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Flexible thin-film acoustic wave devices with off-axis bending characteristics for multisensing applications

Microsystems & Nanoengineering 2021年第6期7卷 151-159页

作者： Zhangbin Ji Jian Zhou Huamao Lin Jianhui Wu Dinghong Zhang sean garner Alex Gu Shurong Dong YongQing Fu Huigao Duan College of Mechanical and Vehicle Engineering Hunan University410082 ChangshaChina Shanghai IndustrialμTechnology Research Institute(SITRI) 235 Chengbei Rd201800 ShanghaiChina Corning Research&Development Corporation One River Front PlazaNewarkNY 14831USA College of Information Science and Electronic Engineering Zhejiang University310027 HangzhouChina Faculty of Engineering and Environment Northumbria UniversityNewcastle upon Tyne NE18STUK

Flexible surface acoustic wave(SAW)devices have recently attracted tremendous attention for their widespread application in sensing and ***,for these applications,SAW devices often need to be bent into offaxis deformations between the acoustic wave propagation direction and bending ***,there are few studies on this topic,and the bending mechanisms during off-axis bending deformations have remained unexplored for multisensing ***,we fabricated aluminum nitride(AlN)flexible SAW devices by using high-quality AlN films deposited on flexible glass substrates and systematically investigated their complex deformation behaviors.A theoretical model was first developed using coupling wave equations and the boundary condition method to analyze the characteristics of the device with bending and off-axis deformation under elastic *** relationships between the frequency shifts of the SAW device and the bending strain and off-axis angle were obtained,and the results were identical to those from the theoretical ***,we performed proof-of-concept demonstrations of its multisensing potential by monitoring human wrist movements at various off-axis angles and detecting UV light intensities on a curved surface,thus paving the way for the application of versatile flexible electronics.

关键词： bending wave characteristics

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