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Effect of carbon on microstructure of CrAlC_xN_(1-x) coatings by hybrid coating system

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Transactions of Nonferrous Metals Society of China 2011年第A1期21卷 78-82页

作者： Sung-Kyu AHN se-hun kwon Kwang-Ho KIM National Core Research Center for Hybrid Materials Solution Pusan National University School of Materials Science and Engineering Pusan National University

A systematic investigation of the microstructure of CrAlCxN1-x coatings as a function of carbon contents was conducted. Quaternary CrAlCxN1-x coatings were deposited on Si wafers by a hybrid coating system combining an arc-ion plating technique and a DC reactive magnetron sputtering technique using Cr and Al targets in the Ar/N2/CH4 gaseous mixture. The effect of carbon content on microstructure of CrAlCxN1-x coatings was investigated with instrumental analyses of X-ray diffraction, X-ray photoelectron, and high-resolution transmission electron microscopy. The results show that the carbon content of CrAlCxN1-x coatings linearly increases with increasing CH4/(CH4/N2) gas flow rate ratio. The surface roughness of the CrAlCxN1-x coating layer decreases with the increase of carbon content.

关键词：涂料系统混合气体微观结构碳含量高分辨透射电子显微镜 X射线光电子能谱磁控溅射技术涂层

Characteristics of damaged layer in micro-machining of copper material

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中国有色金属学会会刊：英文版 2009年第B9期19卷 295-300页

作者： Dong-Hee kwon Jeong-Suk KIM Myung-Chang KANG se-hun kwon Jong-Hwan LEE School of Mechanical Engineering Pusan National University National Core Research Center for Hybrid Materials Solution Pusan National University Department of Mechatronics Busan College of Korea Polytechnic Ⅶ

The study on damaged layer is necessary for improving the machinability in micro-machining because the damaged layer affects the micro mold life and micro machine parts. This study examined the ultra-precision micro-machining characteristics, such as cutting speed, feed rate and cutting depth, of a micro-damaged layer produced by an ultra-high speed air turbine spindle. The micro cutting force, surface roughness and plastic deformation layer were investigated according to the machining conditions. The damaged layer was measured using optical microscope on samples prepared through metallographic techniques. The scale of the damaged layer depends on the cutting process parameters, particularly, the feed per tooth and axial depth of the cut. According to the experimental results, the depth of the damaged layer is increased by increasing the feed per tooth and cutting depth, also the damaged layer occurs less in down-milling compared with up-milling during the micro-machining operation.

关键词：机械加工性微观特征损伤层铜材样品制备技术微型机器切削速度切削深度

Dielectrophoretic assembly of semiconducting single-walled carbon nanotube transistor

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Transactions of Nonferrous Metals Society of China 2011年第A1期21卷 126-129页

作者： se-hun kwon Young-Keun JEONG Soongeun kwon Myung-Chang KANG Hyung-Woo LEE National Core Research Center for Hybrid Materials Solution Pusan National University Department of Mechanical Engineering Korea Advanced Institute of Science and Technology (KAIST) Daejeon 305-701 Korea

A novel burning technique for making a semiconducting single-walled carbon nanotubes (SWNTs) transistor assembled by the dielectrophoretic force was suggested. The fabrication process consisted of two steps. First, to align and attach a bundle of SWNTs between the source and drain, the alternating (AC) voltage was applied to the electrodes. When a bundle of SWNTs was connected between two electrodes, some of metallic nanotubes and semi-conducing nanotubes existed together. The second step is to burn the metallic SWNTS by applying the voltage between two electrodes. With increasing the voltage, more current flowed through the metallic SWNTs, thus, the metallic SWNTs burnt earlier than the semiconducting one. This technique enables to obtain only semi-conducting SWNTs connection in the transistor. Through the I—V characteristic graph, the moment of metallic SWNTs burning and the characteristic of semi-conducing nanotubes were verified.

