account the whole system structure and the component reliability estimation uncertainty, a system reliability estimation method based on probability and statistical theory for distributed monitoring systems is presented. The variance and confidence intervals of the system reliability estimation are obtained by expressing system reliability as a linear sum of products of higher order moments of component reliability estimates when the number of component or system survivals obeys binomial distribution. The eigenfunction of binomial distribution is used to determine the moments of component reliability estimates, and a symbolic matrix which can facilitate the search of explicit system reliability estimates is proposed. Furthermore, a case of application is used to illustrate the procedure, and with the help of this example, various issues such as the applicability of this estimation model, and measures to improve system reliability of monitoring systems are discussed.

关键词： Distributed monitoring system Statistical uncertainty Variance Confidence intervals System reliability estimation

Insight into the degradation mechanism of cefixime under crystallization condition

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Chinese Journal of Chemical Engineering 2018年第7期26卷 1458-1467页

作者： Lingyu Wang Xiaona Li Yumin liu DANDan Han shiyuan liu Teng Zhang Bo Yu Junbo Gong School of Chemical Engineering and Technology Tianjin University

The chemical stability of cefixime was determined by high-performance liquid chromatography （HPLC） under different conditions, including factors such as pH, solvents, initial concentration, temperature and additives. The degradation process follows the first-order kinetics. A pH-rate profile exhibits the U-shape and shows the maximum stability of cefixime at pH = 6. The stability in different pure solvents is ranked as acetone 〉 ethanol 〉 methanol 〉 water, while the degradation rate of cefixime exists a maximum at the ratio of 0.6 in water ＋ methanol mixtures. In addition, the degradation rate increases with the temperature increasing and the activation energy of degradation was found to be 27.078 kJ. mol- 1 in acetone ＋ water mixed solvents. The addition of different additives was proven to either inhibit or accelerate the degradation. The degradation products were analyzed using HPLC, LC-MS and infrared spectroscopy, and the possible degradation pathways in acid as well as alkaline environment were proposed to help us understand the degradation behavior of cefixime.

关键词： Chemical stability Degradation kinetics Degradation Mechanism Cefixime Additives