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Highly-sensitive wafer-scale transfer-free graphene MEMS condenser microphones

Microsystems & Nanoengineering 2024年第1期10卷 267-275页

作者： Roberto Pezone sebastian Anzinger Gabriele Baglioni Hutomo Suryo Wasisto Pasqualina M.Sarro Peter G.Steeneken Sten Vollebregt Laboratory of Electronic Components Technology and Materials(ECTM)Department of MicroelectronicsDelft University of TechnologyDelftThe Netherlands Infineon Technologies AG Am Campeon 1-15Neubiberg 85579Germany Kavli Institue of Nanoscience Department of Quantum NanoscienceDelft University of TechnologyDelftthe Netherlands Department of Precision and Microsystems Engineering(PME) Delft University of TechnologyDelftThe Netherlands

Since the performance of micro-electro-mechanical system(MEMS)-based microphones is approaching fundamental physical,design,and material limits,it has become challenging to improve *** works have demonstrated graphene’s suitability as a microphone *** potential for achieving smaller,more sensitive,and scalable onchip MEMS microphones is yet to be *** address large graphene sizes,graphene-polymer heterostructures have been proposed,but they compromise performance due to added polymer mass and *** work demonstrates the first wafer-scale integrated MEMS condenser microphones with diameters of 2R=220-320μm,thickness of 7 nm multi-layer graphene,that is suspended over a back-plate with a residual gap of 5μ*** microphones are manufactured with MEMS compatible wafer-scale technologies without any transfer steps or polymer layers that are more prone to contaminate and wrinkle the *** designs,all electrically integrated are fabricated and characterized allowing us to study the effects of the introduction of a back-plate for capacitive *** devices show high mechanical compliances C_(m)=0.081-1.07μmPa^(−1)(10-100×higher than the silicon reported in the state-of-the-art diaphragms)and pull-in voltages in the range of 2-9.5 *** addition,to validate the proof of concept,we have electrically characterized the graphene microphone when subjected to sound *** estimated sensitivity of S_(1kHz)=24.3-321 mV Pa^(−1)for a V_(bias)=1.5 V was determined,which is 1.9-25.5×higher than of state-of-the-art microphone devices while having a~9×smaller area.

关键词： transfer plate approaching

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Non-crossing Quantile Regression Neural Network as a Calibration Tool for Ensemble Weather Forecasts

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Advances in Atmospheric Sciences 2024年第7期41卷 1417-1437页

作者： Mengmeng SONG Dazhi YANG sebastian LERCH Xiang'ao XIA Gokhan Mert YAGLI Jamie M.BRIGHT Yanbo SHEN Bai LIU Xingli LIU Martin Janos MAYER School of Electrical Engineering and Automation Harbin Institute of TechnologyHarbin150001China Heidelberg Institute for Theoretical Studies Schloss-Wolfsbrunnenweg 3569118HeidelbergGermany Chair of Statistical Methods and Econometrics Karlsruhe Institute of Technology(KIT)Bluecherstr.1776185KarlsruheGermany Key Laboratory of Middle Atmosphere and Global Environment Observation Institute of Atmospheric PhysicsChinese Academy of SciencesBeijing100029China Solar Energy Research Institute of Singapore(SERIS) National University of Singapore(NUS)Singapore117574Singapore UK Power Networks LondonSE61NPUK China Meteorological Administration Beijing100081China Heilongjiang Meteorological Bureau Harbin150001China Department of Energy Engineering Faculty of Mechanical EngineeringBudapest University of Technology and EconomicsMűegyetem rkp.3H-1111BudapestHungary

Despite the maturity of ensemble numerical weather prediction(NWP),the resulting forecasts are still,more often than not,*** such,forecast calibration tools have become *** those tools,quantile regression(QR)is highly competitive in terms of both flexibility and predictive ***,a long-standing problem of QR is quantile crossing,which greatly limits the interpretability of QR-calibrated *** this point,this study proposes a non-crossing quantile regression neural network(NCQRNN),for calibrating ensemble NWP forecasts into a set of reliable quantile forecasts without *** overarching design principle of NCQRNN is to add on top of the conventional QRNN structure another hidden layer,which imposes a non-decreasing mapping between the combined output from nodes of the last hidden layer to the nodes of the output layer,through a triangular weight matrix with positive *** empirical part of the work considers a solar irradiance case study,in which four years of ensemble irradiance forecasts at seven locations,issued by the European Centre for Medium-Range Weather Forecasts,are calibrated via NCQRNN,as well as via an eclectic mix of benchmarking models,ranging from the naïve climatology to the state-of-the-art deep-learning and other non-crossing *** and stringent forecast verification suggests that the forecasts post-processed via NCQRNN attain the maximum sharpness subject to calibration,amongst all ***,the proposed conception to resolve quantile crossing is remarkably simple yet general,and thus has broad applicability as it can be integrated with many shallow-and deep-learning-based neural networks.