关键词：碳纳米管晶体管单壁碳纳米管束半导体燃烧技术制造过程 SWNTs 管连接特性图

Electrical and Corrosion Properties of Titanium Aluminum Nitride Thin Films Prepared by Plasma-Enhanced Atomic Layer Deposition

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Journal of Materials Science & Technology 2017年第3期33卷 295-299页

作者： Eun-Young Yun Woo-Jae Lee Qi Min Wang se-hun kwon School of Materials Science and Engineering Pusan National University School of Electromechanical Engineering Guangdong University of Technology

Titanium-aluminum-nitride（TiAlN） films were grown by plasma-enhanced atomic layer deposition（PEALD）on 316 L stainless steel at a deposition temperature of 200 °C. A supercycle, consisting of one AlN and ten TiN subcycles, was used to prepare TiAlN films with a chemical composition of Ti（0.25）Al（0.25）N（0.50）. The addition of AlN to TiN resulted in an increased electrical resistivity of TiAlN films of 2800 μΩ cm, compared with 475 μΩ cm of TiN films, mainly due to the high electrical resistivity of AlN and the amorphous structure of TiAlN. However, potentiostatic polarization measurements showed that amorphous TiAlN films exhibited excellent corrosion resistance with a corrosion current density of 0.12 μA/cm^2, about three times higher than that of TiN films, and about 12.5 times higher than that of 316 L stainless steel.

关键词： Titanium-aluminum nitride Plasma-enhanced atomic layer deposition Corrosion protection Ternary transition metal nitrides

Lubrication properties of silver-palladium alloy prepared by ion plating method for high temperature stud bolt

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Transactions of Nonferrous Metals Society of China 2011年第A1期21卷 12-16页

作者： Jung-Dae kwon Sunghun LEE Koo-Hyun LEE Jong-Joo RHA Kee-seok NAN se-hun kwon Materials Processing Division Korea Institute of Materials Science Changwon Gyeongnam 641-831 Korea National Core Research Center for Hybrid Materials Solution Pusan National University

As a solid lubricant, silver-palladium (Ag-Pd) alloy coating was investigated for the application to high temperature stud bolt. A glue layer nickel (Ni) film was deposited on the surface of the hex bolt sample and then Ag-Pd alloy coating was performed on it using ion plating method. The friction coefficient of Ag-Pd alloy film coated bolt was lower than that of N-5000 oil coated bolt by the result of axial force measurement. The cyclic test of heat treatment was conducted to evaluate the durability of Ag-Pd alloy film coated bolt. In a cycle, sample was assembled into the block using torque wrench, followed by heating and disassembling. It was not successful to disassemble the N-5000 oil coated bolt from the block after only one cycle. However, the Ag-Pd alloy film coated bolt was able to be disassembled softly till 12 cycles.

关键词：银钯合金高温螺栓离子镀润滑性能薄膜涂层固体润滑剂合金镀层六角螺栓

Effects of Cr interlayer on mechanical and tribological properties of Cr-Al-Si-N nanocomposite coating

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Transactions of Nonferrous Metals Society of China 2011年第A1期21卷 62-67页

作者： Young Su HONG se hun kwon Tiegang WANG Doo-In KIM Jihwan CHOI Kwang Ho KIM School of Materials Science and Engineering Pusan National University National Core Research Center for Hybrid Materials Solution Pusan National University

Cr-Al-Si-N coatings were deposited on SUS 304 substrate by a hybrid coating system. A Cr interlayer was introduced between Cr-Al-Si-N coating and SUS 304 substrate to improve the coating adherence. The effects of Cr interlayer on the microhardness, adhesion, and tribological behavior of Cr-Al-Si-N coatings were systematically investigated. The results indicate that the microhardness of the Cr-Al-Si-N coatings gradually deceases with increasing thickness of Cr interlayers. The adhesion between Cr-Al-Si-N and SUS 304 substrate is improved by addition of the Cr interlayers. A peak critical load of ~50 N is observed for the coating containing Cr interlayer of 60 nm as compared ~ 20 N for the coating without Cr interlayer. The thicker Cr interlayers result in reduced critical load values. Moreover, the wear resistance of the Cr-Al-Si-N coatings is greatly enhanced by introducing the Cr interlayer with thickness of 60 nm in spite of the decreased microhardness. The friction coefficient of the coating system is also moderately reduced.

关键词：夹层厚度铬涂层复合涂层纳米晶摩擦学性能 SI 中间层涂料机械

Hybrid functional IrO_2-TiO_2 thin film resistor prepared by atomic layer deposition for thermal inkjet printheads

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Transactions of Nonferrous Metals Society of China 2011年第A1期21卷 88-91页

作者： Won-Sub KWACK Hyoung-seok MOON seong-Jun JEONG Qi-min WANG se-hun kwon National Core Research Center for Hybrid Materials Solution Pusan National University Busan 609-735 Korea Department of Materials Science and Engineering Korea Advanced Institute of Science and Technology Daejon 373-1 Korea

IrO2-TiO2 thin films were prepared by atomic layer deposition using Ir(EtCp)(COD) and titanium isopropoxide (TTIP). The resistivity of IrO2-TiO2 thin films can be easily controlled from 1 500 to 356.7 μΩ·cm by the IrO2 intermixing ratio from 0.55 to 0.78 in the IrO2-TiO2 thin films. The low temperature coefficient of resistance(TCR) values can be obtained by adopting IrO2-TiO2 composite thin films. Moreover, the change in the resistivity of IrO2-TiO2 thin films was below 10% even after O2 annealing process at 600 °C. The step stress test results show that IrO2-TiO2 films have better characteristics than conventional TaN0.8 heater resistor. Therefore, IrO2-TiO2 composite thin films can be used as a heater resistor material in thermal inkjet printhead.

关键词： IrO2 喷墨打印头原子层沉积二氧化钛薄膜电阻制备 TiO2薄膜沉积法

Theoretical Simulation of Surface Evolution Using the Random Deposition and Surface Relaxation for Metal Oxide Film in Atomic Layer Deposition

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Journal of Materials Science & Technology 2010年第4期26卷 371-374页

作者： Ji-Hoon Ahn se-hun kwon Jin-Hyock Kim Ja-Yong Kim Sang-Won Kang Department of Materials Science and Engineering Korea Advanced Institute of Science and Technology373-1Kusong-dongYusong-guTaejon 305-701Korea Hynix semiconductor Incorporated San 136-1Ami-riBubal-eubIcheon-siKyongki-do467-701Korea

Atomic layer deposition （ALD） has become an essential deposition method for forming nanometer scale thin films in the microelectronics industry, and its applications have been extended to multi-component thin films, as well as to single metal oxide films. In order to investigate the development of the surface structure of ultra-thin film qualitatively as well as quantitatively, ALD processes are simulated with a molecular scale. For this simulation, the film materials are deposited on a imaginary substrate that consists of small lattice. The deposition behaviors are described by using random deposition （RD） model or random deposition with surface relaxation （RDSR） model as the ALD growth mode, and the proposed model was applied to the deposition of SrO-TiO2 thin films. Through this work, growth characteristics such as surface morphology, deposited film coverage can be predicted.

关键词： Atomic layer deposition Random deposition SrO-TiO2

Towards high-performance and robust anion exchange membranes(AEMs)for water electrolysis:Super-acid-catalyzed synthesis of AEMs

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Journal of Energy Chemistry 2024年第6期93卷 478-510,I0012页

作者： Geun Woong Ryoo Sun Hwa Park Ki Chang kwon Jong hun Kang Ho Won Jang Min Sang kwon Department of Materials Science and Engineering Research Institute of Advanced Materials(RIAM)Seoul National UniversitySeoul 08826Republic of Korea Interdisciplinary Materials Measurement Institute Korea Research Institute of Standards and Science(KRISS)Daejeon 34113Republic of Korea Department of Chemical and Biological Engineering and Institute of Chemical ProcessSeoul National UniversitySeoul 08826Republic of Korea Department of Applied Measurement Science University of Science and TechnologyDaejeon 34113Republic of Korea

The increasing demand for hydrogen energy to address environmental issues and achieve carbon neutrality has elevated interest in green hydrogen production,which does not rely on fossil *** various hydrogen production technologies,anion exchange membrane water electrolyzer(AEMWE)has emerged as a next-generation technology known for its high hydrogen production efficiency and its ability to use non-metal ***,this technology faces significant challenges,particularly in terms of the membrane durability and low ionic *** address these challenges,research efforts have focused on developing membranes with a new backbone structure and anion exchange groups to enhance durability and ionic ***,the super-acid-catalyzed condensation(SACC)synthesis method stands out due to its user convenience,the ability to create high molecular weight(MW)polymers,and the use of oxygen-tolerant organic *** the synthesis of anion exchange membranes(AEMs)using the SACC method began in 2015,and despite growing interest in this synthesis approach,there remains a scarcity of review papers focusing on AEMs synthesized using the SACC *** review covers the basics of SACC synthesis,presents various polymers synthesized using this method,and summarizes the development of these polymers,particularly their building blocks including aryl,ketone,and anion exchange *** systematically describe the effects of changes in the molecular structure of each polymer component,conducted by various research groups,on the mechanical properties,conductivity,and operational stability of the *** review will provide insights into the development of AEMs with superior performance and operational stability suitable for water electrolysis applications.

关键词： Green hydrogen production Water electrolysis Anion exchange membrane water electrolyzer(AEMWE) Anion exchange membranes(AEMs) Super-acid-catalyzed condensation(SACC)