关键词： ensemble weather forecasting forecast calibration non-crossing quantile regression neural network CORP reliability diagram post-processing

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Modeling the dynamics of firms' technological impact

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Chinese Physics B 2021年第12期30卷 111-120页

作者： Shuqi Xu Manuel sebastian Mariani Linyuan Lü Yangtze Delta Region Institute(Huzhou)&Institute of Fundamental and Frontier Sciences University of Electronic Science and Technology of ChinaHuzhou 313001China University Research Priority Program on Social Networks University of ZurichCH-8050 ZurichSwitzerland Beijing Computational Science Research Center Beijing 100193China

Recent studies in complexity science have uncovered temporal regularities in the dynamics of impact along scientific and other creative careers, but they did not extend the obtained insights to firms. In this paper, we show that firms' technological impact patterns cannot be captured by the state-of-the-art dynamical models for the evolution of scientists' research impact, such as the Q model. Therefore, we propose a time-varying returns model which integrates the empiricallyobserved relation between patent order and technological impact into the Q model. The proposed model can reproduce the timing pattern of firms' highest-impact patents accurately. Our results shed light on modeling the differences behind the impact dynamics of researchers and firms.

关键词： firm technological impact patent analysis impact dynamics

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Multi-material additive manufacturing-functionally graded materials by means of laser remelting during laser powder bed fusion

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Frontiers of Mechanical Engineering 2023年第4期18卷 183-193页

作者： Alexander SCHMIDT Felix JENSCH sebastian HÄRTEL Chair of Hybrid Manufacturing Brandenburg University of TechnologyCottbus 03046Germany

Many processes may be used for manufacturing functionally graded *** them,additive manufacturing seems to be predestined due to near-net shape manufacturing of complex geometries combined with the possibility of applying different materials in one *** adjusting the powder composition of the starting material layer by layer,a macroscopic and step-like gradient can be *** further improve the step-like gradient,an enhancement of the in-situ mixing degree,which is limited according to the state of the art,is *** this paper,a novel technique for an enhancement of the in-situ material mixing degree in the melt pool by applying laser remelting(LR)is *** effect of layer-wise LR on the formation of the interface was investigated using pure copper and low-alloy steel in a laser powder bed fusion *** cross-sectional selective electron microscopic analyses were carried *** applying LR,the mixing degree was enhanced,and the reaction zone thickness between the materials was ***,an additional copper and iron-based phase was formed in the interface,resulting in a smoother gradient of the chemical composition than the case without *** Marangoni convection flow and thermal diffusion are the driving forces for the observed effect.

关键词： multi-material additive manufacturing(MMAM) functionally graded materials(FGMs) laser powder bed fusion(L-PBF) laser remelting(LR) pure copper

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How single-cell immunology is benefiting from microfluidic technologies

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Microsystems & Nanoengineering 2020年第1期6卷 728-741页

作者： Fabien C.Jammes sebastian J.Maerkl Institute of Bioengineering School of EngineeringEcole Polytechnique Federale de LausanneLausanneSwitzerland

The immune system is a complex network of specialized cells that work in concert to protect against invading pathogens and tissue *** in this network often result in excessive or absent immune responses leading to allergies,autoimmune diseases,and *** of the mechanisms and their regulation remain poorly *** cells are highly diverse,and an immune response is the result of a large number of molecular and cellular interactions both in time and *** bulk methods are often prone to miss important details by returning population-averaged *** is a need in immunology to measure single cells and to study the dynamic interplay of immune cells with their *** in the fields of microsystems and microengineering gave rise to the field of microfluidics and its application to *** systems enable the precise control of small volumes in the femto-to nanoliter *** controlling device geometries,surface chemistry,and flow behavior,microfluidics can create a precisely defined microenvironment for single-cell studies with spatio-temporal *** features are highly desirable for single-cell analysis and have made microfluidic devices useful tools for studying complex immune *** addition,microfluidic devices can achieve high-throughput measurements,enabling in-depth studies of complex *** has been used in a large panel of biological applications,ranging from single-cell genomics,cell signaling and dynamics to cell–cell interaction and cell migration *** this review,we give an overview of state-of-the-art microfluidic techniques,their application to single-cell immunology,their advantages and drawbacks,and provide an outlook for the future of single-cell technologies in research and medicine.

关键词： fluid network details

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Deep Learning and Time Series-to-Image Encoding for Financial Forecasting

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IEEE/CAA Journal of Automatica Sinica 2020年第3期7卷 683-692页

作者： Silvio Barra Salvatore Mario Carta Andrea Corriga Alessandro sebastian Podda Diego Reforgiato Recupero Department of Mathematics and Computer Science University of CagliariCagliari 09121Italy

In the last decade,market financial forecasting has attracted high interests amongst the researchers in pattern ***,the data used for analysing the market,and then gamble on its future trend,are provided as time series;this aspect,along with the high fluctuation of this kind of data,cuts out the use of very efficient classification tools,very popular in the state of the art,like the well known convolutional neural networks(CNNs)models such as Inception,Res Net,Alex Net,and so *** forces the researchers to train new tools from *** operations could be very time *** paper exploits an ensemble of CNNs,trained over Gramian angular fields(GAF)images,generated from time series related to the Standard&Poor's 500 index future;the aim is the prediction of the future trend of the ***.A multi-resolution imaging approach is used to feed each CNN,enabling the analysis of different time intervals for a single observation.A simple trading system based on the ensemble forecaster is used to evaluate the quality of the proposed *** method outperforms the buyand-hold(B&H)strategy in a time frame where the latter provides excellent *** quantitative and qualitative results are provided.

关键词： Convolutional neural networks(CNNs) ensemble of CNNs financial forecasting Gramian angular fields(GAF)imaging

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A survey of image-based computational learning techniques for frost detection in plants

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Information Processing in Agriculture 2023年第2期10卷 164-191页

作者： Sayma Shammi Ferdous Sohel Dean Diepeveen sebastian Zander Michael G.K.Jones Discipline of Information Technology Murdoch UniversityMurdochWA 6150Australia Centre for Crop and Food Innovation Food Futures InstituteMurdoch UniversityMurdochWA 6150Australia Department of Primary Industries and Regional Development Western AustraliaSouth PerthWA 6151Australia

Frost damage is one of the major concerns for crop growers as it can impact the growth of the plants and hence,*** detection of frost can help farmers mitigating its *** the past,frost detection was a manual or visual ***-based techniques are increasingly being used to understand frost development in plants and automatic assessment of damage resulting from *** research presents a comprehensive survey of the state-of the-art methods applied to detect and analyse frost stress in *** identify three broad computational learning approaches i.e.,statistical,traditional machine learning and deep learning,applied to images to detect and analyse frost in *** propose a novel taxonomy to classify the existing studies based on several *** taxonomy has been developed to classify the major characteristics of a significant body of published *** this survey,we profile 80 relevant papers based on the proposed *** thoroughly analyse and discuss the techniques used in the various approaches,i.e.,data acquisition,data preparation,feature extraction,computational learning,and *** summarise the current challenges and discuss the opportunities for future research and development in this area including in-field advanced artificial intelligence systems for real-time frost monitoring.

关键词： Frost Cold stress Machine learning Image analysis Crop Plant

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Nanoelectromechanical Sensors Based on Suspended 2D Materials

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Research 2020年第1期2020卷 1612-1636页

作者： Max C.Lemme Stefan Wagner Kangho Lee Xuge Fan Gerard J.Verbiest sebastian Wittmann sebastian Lukas Robin J.Dolleman Frank Niklaus Herre S.Jvan der Zant Georg S.Duesberg Peter G.Steeneken Chair of Electronic Devices RWTH Aachen UniversityOtto-Blumenthal-Str.252074 AachenGermany AMO GmbH Advanced Microelectronic Center Aachen(AMICA)Otto-Blumenthal-Str.2552074 AachenGermany Institute of Physics Faculty of Electrical Engineering and Information TechnologyUniversität der Bundeswehr MünchenWerner-Heisenberg-Weg 3985577 NeubibergGermany Division of Micro and Nanosystems KTH Royal Institute of TechnologyMalvinas Vag 1010044 StockholmSweden Department of Precision and Microsystems Engineering Delft University of TechnologyMekelweg 22628 CD DelftNetherlands Infineon Technologies AG Wernerwerkstraße 293049 RegensburgGermany nd Institute of Physics RWTH Aachen UniversityOtto-Blumenthal-Str.52074 AachenGermany Kavli Institute of Nanoscience Delft University of TechnologyLorentzweg 12628 CJ DelftNetherlands

The unique properties and atomic thickness of two-dimensional(2D)materials enable smaller and better nanoelectromechanical sensors with novel *** the last decade,many studies have successfully shown the feasibility of using suspended membranes of 2D materials in pressure sensors,microphones,accelerometers,and mass and gas *** this review,we explain the different sensing concepts and give an overview of the relevant material properties,fabrication routes,and device operation ***,we discuss sensor readout and integration methods and provide comparisons against the state of the art to show both the challenges and promises of 2D material-based nanoelectromechanical sensing.

关键词： Sensors enable accelerometer

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Enabling Virtual Met Masts for wind energy applications through machinelearning-methods

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能源与人工智能(英文) 2023年第1期11卷 26-42页

作者： Sandra Schwegmann Janosch Faulhaber sebastian Pfaffel Zhongjie Yu Martin Dörenkämper Kristian Kersting Julia Gottschall Fraunhofer IWES Küpkersweg 7026129 OldenburgGermany Fraunhofer IEE Königstor 5934119 KasselGermany Technical University of Darmstadt Karolinenplatz 564289 DarmstadtGermany Hessian Center for AI(hessian.AI) Mornewegstraße 3064293 DarmstadtGermany

As wind is the basis of all wind energy projects, a precise knowledge about its availability is needed. For ananalysis of the site-specific wind conditions, Virtual Meteorological Masts (VMMs) are frequently used. VMMsmake use of site calibrated numerical data to provide precise wind estimates during all phases of a wind energyproject. Typically, numerical data are used for the long-term correlation that is required for estimating theyield of new wind farm projects. However, VMMs can also be used to fill data gaps or during the operationalphase as an additional reference data set to detect degrading sensors. The value of a VMM directly dependson its ability and precision to reproduce site-specific environmental conditions. Commonly, linear regressionis used as state of the art to correct reference data to the site-specific conditions. In this study, a frameworkof 10 different machine-learning methods is tested to investigated the benefit of more advanced methods ontwo offshore and one onshore site. We find significantly improving correlations between the VMMs and the reference data when using more advanced methods and present the most promising ones. The K-NearestNeighbors and AdaBoost regressors show the best results in our study, but Multi-Output Mixture of GaussianProcesses is also very promising. The use of more advanced regression models lead to decreased uncertainties;hence those methods should find its way into industrial applications. The recommended regression models canserve as a starting point for the development of end-user applications and services.

关键词： Virtual Met Mast(VMM) Wind power Machine learning Reanalysis data Site assessment Weather Research and Forecasting Model(WRF) Measure-Correlate-Predict(MCP)

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Control of disability glare by means of electrochromic filtering glasses:A pilot study

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Journal of Innovative Optical Health Sciences 2017年第1期10卷 11-20页

作者： Rosa Maria Coco-Martín Ruben Cuadrado-Asensio Ceesar Vega-Colado Ricardo Vergaz Jose M.Sanchez-Pena Ana Viñuales Sergi Peris Pau artús M.Begona Coco-Martín IOBA Universidad de ValladolidValladolidSpain GDAF-UC3M Grupo de Displays y Aplicaciones Fotonicas Department de Tecnologia Electronica Universidad Carlos III de MadridSpain IK4-CIDETEC Parque Tecnologico de San Sebastian GuipuzcoaSpain Indo Optical Group Departamento I+D SantCugat del Valles BarcelonaSpain GIDFYS European University Miguel de Cervantes(UEMC)Department of HealthSciencesSpain

Purpose:To evaluate the potential clinical usability of a new prototype of ophthalmic blue light filters developed by using electrochromic technology in pseudophakic patients complaining of ***:A prototype of electrochromic device was developed,with a specific frame that enclosed an electronic driver that allowed personalizing its function for each patient.A pro-spective,observational case series study was performed to test *** patients who had un-dergone cataract surgery with clear intraocular lenses and complaining of glare were included in the *** outcome measures were the results obtained in the satisfaction questionnaire that was delivered to ***,visual acuity,contrast sensitivity,and reading ability data were evaluated with and without the prototype under diferent lighting conditions and different modes of the prototype after a complete month of *** transmittance was also ***:Visual acuity,contrast sensitivity and reading function did not change significantly with prototype *** main activity for which the prototype was used was *** one patient found that the dimming level was *** patients reported variable discomfort when passing tunnels,not sufficiently clear indoors,or put on and remove *** lenses slightly decreased their transmittance at the end of the ***:Glasses based on elect rochromic technology may be acceptable for outdoor/indoor use and for distance-near *** studies with larger samples must be conducted to confirm the clinical usability of these glasses.

关键词： Optical filters electro-optical devices technical visual aids electronic control.

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